• Title/Summary/Keyword: Trim conditions

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Control of Defect Produced in a Retrograde Triple Well Using MeV Ion Implantation (MeV 이온주입에 의한 Retrograde Triple-well 형성시 발생하는 결합제어)

  • 정희석;고무순;김대영;류한권;노재상
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2000.11a
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    • pp.17-20
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    • 2000
  • This study is about a retrograde triple well employed in the Cell tr. of next DRAM and flash memory. triple well structure is formed deep n-well under the light p-well using MeV ion implantation. MeV P implanted deep n-well was observed to show greatly improved characteristics of electrical isolation and soft error. Junction leakage current, however, showed a critical behavior as a function of implantation and annealing conditions. {311} defects were observed to be responsible for the leakage current. {311} defects were generated near the R$\sub$p/ (projected range) region and grown upward to the surface during annealing. This is study on the defect behavior in device region as a function of implantation and annealing conditions.

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A study on the warpage and post-deformation in heat resistance test of automotive plastic components (자동차 플라스틱 부품의 내열변형 예측에 관한 연구)

  • Kim, H.Y.;Kim, J.J.;Kim, J.S.
    • Journal of the Korean Society for Precision Engineering
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    • v.13 no.5
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    • pp.44-52
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    • 1996
  • A procedure predicting warpage and post-deformation due to heat resistance test is presented. The procedure is applied to the injection molding processes of automotive plastic components, which are the door trim and the instrument pannel. The warpage of products is obtained from the residual stress after filling, packing and cooling process, and the post deformation due to the heat resistance test is calculated in the structural analysis of the product at the ejection temperature with the initial condition of residual stress, the boundary conditions and heat resistance conditions. The analyses give some useful guide lines in the design of automotive plastic parts which should satisfy heat resistance regulation.

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Control of Defect Produced in a Retrograde Triple Well Using MeV Ion Implantation (MeV 이온주입에 의한 Retrograde Triple-well 형성시 발생하는 결함제어)

  • 정희석;고무순;김대영;류한권;노재상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.17-20
    • /
    • 2000
  • This study is about a retrograde triple well employed in the Cell tr. of next DRAM and flash memory. Triple well structure is formed deep n-well under the light p-well using MeV ion implantation. MeV P implanted deep n-well was observed to show greatly improved characteristics of electrical isolation and soft error. Junction leakage current, however, showed a critical behavior as a function of implantation and annealing conditions. {311} defects were observed to be responsible for the leakage current. {311} defects were generated near the R$\_$p/ (Projected range) region and grown upward to the surface during annealing. This is study on the defect behavior in device region as a function of implantation and annealing conditions.

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Effects of nonpharmacological interventions on the psychological health of high-risk pregnant women: a systematic review and meta-analysis

  • Yoo, Hyeji;Ahn, Sukhee
    • Women's Health Nursing
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    • v.27 no.3
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    • pp.180-195
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    • 2021
  • Purpose: This study aimed to summarize the current evidence on the effects of nonpharmacological interventions on psychological health outcomes for women with high-risk pregnancies due to conditions such as preeclampsia, gestational diabetes, or preterm labor. Methods: The following databases were searched from January 2000 to December 2020: PubMed, Ovid Embase, CINAHL, Web of Science, DBpia, RISS, and KISS. Two investigators independently reviewed and selected articles according to the inclusion/exclusion criteria. RoB 2 and the ROBINS-I checklist were used to evaluate study quality. Results: Twenty-nine studies with a combined total of 1,806 pregnant women were included in the systematic review and meta-analysis. Psychological health improvements were found in women with preeclampsia (Hedges' g=-0.67; 95% confidence interval [CI], -0.91 to -0.44), gestational diabetes (Hedges' g=-0.38; 95% CI, -0.54 to -0.12), and preterm labor (Hedges' g=-0.73; 95% CI, -1.00 to -0.46). The funnel plot was slightly asymmetrical, but the fail-safe N value and the trim-and-fill method showed no publication bias. Conclusion: Nonpharmacological interventions for women with high-risk pregnancies due to conditions such as preeclampsia, gestational diabetes, and preterm labor can improve psychological parameters such as anxiety, stress, and depression. Nurses can play a pivotal role in the nursing management of pregnant women with high-risk conditions and apply various types of nonpharmacological interventions to meet their needs in uncertain and anxious times during pregnancy.

Removal of Aspect-Ratio-Dependent Etching by Low-Angle Forward Reflected Neutral-Beam Etching (Low-Angle Forward Reflected Neutral Beam Etching을 이용한 Aspect-Ratio-Dependent Etching 현상의 제거)

  • Min Kyung-Seok;Park Byoung-Jae;Yeom Geun-Young;Kim Sung-Jin;Lee Jae-Koo
    • Journal of the Korean Vacuum Society
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    • v.15 no.4
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    • pp.387-394
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    • 2006
  • In this study, the effect of using a neutral beam formed by low-angle forward reflection of a reactive ion beam on aspect-ratio-dependent etching (ARDE) has been investigated. When a SF6 Inductively Coupled Plasma and $SF_6$ ion beam etching are used to etch poly-Si, ARDE is observed and the etching of poly-Si on $SiO_2$ shows a higher ARDE effect than the etching of poly-Si on Si. However, by using neutral beam etching with neutral beam directionality higher than 70 %, ARDE during poly-Si etching by $SF_6$ can be effectively removed, regardless of the sample conditions. The mechanism for the removal of ARDE via a directional neutral beam has been demonstrated through a computer simulation of different nanoscale features by using the two-dimensional XOOPIC code and the TRIM code.

