• 제목/요약/키워드: Thin film phosphor

검색결과 78건 처리시간 0.023초

용량 결합형 마그네트론 스퍼터링 장치의 방전 특성 (Discharge Characteristics in Capacitively-Coupled Magnetron Sputtering System)

  • 박명하;곽동주
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 D
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    • pp.1732-1734
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    • 1999
  • In order to study the fabricating condition of phosphor layers of thin film EL devices, some discharge characteristics with several targets in the parallel-plate magnetron sputtering system will be studied. Plasma parameters, such as electron density and temperature, are also studied since they may be considered as one of the very important factors of fabricating condition of thin film EL device.

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Recent progress in oxide phosphor thin-film electroluminescent devices

  • Minami, Tadatsugu;Miyata, Toshihiro
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.27-32
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    • 2006
  • The present status and prospects for further development of thin-film electroluminescent (TFEL) devices using oxide phosphors are described. High-luminance oxide TFEL devices have been recently developed using a new combinatorial deposition technique featuring rf magnetron sputtering with a subdivided powder target. In addition, new flexible oxide TFEL devices have been fabricated on an oxide ceramic sheet and operated stably in air above $200^{\circ}C$.

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Zinc Gallate (ZnGa2O4)박막 형광체의 합성과 발광특성 (Synthesis and Photoluminescence Characteristics of Zinc Gallate (ZnGa2O4) Thin Film Phosphors)

  • 김수연;윤영훈;최성철
    • 한국세라믹학회지
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    • 제44권1호
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    • pp.32-36
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    • 2007
  • Zinc gallate $(ZnGa_2O_4)$ thin film phosphors have been formed on ITO glass substrates by a sol-gel spinning coating method. For the formation of the film phosphors, the starting materials of zinc acetate dihydrate, gallium nitrate hydrate and 2-methoxyethanol as a solution were used. The thin films deposited were firstly dried at $100^{\circ}C$ and fired at $500^{\circ}C\;or\;600^{\circ}C$ for 30 min and then, annealed $500^{\circ}C\;or\;600^{\circ}C$ at for 30 min under an annealing atmosphere of 3% $H_2/Ar$. The thin films deposited on ITO glass plates showed the (220), (222), (400), (422), (511), and (440) peaks of spinel structure as well as the (311) peak indicating a standard powder diffraction pattern. The surface morphologies of the thin film phosphors were observed with a firing and an annealing condition. The $ZnGa_2O_4$ film phosphors showed the blue emission spectra around 410 nm as well as the emission spectra in the UV region (360-380 nm).

RF 마그네트론 스퍼터링법에 의한 Y3Al5O12:Ce 형광체 박막의 성장 거동 및 발광 특성 (Growing Behavior and Luminescent Properties of Y3Al5O12:Ce Phosphor Thin Films grown by rf Magnetron Sputtering)

  • 김주원;김영진
    • 한국재료학회지
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    • 제15권8호
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    • pp.548-553
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    • 2005
  • Trivalent cerium$(Ce^{3+})$ activated YAG (yttrium aluminum garnet, $Y_3Al_5O_{12})$) thin films phosphor were deposited on quartz glass substrates by rf magnetron sputtering. The effects of sputtering parameters, annealing atmosphere, and substrates on growing behaviors and luminescent properties were investigated. The sputtering parameters were $O_2/(Ar+O_2)$ gas ratio, rf power, and deposition time. XRD (X-ray diffractometery) spectra exhibited that as-deposited films were amorphous, while they were transformed to the crystalline phases by post-annealing. The crystallinity and the atomic ratio strongly depended on the sputtering gas ratio $O_2/(Ar+O_2)$. High quality YAG:Ce thin films could be obtained at the gas ratio of $50\%$ oxygen. After annealing process, PL (Photoluminescence) spectra excited at 450nm showed a yellow single band at 550nm. The films deposited at the sputtering gas ratio of 50% oxygen exhibited the highest PL intensity.

RF 스퍼터링 방법에 의한 ZnGa2O4:Mn 박막의 성장거동과 발광특성 (Growing and Luminous Characterization of ZnGa2O4:Mn Thin Film Deposited by RF Magnetron Sputtering)

  • 정승묵;김영진
    • 한국세라믹학회지
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    • 제40권7호
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    • pp.652-656
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    • 2003
  • 녹색발광을 하는 스피넬 구조의 ZnGa$_2$O$_4$:Mn 형광체박막을 산소분압비를 증착변수로 이용하여 rf 마그네트론 스퍼터링법으로 증착하였으며, 증착된 박막을 산화, 진공+질소 분위기에서 각각 열처리를 하였다. 증착시 산소분압비 및 열처리시 산소분위기가 형광체 박막의 성장 및 발광특성에 미치는 영향을 관찰하였다. 열처리시 박막의 산화를 막을수록 발광특성이 향상되는 것으로 나타났다.

