• 제목/요약/키워드: Trace detect

검색결과 118건 처리시간 0.027초

EPD 신호검출에 의한 플라즈마식각공정의 이상검출 (Malfunction detection in plasma etching process using EPD signal trace)

  • 이종민;차상엽;최순혁;우광방
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1996년도 한국자동제어학술회의논문집(국내학술편); 포항공과대학교, 포항; 24-26 Oct. 1996
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    • pp.1360-1363
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    • 1996
  • EPD(End Point Detection) is used to decide etching degree of layer which must be removed at wafer etching process in plasma etching process which is one of the most important process in semiconductor manufacturing. In this thesis, the method which detects malfunction of etching process in real-time will be discussed. Several EPD signal traces are collected in normal plasma etching condition and used as reference EPD signal traces. Critical points can be detected by applying differentiation and zero-crossing techniques to reference EPD signal. Mean and standard deviation of critical parameters which is memorized from reference EPD signal are calculated and these determine the lower and higher limit of control chart. And by applying statical control chart to EPD signals which are collected in real etching process malfunctions of process are detected in real-time. By means of applying this method to the real etching process we prove our method can accurately detect the malfunction of etching process and can compensate disadvantage of current industrial method.

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기울기 추적파를 이용한 심전도의 P-파 및 T-파 검출 알고리즘 (A P-wave and T-wave detection algorithm in EGG by using slope tracing waves)

  • 김민규;변미경;이기영;김정국;정병두;허웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 학술대회 논문집 정보 및 제어부문
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    • pp.35-37
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    • 2005
  • In this study, a P- and T-wave detection algorithm in ECG, obtained by minimized filtering to prevent waveform distortion, has been realized. The algorithm uses two slope tracing waves, the descending slope tracing wave and the ascending slope tracing wave, developed for efficient determination of slope inverting points and sudden slope changing points. The algorithm generates the slope tracing waves which trace the original ECG wave, and subtracts one tracing wave from the other to detect P- and T-waves. The algorithm has been applied to MIT/BIH database in order to verify its efficacy and validity in practical applications.

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인적오류 관리를 위한 수행영향인자 분류에 관한 연구 (The study of Taxonomy of Performance Shaping Factors for Human Error Management)

  • 정경희;조재립
    • 한국품질경영학회:학술대회논문집
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    • 한국품질경영학회 2010년도 춘계학술대회
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    • pp.157-160
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    • 2010
  • Almost all companies have paid much attention to the safety management ranging from maintenance to operation even at the stage of designing in order to prevent accidents, but fatal accidents continue to increase throughout the world. In particular, it is essential to systematically prevent such fatal accidents sa fire, explosion or leakage of toxic gas at factories in order to not only protect economic losses and environmental pollution. In addition, HRA may be used to detect the human errors which may cause accidents or trace back to any mistake on the part of workers. This work focuses on the coincidence of human error and mechanical failure for management of human error, and on some important performance shaping factors to propose a method for improving safety effectively of the process industries.

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가시광통신을 이용한 로봇 위치확인 시스템 (Position Detection System of Robot by using Visible Light Communication (VLC))

  • 김응수
    • 마이크로전자및패키징학회지
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    • 제23권4호
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    • pp.119-123
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    • 2016
  • 본 논문에서는 이동 로봇의 위치 추정을 위해 LED를 이용한 가시광 통신에 의해 로봇의 위치를 확인하고 광센서를 이용하여 로봇의 이동 경로를 추정하는 시스템을 제작 하였다. 제작된 위치확인 시스템은 외부 빛인 태양광과 형광등의 영향은 없었으며, 실험에 사용된 4개의 LED는 다른 신호를 전송하므로 로봇의 위치를 확인할 수 있었고, 광센서를 사용하여 로봇의 이동경로를 실시간으로 추적 할 수 있음을 실험을 통하여 확인하였다.

인적오류 저감을 위한 인간 신뢰도 분석 체계 및 평가에 관한 연구 (Development and Evaluation of Human Reliability Analysis Model for the Reduction of Human Errors)

  • 정경희;변승남;조재립
    • 한국철도학회:학술대회논문집
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    • 한국철도학회 2010년도 춘계학술대회 논문집
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    • pp.2048-2051
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    • 2010
  • Almost all companies have paid much attention to the safety management ranging from maintenance to operation even at the stage of designing in order to prevent accidents, but fatal accidents continue to increase throughout the world. In particular, it is essential to systematically prevent such fatal accidents as fire, explosion or leakage of toxic gas at factories in order to not only protect the workers and neighbors but also prevent economic losses and environmental pollution. In addition, HRA may be used to detect the human errors which may cause accidents or trace back to any mistake on the part of workers. Usually, HRA technique is used in association with other risk assessment techniques. Moreover, it can serve to enumerate the human errors which may occur during operation or down-time or correct the existing system to reduce the mistakes. This work focuses on the coincidence of human error and mechanical failure for management of human error, and on some important performance shaping factors to propose a method for improving safety effectively of the process industries.

