Design & Manufacturing

Korean Society of Die & Mold Engineering (한국금형공학회)
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Research on ultra-precision fine-pattern machining through single crystal diamond tool fabrication technology

단결정 다이아몬드공구 제작 기술을 통한 초정밀 미세패턴 가공 연구

  • Jung, Sung-Taek (Department of Mechanical Convergence Engineering, Induk University) ;
  • Song, Ki-Hyeong (Korea Institute of Industrial Technology (KITECH), IT Converged Process R&D Group) ;
  • Choi, Young-Jae (Korea Institute of Industrial Technology (KITECH), IT Converged Process R&D Group) ;
  • Baek, Seung-Yub (Department of Mechanical Convergence Engineering, Induk University)
  • 정성택 (인덕대학교 융합기계공학과) ;
  • 송기형 (한국생산기술연구원 IT융합공정그룹) ;
  • 최영재 (한국생산기술연구원 IT융합공정그룹) ;
  • 백승엽 (인덕대학교 융합기계공학과)
  • Received : 2020.09.20
  • Accepted : 2020.09.30
  • Published : 2020.09.30
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Abstract

As the consumer market in the VR(virtual reality) and the head-up display industry grows, the demand for 5-axis machines and grooving machines using on a ultra-precision machining increasing. In this paper, ultra-precision diamond tools satisfying the cutting edge width of 500 nm were developed through the process research of a focused ion beam. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam. In order to reduce the influence of the Gaussian beam emitted from the focused ion beam, the lift-off process technology used in the semiconductor process was used. 2.9 ㎛ of Pt was coated on the surface of the diamond tool. The sub-micron tool with a cutting edge of 492.19 nm was manufactured through focused ion beam machining technology. Toshiba ULG-100C(H3) equipment was used to process fine-pattern using the manufactured ultra-precision diamond tool. The ultra-precision machining experiment was conducted according to the machining direction, and fine burrs were generated in the pattern in the forward direction. However, no burr occurred during reverse machining. The width of the processed pattern was 480 nm and the price of the pitch was confirmed to be 1 ㎛ As a result of machining.

Keywords

Acknowledgement

본 연구는 기계산업핵심기술개발사업 "고정밀 광학부품용 가공기 및 초정밀 Grooving 머신실증" 과제번호(20007244) 연구비 지원으로 진행되었습니다. 이에 감사를 드립니다.

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