• Title/Summary/Keyword: Thin oxide

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Frequency Dependent Properties of Tris(8-Hydroxyquinoline) Aluminum Thin Films

  • Lee, Yong-Soo;Park, Jae-Hoon;Choi, Jong-Sun
    • KIEE International Transactions on Electrophysics and Applications
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    • 제11C권3호
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    • pp.70-74
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    • 2001
  • Admittance or impedance spectroscopy is one of the powerful tools to study dielectric relaxation and loss processes in organic and inorganic materials. In this study, the frequency dependent properties of an indium tin oxide/tris(8-hydroxyquinoline) aluminum($Alq_3$)/aluminum structure have been studied. The conductance of the $Alq_3$ film increases with the DC applied voltage up to 4V and decreases above 4V in the low frequency region. This indicates that the resistance of the device decreases with the applied bias due to the carrier injection enhancement, thereafter the injected carriers form the space charge and the additional injection of carriers is prevented. The Cole-Cole plot of the admittance takes a one-semicircle shape, which means that the device can be modeled as a parallel resistor-capacitor network. The resistance and capacitance were estimated as 8.62k${\Omega}$ and 2.7nF, respectively, at 3V in the low frequency region. The dielectric constant ( ${\epsilon}'$ ) of the $Alq_3$ film is independent of the frequency in the low frequency region below 100kHz, while the frequency dependency was observed at above 100kHz. The dielectric loss factor ( ${\epsilon}"$ ) of the $Alq_3$ film shows the dielectric dispersion below 100kHz and dielectric absorption in higher frequency domain. The dispersion is thought to be related to the hopping process of the carriers. The ${\epsilon}"$ is proportional to the reciprocal of the frequency. The dielectric relaxation time was extracted to about 0.318${\mu}s$ from the dielectric absorption spectrum.

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Conditioning Effects on LSM-YSZ Cathodes for Thin-film SOFCs

  • Lee You-Kee;Visco Steven J.
    • 전기화학회지
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    • 제2권4호
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    • pp.202-208
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    • 1999
  • [ $50/50 vol\%$ ] LSM-YSZ의 양극은 콜로이드 증착법에 의해 YSZ 전해질상에 증착하였다. 양극 특성은 주사전자현미경과 임피던스 분석기에 의해 고찰하였다. LSM-YSZ양극의 제조 조건에 따른 영향을 관찰하였으며, 그 영향에 대한 개선책이 고체산화물 연료전지의 성능향상을 위해 제시되었다. 임피던스에 대한 온도, YSZ전해질로의 양극 접착에 대한 표면 오염, 사용하는 Pt 페이스트, 미세구조에 대한 곡표면에 가해진 연무질 분사기술과 셀과 셀의 변동성에 대한 영향들은 각각 $900^{\circ}C$ 측정, YSZ표면 연마, 일단의 Pt페이스트 사용, 평편한 YSZ판의 사용과 일관된 절차와 기술의 사용에 의해 해결되었다. 이때 재현성 있는 임피던스 스펙트럼들이 향상된 셀을 사용함으로써 얻어졌고, $900^{\circ}C$에서 (공기)LSM-YSZ/YSZ/LSM-YSZ(공기) 셀에 대해 측정된 전형적인 임피던스 스펙트럼들은 2개의 불완전한 호로 구성되었다. 또한 LSM-YSZ 양극의 임피던스 특성은 촉매층, 양극 조성, 인가 전류 등과 같은 실험 조건들에 의해서도 영향을 받았다.

