• 제목/요약/키워드: Thin-type

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진공열증착으로 성막된 산화구리 박막의 p-형 전도특성 (P-type transport characteristics of copper-oxide thin films deposited by vacuum thermal evaporation)

  • 이호년;송병준
    • 한국산학기술학회논문지
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    • 제12권5호
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    • pp.2267-2271
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    • 2011
  • p-채널 박막트랜지스터에 이용할 수 있는 p-형 산화구리 박막반도체를 얻기 위한 연구를 하였다. 진공열증착방법으로 산화구리 박막을 성막하였으며, 증착 후 열처리 조건을 조절하여 박막트랜지스터의 활성층에 적용 가능한 특성을 가지는 산화구리 박막반도체를 얻었다. 열처리 전에 $10^{22}\;cm^{-3}$ 수준의 전자 이송자농도를 가지던 n-형 박막이 열처리 조건을 최적화함에 따라 $10^{16}\;cm^{-3}$ 수준의 정공 이송자농도를 가지는 p-형 산화물반도체 박막으로 변화하였다.

합판(合板) 대용(代用) 박판상(薄板狀) 복합재(複閤材) 제조(製造)에 관(關)한 연구(硏究) (II) -최상제조조건(最適製造條件)을 적용(適用)한 구성형태별(構成形態別) 박판상(薄板狀) 복합재(複閤材) 개발(開發)- (Studies on Manufacture of Thin Composite Panel for Substitute Use of Plywood (II) - Development of Thin Composite by Composition Type Applied to Optimum Manufacturing Condition -)

  • 이필우
    • Journal of the Korean Wood Science and Technology
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    • 제23권4호
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    • pp.74-84
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    • 1995
  • Eight types of thin composite panels were manufactured by press-lam and mat-forming process applied to optimum manufacturing condition, studied in former first research by author (1995). They were tested and compared with control boards on dimensional stability, internal bond strength, tensile strength, Screw withdrawal strength, and bending properties. These thin composite panels manufactured by mat-forming process were generally superior to those by press-lam in dimensional stability and mechanical properties. In the dimensional stability and mechanical properties of thin composite panels manufactured by mat-forming process, the thin composite panels (A and E type) composed of particle or sawdust core and veneer face with polyethylene film, were as good as those of common plywood (control board). Internal bond strength showed highest value in the thin composite panel(D type) which composed of particle core and polypropylene screen face with polyethylene film. The thin composite panels(G and H type) composed of sawdust or particle core and polypropylene screen face with polyethylene film by press-lam and mat-forming process, showed most highest value in dimensional stability and water absorption.

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신축성 직물 스커트의 체형별 여유분에 관한 연구(II) - 마른 체형을 중심으로 - (A Study on Ease for the Skirt of Stretch Fabric according to the Body Type(II))

  • 설경희;서미아
    • 복식문화연구
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    • 제9권4호
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    • pp.652-663
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    • 2001
  • The purpose of this study was to make clear reduction ratio due to the stretch ratio and to find out the ease for the patterns of stretch skirt according to the body types to improve the aesthetics and wearing satisfaction. Therefore, fundamental data for aesthetic and functional patternmaking of the stretch skirt can be suggested. The results from the study were as follows: 1. The results from the appearance test were as follows. For the ease on waist, W+0cm and W - lcm for thin body type were suggested for the best fit. For the ease on hip, H+0cm and H-2cm for thin body type were suggested for the best fit. 2. The results from wearing satisfaction test were as fDllows. W+Ocm, H+Ocm for thin body type were suggested for the best wearing satisfaction. 3. Based on the results from the above tests, the pattern reduction ratios for stretch skirt were as follows: pattern reduction ratio 3.3 ∼ 5.0% of waist, 4.8 ∼7.2% of hip for thin body type were suggested for the appropriate reduction ratio for stretch skirt. 4. The result from this study for stretch skirt was as follows: For thin body type, W+0cm, W - lcm for waist and H+0cm, H-2cm for hip were appropriate for stretch skirt pattern. Therefore, different ease has to be applied to stretch skirt pattern according to the body parts, to make the skirt looks good, is appropriate for thin body type, and is satisfied with appearance and wearing satisfaction test.

