• Title/Summary/Keyword: Tube-sheet

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A Study on the Phosphorous Concentration and Rs Property of the Doped Polysilicon by LPCVD Method of Batch type (Batch 형태 LPCVD법에 의한 폴리실리콘의 인농도 및 Rs 특성에 관한 연구)

  • 정양희;김명규
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.3
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    • pp.195-202
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    • 1998
  • The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

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An Experimental Study on Flow and Heat / Mass Transfer Characteristics of $LiBr-H_2O$ Solution Flowing over a Cooled Horizontal Tube (수평 냉각관 외부를 흘러내리는 $LiBr-H_2O$ 수용액의 유동 및 열/물질 전달 특성에 관한 실험적 연구)

  • Seal, Sin-Su;Lee, Sang-Yang
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.8
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    • pp.1085-1096
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    • 2000
  • An experimental study was performed to examine the heat and mass transfer characteristics of $LiBr-H_2O$ solution flowing over a single horizontal tube with the water vapor absorption. Effects of the flow rate and the temperature of the solution at the top of the tube, the absorber pressure and the drainage pattern were considered. The absorption rate depends highly on the absorber pressure at the low flow rate condition while on the solution inlet temperature at the high flow rate condition. Also, when the flow rate is low, the absorption performance with the sheet flow drainage appeared to be higher than that with the dripping/jet drainage. However, at the high flow rate condition, the case became reversed. The liquid film became wavy with the higher absorption rate. The waves were more probable to form with the lower flow rate and temperature of the solution, and with the higher absorber pressure.

An Experimental Study on TR-CFT Columns subjected to Axial Force and Cyclic Lateral Loads (축력과 반복수평력을 받는 TR-CFT기둥에 관한 실험적 연구)

  • Park, Jai Woo;Kim, Jin Ho;Hong, Young Kyun;Hong, Gi Soup
    • Journal of Korean Society of Steel Construction
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    • v.19 no.4
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    • pp.403-411
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    • 2007
  • CFT (Concrete filled steel tube) column has become popular for building construction due to not only its composite effect but also economic effect. However, the conventional CFT column also has its own disadvantages having plastic buckling at the end of column followed by the reduction of strength by yielding of steel tube. An experiment on TR-CFT (Transversely reinforced CFT) column are conducted for making up for conventional CFT column's disadvantages. The experiment parameters are strength of concrete, the layer numbers of carbon fiber sheet. In this study, hysteretic curve, initial stiffness, strength, plastic deformation capacity, and dissipated energy are compared and analyzed between CFT and TR-CFT columns.

Flexural strength of high-strength concrete filled steel tube columns strengthened by carbon fiber sheets (탄소섬유쉬트로 보강한 고강도 콘크리트 충전강관(CFT) 기둥의 휨내력에 관한 연구)

  • Park, Jai-Woo;Hong, Young-Kyun;Hong, Gi-Soup
    • Journal of the Earthquake Engineering Society of Korea
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    • v.12 no.1
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    • pp.21-28
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    • 2008
  • The CFT (Concrete Filled Steel Tube) columns became popular in high rise building construction due to not only its composite effect but also economic advantage. However, it has been pointed out in various previous researches that the current practice in CFT columns may lead the steel tube to probable local buckling at critical sections of the columns right after yielding. To resolve such a problem, the TR-CFT (Transversely Reinforced Concrete Filled Steel Tube) column is proposed to control or at least delay the local buckling state at the critical section by wrapping the CFT columns with carbon fiber sheet. The validity of the proposed column system is validated through the present paper by observing the experimental performance and comparing it with the analytical prediction of the TR-CFT columns with hish strength concrete. It is also shown that the current design code provisions such as ACI-318, in which the contribution of concrete confining effect filled in steel tube is not appropriately accounted for, may contain too much conservatism.

판재성형의 유한요소해석

  • 강정진;오수익;정영철;박종진
    • Journal of the Korean Society for Precision Engineering
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    • v.17 no.4
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    • pp.38-47
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    • 2000
  • Recently, finite element method has been used as an effective tool in the design process of sheet metal forming. In the present study, an implicit method and an explicit method have been developed for 2D analysis and 3D analysis, respectively, and applied to several processes including plane strain draw bending and TWB sqaure cup drawing. Also, commercial codes are used for geometrically complex problems, such as tube hydroforming, "L" cup deep drawing and side frame forming. In this paper, basic formulations used in the methods are introduced and results obtained from the applications are discussed.discussed.

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Analysis of Welding Distortion for Laser Welded Sheet Metal Structures of Aluminum Alloy (레이저용접에 의한 알루미늄 박판구조물의 용접변형 해석)

  • Kwon, Ki-Bo;Kim, Jae-Woong;Kim, Cheol-Hee
    • Journal of Welding and Joining
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    • v.27 no.3
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    • pp.44-51
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    • 2009
  • In this study, welding distortion analysis is performed for various design of tube shape structures which are assembled with aluminum sheet metal. Aluminum 5052 plates of 1mm thickness are used to analyze. An efficient keyhole model, as a welding heat source, is used for the prediction of full penetration weld size and shape which is required for the thermal analysis. The thermal and mechanical material properties are considered as temperature dependent functions, due to the high temperature variations during the welding. The numerical model is calculated by using a commercial software and evaluated with the experiments. The calculation results could make a comparative study in the view of distortion for the various size and shape of structure.

