• Design & Manufacturing
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• 제14권3호
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• pp.63-70
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• 2020

As the consumer market in the VR(virtual reality) and the head-up display industry grows, the demand for 5-axis machines and grooving machines using on a ultra-precision machining increasing. In this paper, ultra-precision diamond tools satisfying the cutting edge width of 500 nm were developed through the process research of a focused ion beam. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam. In order to reduce the influence of the Gaussian beam emitted from the focused ion beam, the lift-off process technology used in the semiconductor process was used. 2.9 ㎛ of Pt was coated on the surface of the diamond tool. The sub-micron tool with a cutting edge of 492.19 nm was manufactured through focused ion beam machining technology. Toshiba ULG-100C(H3) equipment was used to process fine-pattern using the manufactured ultra-precision diamond tool. The ultra-precision machining experiment was conducted according to the machining direction, and fine burrs were generated in the pattern in the forward direction. However, no burr occurred during reverse machining. The width of the processed pattern was 480 nm and the price of the pitch was confirmed to be 1 ㎛ As a result of machining.

• Design & Manufacturing
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• 제14권2호
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• pp.56-61
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• 2020

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

• 한국융합학회논문지
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• 제9권5호
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• pp.145-150
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• 2018

공작기계의 주축은 황삭 가공에서 부터 정삭가공에 이르는 다양한 작업들이 가능해야 하고, 정속운동 또는 회전 위치결정의 기능을 수행해야 되므로 주축설계에 고려해야 할 변수들이 많다. 주축이동식자동선반은 고정식자동선반에 비해 샤프트가 가늘고 긴 핀 들을 작업할 때 좋은 선반이다. 고정식 자동선반에 비해 외경가공의 밀도가 매우 높다. 주축 이송형 선반은 주로 소형 제품을 정밀가공 할 경우에 사용되므로 가공 정밀도가 높아야 한다. 최대 외경 가공 한계 치수는 Ø32, 내경가공 한계 치수는 Ø6까지 가공이 가능하게 제작되어야 한다. 본 연구에서는 주축이동식 자동선반에 사용되는 SCM440 소재의 정 동적특성을 이동식 선반에 적용하여 분석하였다. 주축의 정,동적 특성에 영향을 미치는 인자들을 고려하여 고속화 및 고정밀도를 갖는 최적설계기술이 확보하기 위하여 수치해석을 이용하여 분석하였다.

• Design & Manufacturing
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• 제17권2호
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• pp.15-21
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• 2023

In this study, a diamond turning machine and a laser-assisted machining module were utilized for the complex combined cutting of aspheric shapes and fine patterns on the surface of high-hardness brittle material, silicon. The analysis of material's form accuracy and corrective machining was conducted based on key factors such as laser output, rotational speed, feed rate, and cutting depth to achieve form accuracy below 1 ㎛ and surface roughness below 0.1 ㎛. The cutting condition and corrective machining methods were investigated to achieve the desired form accuracy and surface roughness. The rotational speed of the spindle and the linear feed rate of the diamond turning machine were varied in five stages for the cutting condition test. Surface roughness and form accuracy were measured using both a contact surface profilometer and a non-contact surface profilometer. The experimental results revealed a tendency of improved surface roughness with increased rotational speed of the workpiece, and the best surface roughness and form accuracy were observed at a feed rate of 5 mm/min. Furthermore, based on the cutting condition experiments, corrective machining was performed. The experimental results demonstrated an improvement in form accuracy from 0.94 ㎛ to 0.31 ㎛ and a significant reduction in the average value of the surface roughness curve from 0.234 ㎛ to 0.061 ㎛. This research serves as a foundation for future studies focusing on the machinability in relation to laser output parameters.

• 대한기계학회논문집A
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• 제39권8호
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• pp.759-763
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• 2015

레이저 가공 공정은 마스크 없이 전극을 가공할 수 있다는 장점 때문에 우수한 공정들 중의 하나로 제안되고 있다. 본 논문에서는, 서로 다른 열적 물성을 가지는 금속들에 레이저 가공을 수행하였다. 이 금속들은 서로 다른 표면형상, 열영향부, 그리고 재융착층을 나타내었고 이는 열전도도, 끓는점, 그리고 열확산계수에 의존하였다. 또한 재융착층을 제거하기 위하여 초음파 원용 레이저 가공을 적용, 높은 열확산계수를 가지는 재료에서 그 초음파 가진에 의한 표면 품질의 향상을 발견하였다.