• Title/Summary/Keyword: Thin layer

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Effect of Seed-layer on the Crystallization and Electric Properties of SBN60 Thin Films (SBN60 박막의 결정화 및 전기적 특성에 관한 씨앗층의 영향)

  • Jang, Jae-Hoon;Lee, Dong-Gun;Lee, Hee-Young;Jo, Sang-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.08a
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    • pp.85-88
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    • 2003
  • $Sr_xBa_{1-x}Nb_2O_6$(SBN, $025{\leq}x{\leq}0.75$) ceramic is a ferroelectric material with tetragonal tungsten bronze (TTB) type structure, which has a high pyroelectric coefficient and a nonlinear electro-optic coefficient value. In spite of its advantages, SBN has not been investigated well compared to other ferroelectric materials with perovskite structure. In this study, SBN thin film was manufactured by ion beam sputtering technique using the prepared SBN target in Ar/$O_2$ atmosphere. SBN30 thin film of 500 ${\AA}$ was pre-deposited as a seed layer on Pt(l00)/$TiO_2$/$SiO_2$/Si substrate followed by SBN60 deposition up to 4500 ${\AA}$ in thickness. SBN60/SBN30 layer was deposited at different Oxygen amount of 0, 8.1, 17, and 31.8 sccm, respectively. The crystallinity and orientation behavior as well as electric properties of SBN60/SBN30 multi-layer were examined. The deposited layer was uniform and the orientation was shown primarily along (001) plane from XRD pattern. The crystal structure and the electric properties depended on the Oxygen amount, heating temperature and was the best at O2 = 8.1 seem, $750^{\circ}C$. In electric properties of Pt/SBN60/SBN30/Pt thin film capacitor prepared, the remnant polarization (2Pr) value was 13 ${\mu}C/cm^2$, the coercive field (Ec) 75 kV/cm, and the dielectric constant 1492, respectively.

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Structural and Electrical Properties High Resistance of TiNxOy/TiNx Multi-layer Thin Film Resistors (TiNxOy/TiNx 다층 박막을 이용한 고저항 박막 저항체의 구조 및 전기적 특성평가)

  • Park, Kyoung-Woo;Hur, Sung-Gi;Nguyen, Duy Cuong;Ahn, Jun-Ku;Yoon, Soon-Gil
    • Korean Journal of Metals and Materials
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    • v.47 no.9
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    • pp.591-596
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    • 2009
  • $TiN_xO_y/TiN_x$ multi-layer thin films with a high resistance(${\sim}k{\Omega}$) were deposited on $SiO_2/Si$ substrates at room temperature by sputtering. The $TiN_x$ thin films show island and smooth surface morphology in samples prepared by ${\alpha}$ and RF magnetron sputtering, respectively. $TiN_xO_y/TiN_x$ multi-layer in has been developed to control temperature coefficient of resistance(TCR) by the incorporation of $TiN_x$ layer(positive TCR) inserted into $TiN_xO_y$ layers(negative TCR). Electrical and structural properties of sputtered $TiN_xO_y/TiN_x$ multi-layer films were investigated as a function of annealing temperature. In order to achieve a stable high resistivity, multi-layer films were annealed at various temperatures in oxygen ambient. Samples annealed at $700^{\circ}C$ for 1 min exhibited good TCR value of approximately $-54 ppm/^{\circ}C$ and a stable high resistivity around $20k{\Omega}/sq$. with good reversibility.

Role of Buffer Layer in Ba-Ferrite/α-Al2O3/SiO2 Magnetic Thin Films (Ba-페라이트/α-Al2O3/SiO2 자성박막에서 버퍼층의 역할)

  • Cho, Tae-Sik
    • Journal of the Korean Magnetics Society
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    • v.16 no.6
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    • pp.283-286
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    • 2006
  • We have studied the role of ${\alpha}-Al_{2}O_{3}$ buffer layer as a diffusion barrier in the Ba-ferrite/$SiO_{2}$ magnetic thin films for high-density recording media. In the interface of amorphous Ba-ferrite $(1900-{\AA}-thick)/SiO_{2}$ thin film during annealing, the interfacial diffusion started to occur at ${\sim}700^{\circ}C$. As the annealing temperature increased up to $800^{\circ}C$, the interfacial diffusion abruptly proceeded resulting in the high interface roughness and the deterioration of the magnetic properties. In order to control the interfacial diffusion at the high temperature, we introduced ${\alpha}-Al_{2}O_{3}$ buffer layer ($110-{\AA}-thick$) in the interface of Ba-ferrite/$SiO_{2}$ thin film. During the annealing of Ba-ferrite/${\alpha}-Al_{2}O_{3}/SiO_{2}$ thin film even at ${\sim}800^{\circ}C$, the interface was very smooth. The magnetic properties, such as saturation magnetization and intrinsic coercivity, were also enhanced, due to the inhibition of interfacial diffusion by the ${\alpha}-Al_{2}O_{3}$ buffer layer. Our study suggests that the ${\alpha}-Al_{2}O_{3}$ buffer layer act as a useful interfacial diffusion barrier in the Ba-ferrite/$SiO_{2}$ magnetic thin films.

