• Korean Journal of Optics and Photonics
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• v.14 no.5
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• pp.504-508
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• 2003

We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.

• 한국가시화정보학회:학술대회논문집
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• 2006.12a
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• pp.73-77
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• 2006

Flow rate measurement is one of the difficult problems in the industrial applications. Especially, flow rate in a partially filled pipeline is affected by many parameters such as water level, channel slop, etc. In the present study, prior to the development of a flowmeter, the flow characteristics has been investigated by particle image velocimetry (PIV) measurements. Three-dimensional velocity distributions were obtained from sectional measurements of velocity profiles according to the water level. As a result, it is found that there is no similarity in the velocity profile when the lateral position is changed. In addition, the maximum velocity does not always occur on the free surface. It depends on the water level. In the aspect of flow rate measurement, the previous calculus based upon point measurement techniques is proved to be inaccurate because of the lack of whole flow information.

• Korean Journal of Computational Design and Engineering
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• v.17 no.3
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• pp.156-163
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• 2012

Real-time three-dimensional shape measurement is becoming increasingly important in various fields, including medical sciences, high-technology industry, and microscale measurements. However, there are not so many 3D profile tools specially designed for specifically narrow space, for example, to scan the tooth shape of a human jaw. In this paper, a real-time 3D intraoral scanner is proposed for the measurement of tooth profile in the mouth cavity. The proposed system comprises a laser diode beam, a micro charge-coupled device, a graticule, a piezoelectric transducer, a set of optical lenses, and a polhemus device sensor. The phase-shifting technique is used along with an accurate calibration method for the measurement of the tooth profile. Experimental and theoretical inspection of the phase-to-coordinate relation is presented. In addition, a nonlinear system model is developed for collimating illumination that gives the more accurate mathematical representation of the system, thus improves the shape measurement accuracy. Experiment results are presented to verify the feasibility and performance of the developed system. The experimental results indicate that overall measurement error accuracy can be controlled within 0.4 mm with a variability of ${\pm}0.01$.

• Journal of the Optical Society of Korea
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• v.18 no.5
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.1
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• pp.5-14
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• 1995

An optical measurement method of three dimensional surface profiles which is named the slit beam projection is suggested and practically implemented. This method is intended especially for noncontact and fast digitization of sculptured surfaces for CAD modeling and die manufacturing. Its basic principles are based on geometric optics. Deatiled optical principles and an sub-pixel image processing technique to enhance the measuring resolutions are described in this study. The measuring performances of the slit beam projection are presented and discussed to demonstrate that an actual measuring accuracy of below .+-. 0.2mm can be achived over the whole measuring range(500mm*300mm*200mm)

• Journal of Institute of Control, Robotics and Systems
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• v.9 no.7
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• pp.507-514
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• 2003

Inspection and shape measurement of three-dimensional objects are widely needed in industries for quality monitoring and control. Recently the shape measurement using interferometric principle is found to be a successful methodology among other visual or optical technologies. Especially, the measuring method using wavelength scanning interferometer(WSI) has a great advantage in comparison with other conventional jnterferometric methods in that the absolute distance from the reference surface can be directly obtained from the amount of jnterferometric phase change. However, the measurement methods using WSI proposed by other researchers have low measurement resolution so far because they can't measure fractional phase change. To avoid this shortcoming we propose a new algorithm in this paper, which can obtain a small amount of even fractional phase change by sinusoidal function fitting. To evaluate the effectiveness of the proposed sinusoidal function fitting algorithm, a series of measuring experiments are conducted for discontinuously shaped specimens which have various height. The proposed algorithm shows much more enhanced measurement resolution than other existing conventional algorithms such as zero crossing algorithm and Fourier transform algorithm.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.5
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• pp.1182-1191
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• 1994

This paper presents an enhanced method of slit beam projection intended for the rapid measurement of 3-dimensional surface profiles of dies and molds. Special emphasis is given to optimizing the design of optical system so that the measuring accuracy can be maximized by adopting two-plane camera calibration together with sub-pixel image processing techniques. Finally, several measurement examples are discussed to demonstrate that an actual measuring accuracy of $\pm$ 0.2 mm can be achieved over the measuring range of 500 mm{\times}300mm{\times}200mm$.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.5 no.6
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• pp.1163-1168
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• 2001

The ranging systems measure range data in three-dimensional coordinate from target surface. These non-contact remote ranging systems is widely used in various automation applications, including military equipment, construction field, navigation, inspection, assembly, and robot vision. The active ranging systems using time of flight technique or light pattern illumination technique are complex and expensive, the passive systems based on stereo or focusing principle are time-consuming. The proposed algorithm, that is based on cross correlation of projection profile of vertical edge, provides advantages of fast and simple operation in the range acquisition. The results of experiment show the effectiveness of the proposed algorithm.

• 제어로봇시스템학회:학술대회논문집
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• 1995.10a
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• pp.138-141
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• 1995

This paper describes a 3-dimensional measuring method for cylindrical huge ingot pressed with forging machine. Target ingot we consider here is rotated around a fixed axis during measurement. Using an image processing technique every profile of cross-section is obtained, and 3D image is reconstructed. One method to calibrate the system setting is also presented. Experimental results reveal that the method are applicable and the algorithm is feasible.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.5
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• pp.716-723
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• 2002

Heat transfer in linear motor driven stages for surface mounting device applications was investigated. A simple one-dimensional thermal resistance model (TRM) was introduced. In order to reduce three-dimensional nature to one-dimensional, a few assumptions and simplifications were employed suitably. A good agreement with a finite element heat transfer analysis in temperature profile was obtained. For validation, the analysis was compared with the measurement with respect to motor driving power. Overall discrepancy was less than 7$^{\circ}C$. The influence of two high thermal resistance parts, insulation sheet and thermal contact between the coil assembly and the mounting plate, was examined through the analysis. Additionally, the thermal resistance analysis was applied to another stage including an internal cooling-air passage, and was found available for this system as well. After validation, the cooling effect was surveyed in terms of motor power, and cooling-air and -water flow rate.