Development of Rubber Sleeve for Reduction of End-mark in Cold Rolled Steel Sheet (고급강판용 엔드마크 감소를 위한 고무 슬리브의 개발)

  • Kim, Soon-Kyung;Kim, Dong-Keon
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.14 no.1
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    • pp.29-35
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    • 2015
  • In this study, a FEM analysis is undertaken of a rubber sleeve which is mounted onto a spreading mandrel so as to avoid marking the first wrappings of coils (known as the 'end-mark'), as occasionally occurs when a concentrated load is placed on the edge of a steel sheet, significantly reducing its quality. A commercial numerical package, ANSYS, was utilized to analyze the structural behavior of the rubber sleeve. In general, the strain of the sleeve increases as the thickness of the rubber layer (H) covering the tubes increases, thus also increasing the surface of the sleeve for a constant boundary condition, and decreasing the pitch (P) between each tube, resulting in an increase in the strain on the surface of the sleeve for all rubber thickness conditions tested here. In a comparison of two different materials, rubber and urethane, when H=3 mm and P=1.1D, the maximum total deformations in these cases are 0.12669 mm and 0.086623 mm, respectively.

Fabrication of Transparent Heat-element using Single- Walled Carbon Nanotubes

  • Jeong, Hyeok;Vanquy, Nguyen;Lee, Han-Min;Kim, Dong-Hyeon;Kim, Do-Jin
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.31.2-31.2
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    • 2009
  • In this research, single walled carbon nano-tube film was manufactured with spray coating method on glass for application as transparent heat element. SWNTs solution to be used for spraying is obtained by dispersion of 0.01 wt% purified SWNTs in dimethylformamide (DMF) solution through ultrasonification and centrifugation. The transmittance and sheet resistance of SWNTs film were determined by the number of spray injection. Manufactured SWNTs film will have sheet resistance range of $200\;\Omega/\square-900\;\Omega/\square$ at transmittance range of 70-90 %. Heat generation characteristic of SWNTs film was measured by applying constant DC voltage of 15V. The result confirmed that SWNTs film with sheet resistance of $200\;\Omega/\square$ reaches surface temperature of $80^{\circ}C$ within several seconds. In addition, PET coating film was coated on top of the SWNTs film by using laminator in order to solve weak adhesive property of the spray coated SWNTs film on the substrate as well as to maintain its electrical and optical properties.

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Design of High-Frequency Induction Heating Welder for Synthetic Resin Sheet (합성수지 소재 접착을 위한 고주파 유도가열 접착기 설계)

  • 추연규;김현덕;장우환
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.7 no.7
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    • pp.1533-1538
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    • 2003
  • The present technology of dielectric heating welding for synthetic resin sheet has a switching frequency over 10MHz by using vacuum tube elements, and has restrictively been applied to PVC whose dielectric loss is comparably high. The technology, however, has a difficulty in applying to materials which are made for environment and have low dielectric lose compared with other synthetic resin materials. Recently, the application of materials made for environment is increased so that the technology is faced with the limit. In this paper, a high frequency induction heating welder for synthetic resin sheet is designed applying temperature control by indirect heating to solve the problems about direct heating synthetic resin made for environment.

Wolsong Unit 1 Steam Generator Aging Management for Continued Operation (월성 1호기 계속운전을 위한 증기발생기 열화관리)

  • Song, Myung Ho;Kim, Hong Key;Lee, Jung Min
    • Transactions of the Korean Society of Pressure Vessels and Piping
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    • v.6 no.2
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    • pp.28-33
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    • 2010
  • As a part of license renewal for the continued operation of Wolsong unit 1, the periodic safety review report was submitted near the end of design lifetime, 2012, and now is under reviewing. Major components of primary system such as pressure tubes, feeder pipes and so on are being replaced and many components of secondary system are also being repaired. So the license renewal of Wolsong unit 1 is expected to be acquired without significant issues. But on the other hand, steam generators of Wolsong unit 1 had the good performance and therefore the replacement and repair for the steam generator are not needed. Recently it is reported that some cracks were detected in a few of european steam generator with Alloy 800 tubes and the cause of cracks was the outer diameter stress corrosion cracking(ODSCC) due to the concentration of chemical impurities on the outer surface of tube. Accordingly the overall review on this issue was performed. The long-term operation is likely to results to form the concentration mechanism for the tube corrosion as the sludge build-up in the secondary side of steam generator and the crack in the crevice between tube and tube-sheet and expansion transitions is apt to be occurred. In this paper, the history of steam generator inspection and operation of Wolsong unit 1 are reviewed and the reliability of steam generator tube is evaluated and the steam generator aging management program for Wolsong unit 1 is introduced.

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