The National Technology Roadmap of Ultra Precision Machining System
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박천홍
(한국기계연구원 공장기계그룹)
황경현 (한국기계연구원) |
| 1 | Korea Institute for Industrial Economics and Trade, 'A Vision for the 2010 Industry Development,' 2001 |
| 2 | Korea Institute of Industrial Technology Evaluation and Planning, The Ministry of Commerce, Industry and Energy, 'Report on the Optical Fiber Roadmap,' 2001 |
| 3 | Korean Institute of Science and Technology Evaluation and Planning, 'Conference Notes for the 2nd Step National Technology Roadmap,' 2002 |
| 4 | Korea Institute of Industrial Technology Evaluation and Planning, The Ministry of Commerce, Industry and Energy, 'Report on the Digital Home Appliances Roadmap,' 2001 |
| 5 | N.Taniguchi, 'On the basic concept of nanotechnlogy,' proceedings of ICPE. Tokyo, 1974 |
| 6 | N.Taniguchi, 'The state of the art of nanotechnology for processing of ultraprecision and ultrafine products,' ASPE, Vol. 16, No. 1, pp.5-24, 1994 DOI ScienceOn |
| 7 | International Technology Roadmap for Semiconductors, 2001 edition, SEMATECH |
| 8 | C. W. Gwyn, R. Stulen, D. Sweeney, and D. Attwood, 'Extreme ultraviolet lithography,' J. Vac. Sci. Technol. B, Vol. 16, No. 6, Nov/Dec 1998 |
| 9 | The Ministry of Science and Technology, 'Development of an Ultra Precision Machine Tools for Non-spherical Machining,' 1995 |
| 10 | The Ministry of Finance and Economy, 'Extraction of the Essential Technology for the 1st Step National Technology Roadmap,' 2002 |
| 11 | Keith Diefendorff, 'EXTREME LITHOGRAPHY-Intel Backs EUV for Next-Generation Lithography,' Microprocessor report, June 19, 2000, pp. 1-10 |
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