ITO/p-InP 태양전지 제작 (The fabrication of ITO/p-InP solar cells)

  • 맹경호;김선태;송복신;문동찬
    • E2M - 전기 전자와 첨단 소재
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    • 제7권3호
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    • pp.243-251
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    • 1994
  • ITO(Indium Tin Oxide) film with thickness of 1500.angs. was prepared by an e-beam evaporator onto a glass and a p-type InP wafer (100) LEC grown Zn-doped p=2.3*10$\^$16/cm$\^$-3/), in which the components of ITO used for evaporation source were hot pressed pellets 1 mole% ln$\_$2/O$\_$3/+9 mole% SnO$\_$2/, and evaporated in O$\_$2/ ambient. The optimum conditions to preparation of ITO thin film were the substrate temperature of 350.deg. C, the injected oxygen pressure of 2*10$\^$-4/ torr, and the evaporation speed of 0.2-0.3.angs./sec, respectively. In these optimum conditions, the resistivity and the carrier concentration were 5.3*10$\^$-3/ .ohm.-cm, 6.5*10$\^$20/cm$\^$-3/, and the transmittance was over 80%. From the results of J-V measurements in ITO/p-InP structure solar cells, the higher pressure of injected oxygen, the more open circuit voltage. The efficiency of ITO/p-InP solar cell without the grid line contact, prepared by the optimum evaporation conditions, was 7.19%. By using the grid line contact, the efficiency, the open circuit voltage, the short circuit current density, the fill factor, the series resistance, and the shunt resistance were 8.5%, 0.47V, 29.48 mAcm$\^$-2/ , 61.35%, 3.ohm., and 26.6k.ohm., respectively.

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20nm이하 이중게이트 FinFET의 크기변화에 따른 서브문턱스윙분석 (Analysis of Dimension Dependent Subthreshold Swing for Double Gate FinFET Under 20nm)

  • 정학기;이종인;정동수
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2006년도 춘계종합학술대회
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    • pp.865-868
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    • 2006
  • 본 연구에서는 20nm이하 채널길이를 가진 이중게이트 FinFET에 대하여 문턱전압이하에서 서브문턱스윙을 분석하였다. 분석을 위하여 분석학적 전류모델을 개발하였으며 열방사 전류 및 터널링 전류를 포함하였다. 열방사전류는 포아슨방정식에 의하여 구한 포텐셜분포 및 맥스월-볼쯔만통계를 이용한 캐리어분포를 이용하여 구하였으며 터널링전류는 WKB(Wentzel-framers-Brillouin)근사를 이용하였다. 이 두 모델은 상호 독립적이므로 각각 전류를 구해 더함으로써 차단전류를 구하였다. 본 연구에서 제시한 모델을 이용하여 구한 서브문턱스윙값이 이차원시뮬레이션값과 비교되었으며 잘 일치함을 알 수 있었다. 분석 결과 10nm이하에서 특히 터널링의 영향이 증가하여 서브문턱스윙특성이 매우 저하됨을 알 수 있었다 이러한 단채널현상을 감소시키기 위하여 채널두께 및 게이트산화막의 두께를 가능한한 않게 제작하여야함을 알았으며 이를 위한 산화공정개발이 중요하다고 사료된다.

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나노구조 이중게이트 FinFET의 크기변화에 따른 문턱전압이동 분석 (Analysis of Dimension Dependent Threshold Voltage Roll-off for Nano Structure Double Gate FinFET)

  • 정학기;이재형;정동수
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2006년도 춘계종합학술대회
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    • pp.869-872
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    • 2006
  • 본 연구에서는 나노구조 이중게이트 FinFET에 대하여 문턱전압이동 특성을 분석하였다. 분석을 위하여 분석학적 전류모델을 개발하였으며 열방사 전류 및 터널링 전류를 포함하였다. 열방사전류는 포아슨방정식에 의하여 구한 포텐셜분포 및 맥스월-볼쯔만통계를 이용한 캐리어분포를 이용하여 구하였으며 터널링전류는 WKB(Wentzel-framers-Brillouin)근사를 이용하였다. 이 두 모델은 상호 독립적이므로 각각 전류를 구해 더함으로써 문턱전압을 구하였다. 본 연구에서 제시한 모델을 이용하여 구한 문턱전압이동값이 이차원시뮬레이션값과 비교되었으며 잘 일치함을 알 수 있었다. 분석 결과 10nm이하에서 특히 터널링의 영향이 증가하여 문턱전압이동이 매우 현저하게 나타남을 알 수 있었다. 이러한 단채널현상을 감소시키기 위하여 채널두께 및 게이트산화막의 두께를 가능한한 얇게 제작하여야함을 알았으며 이를 위한 산화공정개발이 중요하다고 사료된다.