Liquid Crystal Aligning Capabilities for Nematic Liquid Crystal on the ZrOx Thin Film Layer with E-beam Evaporation

  • Kim, Mi-Jung;Han, Jin-Woo;Kim, Young-Hwan;Kim, Byoung-Yong;Han, Jeong-Min;Moon, Hyun-Chan;Park, Kwang-Bum;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.378-378
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    • 2007
  • In this study, liquid crystal (LC) aligning capabilities for homeotropic alignment on the $ZrO_x$ thin film by electron beam evaporation method were investigated. Also, the control of pretilt angles and thermal stabilities of the NLC treated on $ZrO_x$ thin film were investigated. The uniform LC alignment on the $ZrO_x$ thin film surfaces and good thermal stabilities with electron beam evaporation can be achieved. It is considerated that the LC alignment on the $ZrO_x$ thin film by electron beam evaporation is attributed to elastic interaction between LC molecules and micro-grooves at the $ZrO_x$ thin film surface created by evaporation. In addition, it can be achieved the good electro-optical (EO) properties of the VA-LCD on $ZrO_x$ thin film layer with. oblique electron beam evaporation.

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A properties of ZnO thin film deposited by magnetron sputtering and its resistivity and microstructure due to annealing (Magnetron sputtering으로 증착한 ZnO 박막의 특성과 열처리에 따른 비저항과 미세구조)

  • 이승환;성영권;김종관
    • Electrical & Electronic Materials
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    • v.10 no.2
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    • pp.126-133
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    • 1997
  • In order to apply for the gas sensing layer and the piezoelectric thin film devices, we studied the effects of magnetron sputtering conditions and annealing temperature on the electrical and structual characteristics of the ZnO thin film. The optimal deposition conditions, in order to obtain a c axis of the ZnO (002) phase thin film which is perpendicular to SiO$_{2}$/Si substrate, were like these ; substrate temperature 150.deg. C, chamber pressure 2 mtorr, R.F. power 300 watts, gas flow ratio 0.4[O$_{2}$(Ar + $O_{2}$)]. When the ZnO thin film was annealed in 600.deg. C, $O_{2}$ gas ambient for 1 hr, the resistivity was 2.6 x 10$^{2}$.ohm.cm and the grain size of ZnO thin film was less than 1 .mu.m. So the ZnO thin film acquired from above conditions can apply for the gas sensing layer which require a c axis perpendicular to the substrate surface.

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Study of Light-induced Degradation in Thin Film Silicon Solar Cells: Hydrogenated Amorphous Silicon Solar Cell and Nano-quantum Dot Silicon Thin Film Solar Cell (박막 실리콘 태양전지의 광열화현상 연구: 비정질 실리콘 태양전지 및 나노양자점 실리콘 박막 태양전지)

  • Kim, Ka-Hyun
    • Journal of the Korean Solar Energy Society
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    • v.39 no.1
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    • pp.1-9
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    • 2019
  • Light induced degradation is one of the major research challenges of hydrogenated amorphous silicon related thin film silicon solar cells. Amorphous silicon shows creation of metastable defect states, originating from elevated concentration of dangling bonds during light exposure. The metastable defect states work as recombination centers, and mostly affects quality of intrinsic layer in solar cells. In this paper we present results of light induced degradation in thin film silicon solar cells and discussion on physical origin, mechanism and practical solutions of light induced degradation in thin film silicon solar cells. In-situ light-soaking IV measurement techniques are presented. We also present thin film silicon material with silicon nano-quantum dots embedded within amorphous matrix, which shows superior stability during light-soaking. Our results suggest that solar cell using silicon nano-quantum dots in abosrber layer shows superior stability under light soaking, compared to the conventional amorphous silicon solar cell.