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RF 마그네트론 스퍼터링을 이용한 박막 증착에 관한 연구 (A Study of Thin Film deposition using of RF Magnetron Sputtering)

  • 이우식
    • 한국정보전자통신기술학회논문지
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    • 제11권6호
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    • pp.772-777
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    • 2018
  • 본 논문은 RF 마크네트론 스퍼터링 장비를 이용하여 ITO 유리에 N-type 및 P-type을 증착하였다. N-Type의 오믹접촉은 모든 조건에서 잘 되었다. 면저항은 RF Power가 증가할수록 면 저항이 증가되는 현상을 나타내었다. 증착한 박막의 표면을 분석해 본 결과, RF Power가 250W이고, 기판온도가 $250^{\circ}C$의 조건에서 입자가 균일하고 크기가 일정한 박막이 증착 된 것으로 측정되었다. P-Type은 모든 조건에서 오믹접촉이 잘 이루어졌으며 면저항은 RF Power가 증가할수록 증가되는 것으로 나타내었다. RF Power가 증가할수록 두께가 증가하고 안정화 된 것을 알 수가 있었다. PN junction 박막과 NP junction 박막은 스퍼터링 시간이 증가할수록 박막의 두께가 증가하고 안정화 된 것을 알 수가 있었다. PN junction 박막을 제작한 결과, 변환효율은 스퍼터링 시간이 10분일 때 0.2로 가장 우수하였다.

응고 시뮬레이션에 의한 박육 알루미늄 다이캐스팅 금형 방안의 최적화 (Optimization of the Thin-walled Aluminum Die Casting Die Design by Solidification Simulation)

  • 김영찬;최세원;조재익;정창열;강창석
    • 한국주조공학회지
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    • 제28권4호
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    • pp.190-194
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    • 2008
  • Thin-walled die casting of aluminum notebook computer housing with less than 1mm thickness was investigated by using computational solidification simulation and actual casting experiment. Three different types of gate design, finger, tangential and split type, were used and the results showed that sound thin-walled die casting was possible with tangential and split type gating design because those gates allowed aluminum melt flowed into the thin-wall cavity uniformly and split type gating system was preferable gating design than tangential type at the point of view of soundness of casting and distortion generated after solidification. Also, solidification simulation agreed well with the actual die-casting and the casting showed no casting defect and distortion.

Planar Type Flexible Piezoelectric Thin Film Energy Harvester Using Laser Lift-off

  • Noh, Myoung-Sub;Kang, Min-Gyu;Yoon, Seok Jin;Kang, Chong-Yun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.489.2-489.2
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    • 2014
  • The planar type flexible piezoelectric energy harvesters (PEH) based on PbZr0.52Ti0.48O3 (PZT) thin films on the flexible substrates are demonstrated to convert mechanical energy to electrical energy. The planar type energy harvesters have been realized, which have an electrode pair on the PZT thin films. The PZT thin films were deposited on double side polished sapphire substrates using conventional RF-magnetron sputtering. The PZT thin films on the sapphire substrates were transferred by PDMS stamp with laser lift-off (LLO) process. KrF excimer laser (wavelength: 248nm) were used for the LLO process. The PDMS stamp was attached to the top of the PZT thin films and the excimer laser induced onto back side of the sapphire substrate to detach the thin films. The detached thin films on the PDMS stamp transferred to adhesive layer coated on the flexible polyimide substrate. Structural properties of the PZT thin films were characterized using X-ray diffraction (XRD) and scanning electron microscopy (SEM). To measure piezoelectric power generation characteristics, Au/Cr inter digital electrode (IDE) was formed on the PZT thin films using the e-beam evaporation. The ferroelectric and piezoelectric properties were measured by a ferroelectric test system (Precision Premier-II) and piezoelectric force microscopy (PFM), respectively. The output signals of the flexible PEHs were evaluated by electrometer (6517A, Keithley). In the result, the transferred PZT thin films showed the ferroelectric and piezoelectric characteristics without electrical degradation and the fabricated flexible PEHs generated an AC-type output power electrical energy during periodically bending and releasing motion. We expect that the flexible PEHs based on laser transferred PZT thin film is able to be applied on self-powered electronic devices in wireless sensor networks technologies. Also, it has a lot of potential for high performance flexible piezoelectric energy harvester.

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Analysis of Photoluminescence for N-doped and undoped p-type ZnO Thin Films Fabricated by RF Magnetron Sputtering Method