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$TiO_2$ 두께에 따른 염료감응형 태양전지의 효율 변화 (The Effect of $TiO_2$ Thickness on the Performance of Dye-Sensitized Solar Cells)

  • 김대현;박미주;이성욱;최원석;홍병유
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.147-148
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    • 2007
  • Dye-sensitized solar cell using conversion of solar energy to electrical energy appeared that which solves a environmental matter. The dye-sensitized solar cell uses nano-crystalline oxide semiconductor for absorbing dye. The $TiO_2$ is used most plentifully. The efficiency of the dye-sensitized solar cell changes consequently in the particle size, morphology, crystallization and surface state of the $TiO_2$. In this paper, we report The effect of titania$(TiO_2)$ thickness on the performance of dye-sensitized solar cells. Using doctor blade method, It produced the thickness of the $TiO_2$ with $7\;{\mu}m,\;10\;{\mu}m,\;13\;{\mu}m$. The efficiency was the best from $10{\mu}m$. It had relatively low efficiency on the thickness from $7\;{\mu}m\;to\;13\;{\mu}m$. The reason why it presents low efficiency on $7\;{\mu}m$ thickness is that excited electrons can not be delivered enough due to thin thickness of $7\;{\mu}m\;TiO_2$. And The reason why it presents low efficiency on $13\;{\mu}m$ thickness is that thick $13\;{\mu}m\;TiO_2$ can not penetrate the sunlight enough.

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이온빔 조사 각도와 에너지강도에 의한 수직 배향막의 특성 분석 (Characteristic Analysis of Vertical Alignment by Ion-beam Irradiation Angle and Energy Density)

  • 강동훈;오병윤;김병용;한진우;김영환;옥철호;한정민;이상극;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.398-398
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    • 2007
  • The Liquid Crystal (LC) alignment uniformity is very important in LC devices. The alignment mechanism of LC molecules on a rubbed polyimide (PI) surface is very important for both LC fundamental research and application. So, Generally a rubbing method to align LC has been widely used to mass-produce LCD panels. But because rubbing method is contact method between rubbing fabric and indium-tin-oxide glass or flexible substrate, rubbing method has some defects, such as the electrode charges and the creation of contaminating particles. Thus we strongly recommend a non-contact alignment technique for getting rid of some defects of rubbing method. Most recently, the LC aligning capabilities achieved by ion-beam exposure on the organic and nonorganic thin film surface have been reported successfully. In this research, we studied the tilt angle generation and electro-optical performances for a NLC on homeotropic polyimide surfaces with ion-beam exposure. The LC aligning capabilities of a nematic liquid crystal (NLC) on a homeotropic PI surface using a new ion-beam method were studied. On the homeotropic PI surface, the tilt angle of the NLC by exposure ion-beam had a tendency to decrease as increased ion-beam energy density. And, on the homeotropic PI surface, the alignment character of the NLC with respect to ion-beam energy was good. And we achieved satisfactory result for EO character.

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RF Magnetron Sputtering법에 의해 증착된 ATO박막의 열처리에 따른 구조적, 전기적, 광학적 특성 변화 (Effect of annealing temperature on the Structural, Electrical, Optical Properties of ATO Thin Films by RF Magnetron Sputtering)