Mechanical Modeling of Pen Drop Test for Protection of Ultra-Thin Glass Layer (초박형 유리층 보호를 위한 펜 낙하 시험의 기계적 모델링)

  • Oh, Eun Sung;Oh, Seung Jin;Lee, Sun-Woo;Jeon, Seung-Min;Kim, Taek-Soo
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.3
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    • pp.49-53
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    • 2022
  • Ultra-thin glass (UTG) has been widely used in foldable display as a cover window for the protection of display and has a great potential for rollable display and various flexible electronics. The foldable display is under impact loading by bending and touch pen and exposed to other external impact loads such as drop while people are using it. These external impact loads can cause cracks or fracture to UTG because it is very thin under 100 ㎛ as well as brittle. Cracking and fracture lead to severe reliability problems for foldable smartphone. Thus, this study constructs finite element analysis (FEA) model for the pen drop test which can measure the impact resistance of UTG and conducts mechanical modeling to improve the reliability of UTG under impact loading. When a protective layer is placed to an upper layer or lower layer of UTG layer, stress mechanism which is applied to the UTG layer by pen drop is analyzed and an optimized structure is suggested for reliability improvement of UTG layer. Furthermore, maximum principal stress values applied at the UTG layer are analyzed according to pen drop height to obtain maximum pen drop height based on the strength of UTG.

Dielectric properties of PZT thin films by 2 step sputtering (2단계 스퍼터링에 의한 PZT 박막의 유전특성)

  • Park Sam-Gyu;Mah Jae-Pyung
    • Proceedings of the IEEK Conference
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    • 2004.06b
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    • pp.363-366
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    • 2004
  • PZT thin films were formed by rf-magnetron sputtering on $Pt/Ti/SiO_2/Si$ substrate. Bulk PZT target containing $5\%$ excess PbO was used. They were formed with in-situ process at $650^{\circ}C$ as total thickness of 175 and 250 nm after the depositing of thin PZT films at room temperature, i. e. 2-step Sputtering. It was found that the ferroelectric perovskite phase is formed at $650^{\circ}C$ by XRD and the interface between room temp.-layer and $650^{\circ}C$ -layer is not existent. In the samples undergoing 2-step sputtering the dielectric constant was 600 or more and the leakage current density was $2{\times}10^{-7}A/cm^2$. So, we found that the room temp.-layer on the bottom electrode stabilize the underlaid layers.

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Study on the Analysis of Water-Soluble Dyes by Use of the Thin-Layer Chromatography. -1. Separation and Identification of Xanthene Dyes- (Thin-Layer chromatcgraphy에 의한 수용성 색소의 분석에 관한 고찰 -1. Xanthene 계 색소의 분리 및 대안-)

  • 구성회;이성호
    • Journal of Environmental Health Sciences
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    • v.2 no.1
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    • pp.5-9
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    • 1975
  • For analysis of Xanthene dyes according to the developing solvent and adsorbent was applied to Thin-layer chromatography with silicagel and cellulose plate. Silicagel chromato-plate used were prepared under different condition of activation. Using eight developing solvent, the influence of the condition for activation upon the separation of Xanthene dyes was investigated. The results are shown in Table 3. Methyl ethyl ketone+Acetone+$H_2O$ (10:0.1:0.4) mixture and n-butanol+Ammonia water (4:1) mixture gave clear separation for Xanthene dyes, including Fluorescein, Erythrosine Rhodamin B, Eosine, Rose bengale, phloxine and Acid red those Rf values decrease in the described ordor. Methyl ethyl ketone+Acetone+$H_2O$ (10:0.1:0.4) was applied to two adsorbents which were purchased from different manufactures. The results of Chromatograms are obtained Figure 6.

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A study of coupling mechanism between two dipoles integrated within a conductor-backed thin dieelectric layer above earth using asymptotic evaluation (점근적 근사를 사용한 지표면 위에 놓여 있는 한쪽 면이 도체로 된 얇은 유전체 층 내부의 두 다이폴 사이의 상호 결합 원리에 관한 연구)

  • 박동국;라정웅
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.1
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    • pp.8-13
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    • 1997
  • An electric field due to point dipole within conductor-backed thin dielectric layer above the earth is calculated by using saddle point method When the dielectric layer is thin enough to support a cutoff mdoe, we show that the field may be approximated by sum of contributions of branch points of TE mode and poles of tM mode and that the branch points and poles contributions are interpreted as an evanescent lateral waves and leaky waves, respectively.

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