Dopant-Activation and Damage-Recovery of Ion-Shower-Doped Poly-Si through |
Kim, Dong-Min
(Department of Materials Secience and Engineering, Hongik University)
Kim, Dae-Sup (Department of Materials Secience and Engineering, Hongik University) Ro, Jae-Sang (Department of Materials Secience and Engineering, Hongik University) Choi, Kyu-Hwan (Samsung SDl CO.,LTD.) Lee, Ki-Yong (Samsung SDl CO.,LTD.) |
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