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http://dx.doi.org/10.4313/JKEM.2004.17.11.1241

Fabrication of Coated Conductor by Continuous PVD Methods  

Ko, Rock-Kil (한국전기연구원 초전도재료연구그룹)
Chung, Jun-Ki (한국전기연구원 초전도재료연구그룹)
Kim, Ho-Sup (한국전기연구원 초전도재료연구그룹)
Ha, Hong-Soo (한국전기연구원 초전도재료연구그룹)
Shi, Dongqi (한국전기연구원 초전도재료연구그룹)
Song, Kyu-Jeong (한국전기연구원 초전도재료연구그룹)
Park, Chan (한국전기연구원 초전도재료연구그룹)
Yoo, Sang-Im (서울대학교 재료공학과)
Moon, Seung-Hyun (서울대학교 재료공학과)
Kim, Young-Cheol (부산대학교 물리학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.17, no.11, 2004 , pp. 1241-1245 More about this Journal
Abstract
Continuous physical vapor deposition (PVD) method is one of many processes to fabricate long length coated conductor which is required for successful large-scale application of superconducting power devices. Three film deposition systems (pulsed laser deposition, sputtering, and evaporation) equipped with reel-to-reel(R2R) metal tape moving apparatus were installed and used to deposit multi-layer oxide thin films. Both RABiTS and IBAD texture templates are used. IBAD template consists of CeO$_2$(PLD)/YSZ(IBAD) on stainless steel(SS) metal tape, and RABiTS template has the structure of CeO$_2$/YSZ/Y$_2$O$_3$ which was continuously deposited on Ni-alloy tape using R$_2$R evaporation and DC reactive sputtering in a deposition system designed to do both processes. 0.4 m-long coated conductor with Ic(77 K) of 34 A/cm was fabricated using RABiTS template. 0.5 m and 1.1 m-long coated conductor with Ic(77 K) of 41 A/cm and 26 A/cm were fabricated using IBAD template.
Keywords
Coated conductor; PVD; RABiTS; IBAD; YBCO; Reel-to-reel;
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