Removal of Aspect-Ratio-Dependent Etching by Low-Angle Forward Reflected Neutral-Beam Etching
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Min Kyung-Seok
(Department of Advanced Materials Science & Engineering, Sungkyunkwan University)
Park Byoung-Jae (Department of Advanced Materials Science & Engineering, Sungkyunkwan University) Yeom Geun-Young (Department of Advanced Materials Science & Engineering, Sungkyunkwan University) Kim Sung-Jin (Department of Electrical Engineering, Pohang University Science & Technology) Lee Jae-Koo (Department of Electrical Engineering, Pohang University Science & Technology) |
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