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수직 탄성파탐사를 응용한 터널 전방의 불연속면 예측과 암반 물성 파악 (Prediction of Discontinuity and Determination of Rock Property ahead of Tunnel Face by VSP application)

  • 남기천;이진무;차성수
    • 터널과지하공간
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    • 제5권3호
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    • pp.214-222
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    • 1995
  • Geological events which are undetected by the surface geophysical or geological survey phase can cause many problems, especially when the tunnel is excavated by TBM. To detect the geological events ahead of tunnel face, a seismic method applied from VSP method is used. Generally uniaxial geophone has been used in surface seismic survey. But this time, triaxial geophone is used to reduce the noise of tunnel wave. DME(Dip moveout Enhancement) filter and diffraction stack method are used. Applying these techniques to the road tunnel in construction, it is proved that the geological events ahead of tunnel face is fairly well predicted. From the seismic trace, Vp and Vs which are related to the rock property can be also obtained. Rock property and proper support design can be dedced from these parameters.

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심전도 기저선 변동의 최소화방법에 관한 연구 (A Study on a Minimizing Method of Baseline Wandering in ECG)

  • 주장규;김민규;이기영;김정국
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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    • pp.48-50
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    • 2006
  • In this paper, we propose a method to minimize the baseline wandering that make hard to detect R wave in ECG. This method uses a different signal between ECG and ascending slope tracing waves to minimize the baseline wandering. When the slope of ECG signal maintains the value or falls, the ascending slope tracing wave fellows ECG signal directly, and this wave holds that value of ECG signal when the slope begins to rises in a certain time(=hold time). After this hold time, this wave traces ECG signal again. To evaluate this minimizing method for baseline wandering, the experiments are carried out with 5 ECG data in the database of MIT/BIH. R waves in the proposed different signal are detected by using descending slope trace waves and compared with the annotation file. The results show that the proposed method Is sure to minimize the baseline wandering in ECG.

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위치 정보 기반 객체인지에 대한 연구 (A study for object recognition based on location information)

  • 김관중
    • 한국산학기술학회논문지
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    • 제14권4호
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    • pp.1988-1992
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    • 2013
  • 본 논문에서는 일정 지역 내에 진입한 영상 객체에 대한 객체인지 방안을 제안한다. 이 방안은 특정 지역내에 진입한 객체의 행동 패턴을 검출하고 추적하는 응용 모듈에 필요하다. 객체인지에 대한 부분은 여러 응용 모듈에서 적용될 수 있는 방안으로 단순히 영상 정보의 인식 범위에서 실제 좌표에 대한 인식으로의 확대를 위한 것이다. GPS 좌표와 영상 정보의 정합을 통하여 개체의 위치 좌표를 추출함으로서 지정 영역에서 인지된 객체의 위치를 탐색한다.

차량 트레킹을 통한 매립위치의 검출 (Detection of Dumping Position Using Vehicle Tracking)

  • 이동규;이영대;조성윤
    • 한국컴퓨터정보학회:학술대회논문집
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    • 한국컴퓨터정보학회 2012년도 제46차 하계학술발표논문집 20권2호
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    • pp.433-434
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    • 2012
  • 본 연구에서는 쓰레기 매립장 내에서의 차량의 이동경로와 매립시점을 판단할 수 있는 방법을 제시한다. 현재의 영상과 배경영상의 차를 구하여 차량의 이동경로를 추적하고 이동경로의 형태로부터 정차 여부를 판단할 수 있으며, 정차시의 영상과 배출구의 개방영상과의 비교를 통해 폐기물의 매립시점을 검출할 수 있도록 한다.

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자율주행차량의 장애물 인식을 위한 물체형상 뭇 움직임 포착에 관한 연구 (A Study on Detection of Object Shape and Movement for Obstacle Recognition of Autonomous Vehicle)

  • 이진우;이영진;조현철;손주한;이권순
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 G
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    • pp.3101-3104
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    • 1999
  • It is important to detect objects movement for obstacle recognition and path searching of autonomous robots and vehicles with vision sensor. This paper shows the method to draw out objects and to trace the trajectory of the moving object using a CCD camera and it describes the method to recognize the shape of objects.

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