  • 문인규;이성욱;박미주;김영렬;최원석;홍병유
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.335-335
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    • 2007
  • 본 연구에서는 RF Magnetron Sputtering 법으로 94:6 wt%의 비율로 Sb가 첨가된 $SnO_2$ 타겟을 사용하여 실온에서 ATO(Antimony doped Tin Oxide) 박막을 증착하고, 열처리가 ATO 박막의 구조적, 전기적, 광학적 특성에 미치는 효과를 연구하고자 하였다. ATO 박막의 두께는 약 200 nm로 증착하였으며, 실험 조건으로는 Ar 유량을 100 seem, 진공도는 1, 5, 10 mTorr로 변화시켰으며 스퍼터링 파워는 100, 150, 200, 250 W로 조절하였다. 증착되어진 박막은 vacuum 상태에서 300, $600^{\circ}C$의 온도에서 열처리를 수행하였으며 결과적으로 스퍼터링 파워가 증가함에 따라 비저항이 감소하였고, 250 W의 파워와 10 mTorr의 공정압력 조건에서 $600^{\circ}C$로 열처리한 ATO 박막은 $5{\times}10^{-3}{\Omega}-cm$의 저항률과 85.3%의 높은 투과도를 가지는 우수한 투명 전도막을 얻을 수 있었다.

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Investigation of Low-Temperature Processed Amorphous ZnO TFTs Using a Sol-Gel Method

  • Chae, Seong Won;Yun, Ho Jin;Yang, Seung Dong;Jeong, Jun Kyo;Park, Jung Hyun;Kim, Yu Jeong;Kim, Hyo Jin;Lee, Ga-Won
    • Transactions on Electrical and Electronic Materials
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    • 제18권3호
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    • pp.155-158
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    • 2017
  • In this paper, ZnO Thin Film Transistors (TFTs) were fabricated by a sol-gel method using a low-temperature process, and their physical and electrical characteristics were analyzed. To lower the process temperature to $200^{\circ}C$, we used a zinc nitrate hydrate ($Zn(NO_3)_2{\cdot}xH_2O$) precursor. Thermo Gravimetric Analyzer (TGA) analysis showed that the zinc nitrate hydrate precursor solution had 1.5% residual organics, much less than the 6.5% of zinc acetate dihydrate at $200^{\circ}C$. In the sol-gel method, organic materials in the precursor disrupt formation of a high-quality film, and high-temperature annealing is needed to remove the organic residuals, which implies that, by using zinc nitrate hydrate, ZnO devices can be fabricated at a much lower temperature. Using an X-Ray Diffractometer (XRD) and an X-ray Photoelectron Spectrometer (XPS), $200^{\circ}C$ annealed ZnO film with zinc nitrate hydrate (ZnO (N)) was found to have an amorphous phase and much more oxygen vacancy ($V_o$) than Zn-O bonds. Despite no crystallinity, the ZnO (N) had conductance comparable to that of ZnO with zinc acetate dihydrate (ZnO (A)) annealed at $500^{\circ}C$ as in TFTs. These results show that sol-gel could be made a potent process for low-cost and flexible device applications by optimizing the precursors.

연속 공정 PVD 방법에 의한 Coated Conductor 제조 (Fabrication of Coated Conductor by Continuous PVD Methods)

  • 고락길;정준기;김호섭;하홍수;;송규정;박찬;유상임;문승현;김영철
    • 한국전기전자재료학회논문지
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    • 제17권11호
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    • pp.1241-1245
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    • 2004
  • Continuous physical vapor deposition (PVD) method is one of many processes to fabricate long length coated conductor which is required for successful large-scale application of superconducting power devices. Three film deposition systems (pulsed laser deposition, sputtering, and evaporation) equipped with reel-to-reel(R2R) metal tape moving apparatus were installed and used to deposit multi-layer oxide thin films. Both RABiTS and IBAD texture templates are used. IBAD template consists of CeO$_2$(PLD)/YSZ(IBAD) on stainless steel(SS) metal tape, and RABiTS template has the structure of CeO$_2$/YSZ/Y$_2$O$_3$ which was continuously deposited on Ni-alloy tape using R$_2$R evaporation and DC reactive sputtering in a deposition system designed to do both processes. 0.4 m-long coated conductor with Ic(77 K) of 34 A/cm was fabricated using RABiTS template. 0.5 m and 1.1 m-long coated conductor with Ic(77 K) of 41 A/cm and 26 A/cm were fabricated using IBAD template.