  • Liu, Yan-Yan;Jin, Hu-Jie;Park, Choon-Bae;Hoang, Geun C.
    • Transactions on Electrical and Electronic Materials
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    • 제10권1호
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    • pp.24-27
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    • 2009
  • N-doped ZnO thin films were deposited on n-type Si(100) and homo-buffer layer, and undoped ZnO thin film was also deposited on homo-buffer layer by RF magnetron sputtering method. After deposition, all films were in-situ annealed at $800^{\circ}C$ for 5 minutes in ambient of $O_2$ with pressure of 10Torr. X -ray diffraction shows that the homo-buffer layer is beneficial to the crystalline of N-doped ZnO thin films and all films have preferable c-axis orientation. Atomic force microscopy shows that undoped ZnO thin film grown on homo-buffer layer has an evident improvement of smoothness compared with N-dope ZnO thin films. Hall-effect measurements show that all ZnO films annealed at $800^{\circ}C$ possess p-type conductivities. The undoped ZnO film has the highest carrier concentration of $1.145{\times}10^{17}cm{-3}$. The photoluminescence spectra show the emissions related to FE, DAP and many defects such as $V_{Zn}$, $Zn_O$, $O_i$ and $O_{Zn}$. The p-type defects ($O_i$, $V_{Zn}$, and $O_{Zn}$) are dominant. The undoped ZnO thin film has a better p-type conductivity compared with N-doped ZnO thin film.

MOCVD를 이용한 $BiSbTe_3$ 박막성장 및 열전소자 제작

  • 권성도;윤석진;주병권;김진상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.425-425
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    • 2008
  • Bismuth-antimony-telluride based thermoelectric thin film materials were prepared by metal organic vapor phase deposition using trimethylbismuth, triethylantimony and diisopropyltelluride as metal organic sources. A planar type thermoelectric device has been fabricated using p-type $Bi_{0.4}Sb_{1.6}Te_3$ and n-type $Bi_2Te_3$ thin films. Firstly, the p-type thermoelectric element was patterned after growth of $4{\mu}m$ thickness of $Bi_{0.4}Sb_{1.6}Te_3$ layer. Again n-type $Bi_2Te_3$ film was grown onto the patterned p-type thermoelectric film and n-type strips are formed by using selective chemical etchant for $Bi_2Te_3$. The top electrical connector was formed by thermally deposited metal film. The generator consists of 20 pairs of p- and n-type legs. We demonstrate complex structures of different conduction types of thermoelectric element on same substrate by two separate runs of MOCVD with etch-stop layer and selective etchant for n-type thermoelectric material. Device performance was evaluated on a number of thermoelectric devices. To demonstrate power generation, one side of the device was heated by heating block and the voltage output was measured. The highest estimated power of 1.3mW is obtained at the temperature difference of 45K. We provide a promising approach for fabricating thin film thermoelectric generators by using MOCVD grown thermoelectric materials which can employ nanostructures for high thermoelectric properties.

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측온저항체 온도센서가 집적화된 발열저항체형 마이크로 유량센서의 제작 및 특성 (Fabrication and Characteristics of Hot-Film Type Micro-flowsensors integrated with RTD)

  • 정귀상;홍석우
    • 한국전기전자재료학회논문지
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    • 제13권7호
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    • pp.612-616
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    • 2000
  • This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the Si membrane in which MgO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$layer. The MgO layer improved adhesion of Pt thin-film to SiO$_2$layer without any chemical reactions to Pt thin-film under high annealing temperatures. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 82 mV at $N_2$flow rate of 2000 sccm/min heating power of 1.2 W. The response time($\tau$:63%) was about 50 msec when input flow was stepinput

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투명한 p형 반도체 CuAlO2 박막의 일산화질소 가스 감지 특성 (Nitrogen Monoxide Gas Sensing Characteristics of Transparent p-type Semiconductor CuAlO2 Thin Films)

  • 박수정;김효진;김도진
    • 한국재료학회지
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    • 제23권9호
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    • pp.477-482
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    • 2013
  • We investigated the detection properties of nitrogen monoxide (NO) gas using transparent p-type $CuAlO_2$ thin film gas sensors. The $CuAlO_2$ film was fabricated on an indium tin oxide (ITO)/glass substrate by pulsed laser deposition (PLD), and then the transparent p-type $CuAlO_2$ active layer was formed by annealing. Structural and optical characterizations revealed that the transparent p-type $CuAlO_2$ layer with a thickness of around 200 nm had a non-crystalline structure, showing a quite flat surface and a high transparency above 65 % in the range of visible light. From the NO gas sensing measurements, it was found that the transparent p-type $CuAlO_2$ thin film gas sensors exhibited the maximum sensitivity to NO gas in dry air at an operating temperature of $180^{\circ}C$. We also found that these $CuAlO_2$ thin film gas sensors showed reversible and reliable electrical resistance-response to NO gas in the operating temperature range. These results indicate that the transparent p-type semiconductor $CuAlO_2$ thin films are very promising for application as sensing materials for gas sensors, in particular, various types of transparent p-n junction gas sensors. Also, these transparent p-type semiconductor $CuAlO_2$ thin films could be combined with an n-type oxide semiconductor to fabricate p-n heterojunction oxide semiconductor gas sensors.