Sheet Resistance of Ion Implanted Si(100) at Various Doses, Energies and Beam Currents (Si(100)에 이온 주입 시 에너지, 조사량과 빔 전류에 따른 면저항의 변화)

  • Kim, Hyung-In;Jeong, Young-Wan;Lee, Myeung-Hee;Kang, Suk-Tai
    • Journal of the Korean Vacuum Society
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    • v.20 no.2
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    • pp.100-105
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    • 2011
  • Simulations were performed using Crystal TRIM software under the same conditions used by previous researchers in order to clarify the mechanism that determines sheet resistance various doses, energies and beam currents. The results showed that the peak of the depth profile (Rp) in the same sample gradually shifts inward and damage increases near the surface as the energy increases for $As^+$ equal dose of $1{\times}10^{15}/cm^2$ implanted into Si(100) energies of 5, 10, and 15 keV. From a theoretical calculation of B+ ion implantation processes at energy of 20 keV using parameters that correspond to 1 mA and 7 mA beam currents with the same dose of $5{\times}10^{15}/cm^2$, it was found that the higher beam currents resulted in more damage near the surface (<100 nm). Likewise, In the simulations employing sets of doses ($1{\times}10^{15}$, $3{\times}10^{15}/cm^2$) and beam currents (0.8 mA, 8 mA), more damage was produced at larger doses and higher current. Thus, sheet resistance at the surface was reduced by the intensified damage from increases in beam energy, dose and beam currents.

Study on the Parameter Estimation for Flight Dynamic Linear Model of Light Sport Aircraft (경량항공기 선형 비행운동모델 변수 추정에 관한 연구)

  • Kim, Eung-Tai;Seong, Kie-Jeong;Cremer, Matthias;Hischier, Damian
    • Journal of the Korean Society for Aviation and Aeronautics
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    • v.18 no.4
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    • pp.21-29
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    • 2010
  • The main purpose of this study is to obtain linear models for the design of automatic flight controller in order to operate the Light Sport Aircraft as unmanned air vehicle. Flight test equipments installed on the aircraft to acquire flight test data are described and maneuvers for practical speed calibration are introduced. Parameters for the linear models of lateral and longitudinal motion are estimated by the Output error method as well as trim data analysis using the flight test data. Simulated data using the estimated parameters is shown to agree well with the measurement data. Estimated parameters obtained for several flight conditions can be used to improve the aerodynamic database of the simulation program.

Derivation and Verification of the Relative Dynamics Equations for Aerial Refueling (공중재급유를 위한 상대운동방정식 유도 및 검증)

  • Jang, Jieun;Lee, Sangjong;Ryu, Hyuk
    • Journal of the Korean Society for Aviation and Aeronautics
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    • v.21 no.4
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    • pp.1-10
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    • 2013
  • This paper addresses the derivation of 6-DOF equation of Tanker and Receiver's aircraft for aerial refueling. The new set of nonlinear equations are derived in terms of the relative translational and rotational motion of receiver aircraft respect to the tanker aircraft body frame. Further the wind effect terms due to the tanker's turbulence are included. The derivation of absolute dynamic equation for tanker aircraft written in the inertial frame is calculated from the relative dynamics equations of receiver. The derived relative and absolute equations are implemented the simulation in the same flight conditions to verify the relative motion and compare the trim results by using the MATLAB/SIMULINK program.

Dopant-Activation and Damage-Recovery of Ion-Shower-Doped Poly-Si through $PH_3/H_2$ after Furnace Annealing

  • Kim, Dong-Min;Kim, Dae-Sup;Ro, Jae-Sang;Choi, Kyu-Hwan;Lee, Ki-Yong
    • Journal of Information Display
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    • v.5 no.1
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    • pp.1-6
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    • 2004
  • Ion shower doping with a main ion source of $P_2H_x$ using a source gas mixture of $PH_3/H_2$ was conducted on excimer-laser- annealed (ELA) poly-Si. The crystallinity of the as-implanted samples was measured using a UV-transmittance. The measured value of as-implanted damage was found to correlate well with the one calculated through/obtained from TRIM-code simulation. The sheet resistance was found to decrease as the acceleration voltage increased from 1 kV to 15 kV at a doping time of 1 min. However, it increases as the acceleration voltage increases under severe doping conditions. Uncured damage after furnace annealing is responsible for the rise in sheet resistance.

A Study on the Prediction of the Bow Form Design for Icebreakers (영해용선박의 선수형상 설계추정에 관한 연구)

  • 고상룡;박명규
    • Journal of the Korean Institute of Navigation
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    • v.15 no.3
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    • pp.73-97
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    • 1991
  • The analysis and investigation are described for White's[2] equations compared to the equations of Runeburg[3] and Milano[5] for continuous icebreaking mode, Tunik[8-1] and Ghoneim[8-2] for ramming icebreaking mode. Calculation results compare reasonably well with published model-scale and full-scale icebreaker data by Baker[1] and Dick[11]. During continuous and ramming mode operation, using characteristics of an incebreaker, down ward force on ice and standard ice thickness broken are predicted. Additionally draft, trim and extraction difficulty are also predicted. The bow part line of an icebreakin $g^{ply}$ vessel is designed aiming to maximize the ice breaking capabiltiy as following conditions-low bow angle[20 degrees] at designed waterline, small spread angle complement [6 degrees] at designed waterline, small spread angle complement [6 degrees] and high propeller thrust [220tons]. with plow, two reamers and wave type bumper.

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