서로 다른 증착 온도에서 성장된 BaWO4:Sm3+ 형광체 박막의 구조, 광학, 표면 형상의 특성 (Structural, optical, and morphological properties of BaWO4:Sm3+ phosphor thin films grown at different deposition temperature)

  • 조신호
    • 한국표면공학회지
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    • 제55권2호
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    • pp.96-101
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    • 2022
  • The effects of the growth temperature on the structural, optical, and morphological properties of BaWO4:Sm3+ phosphor thin films were investigated. The BaWO4:Sm3+ thin films were grown on quartz substrates at several growth temperatures by radio-frequency magnetron sputtering. All the thin films crystallized in a tetragonal structure with a main BaWO4 (112) diffraction peak. The 830 nm-thick BaWO4:Sm3+ thin films grown at 300 ℃ exhibited numerous polygon-shaped particles. The excitation spectra of BaWO4:Sm3+ thin films consisted of a broad excitation band in the 200-270 nm with a maximum at 236 nm due to the O2--Sm3+ charge transfer and two small bands peaked at 402 and 463 nm, respectively. Under 236 nm excitation, the BaWO4:Sm3+ thin films showed an intense red emission peak at 641 nm due to the 4G5/26H9/2 transition of Sm3+, indicating that the Sm3+ ions occupied sites of non-inversion symmetry in the BaWO4 host lattice. The highest emission intensity was observed for the thin film grown at 300 ℃, with a 51.8% transmittance and 5.09 eV bandgap. The average optical transmittance in the wavelength range of 500-1100 nm was increased from 53.2% at 200 ℃ to 60.8% after growing at 400 ℃. These results suggest that 300 ℃ is the optimum temperature for growing redemitting BaWO4:Sm3+ thin films.

스크린 프린팅 방법으로 제작한 ZnS:(Cu, AL) 박막의 CNT 불순물 첨가에 의한 광학적 특성에 관한 연구 (Luminescence Characteristic of CNT Element in ZnS:(Cu, Al) Thin Film Fabricated by a Screen Printing Method)

  • 손봉균;신준하;배재민;이재범;김종수;이상남
    • 한국인쇄학회지
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    • 제29권1호
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    • pp.23-33
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    • 2011
  • This experimental focus to characterize luminescence properties related to CNT (Carbon Nano Tube) element dispersedly implanted in ZnS-based phosphor thin film panel fabricated by a screen printing method. More specifically FE-SEM measurements, L-V(Luminescence vs. Voltage) and photo luminescence were carried out to determine an optimum value of CNT concentration and film thickness for the thin film structure of CNT-ZnS:(Cu, Al) by the screen printing method. We confirmed that an optimum value of CNT concentration in the ZnS:(Cu, Al) film panel is about 0.75 wt% resulting that the electric conductivity is 1.6 times higher than that of pure CNT sample and showing that the luminescence intensity is increasing until the optimum concentration. Clearly, CNT is presenting in the luminescence process providing a pathway for the creation of hot electron and a channel for the electron-hole recombination but overly inserted CNT may hinder to produce the hot electron for making an avalanching process. In case of the overly doped CNT 1.0 wt% in the ZnS-based phosphor, the luminescence intensity is decreasing although the electric conductivity is exponentially increasing. Based on these results, we realized that hot electron occurred by the external electric field or exciton arose by the external photon source are reduced dramatically over the critical value of CNT concentration because CNT element provide various isolated residues in the composites of ZnS based phosphor rather than pathway or channel for the D-A(Donnor to Acceptor) pair transition or the radiative recombination of electron-hole.

트랜스퍼 몰딩 방식을 이용한 고 색 균일성 특성을 가지는 백색 LED 램프 (Development of White LED Lamp Having High Color Uniformity With Transfer Molding Technology)

  • 유순재;김도형
    • 한국전기전자재료학회논문지
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    • 제23권1호
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    • pp.38-41
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    • 2010
  • Compared to conventional molding technology, the color uniformity of light direction emitted from LED is improved with PCB type lead frame technology in which metal thin film is used and transfer molding technology which makes the density of phosphor uniform by manufacturing high density LED lamp. The light efficiency and the color uniformity of the LED are improved by molding the phosphor layer outside of chip and controlling the thickness of the phosphor layer. CIE x,y difference of LED in major axis is also improved uniformly from 0 to 90 degrees.

$BaTiO_3$/$Si_3$$N_4$ 이중절연막 구조의 교류구동형 ZnS:Mn 박막 EL 표시 조자의 특성 (The Properties of ZnS:Mn AC TFEL Device with $BaTiO_3$/$Si_3$$N_4$ Insulating Thin Film)

  • 송만호;윤기현;이윤희;한택상;오명환
    • 전자공학회논문지A
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    • 제31A권9호
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    • pp.121-127
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    • 1994
  • The capability for application of rf magnetron sputterred and post annealed BaTiO$_{3}$ thin films in dielectrics AC drived TFELD(thin film electroluminescent device) was investigated. The dielectric constant of the thin films slightly increased up to about 25 with increase fothe post annealing temperature in the range of 210$^{\circ}C$-480$^{\circ}C$. The dielectric loss was about 0.005-0.01 except for the high frequency range above 100kHz and nearly independent on post annealing temperature. The BaTiO$_{3}$ thin film used for TFELD was annealed at 480.deg. C and Si$_{3}$N$_{4}$ thin film was inserted between BaTiO$_{3}$, lower dielecrics and ZnS:Mn, phosphor layer for stable driving of the device and for fear of interdiffusion. Regardless of the frequency of the applied sine wave voltage, the threshold voltage of the prepared TFELD was 65volt and saturated brightness was about 3000cd/m$^{2}$ at 130volt(2kHz sine wave), 65volt above V$_{TH}$.

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PLD(Pulsed Laser Deposition)를 이용한 청색 박막 형광체의 제조 및 특성분석 (Preparation and Characterization of Blue Thin Film Phosphors by Pulsed Laser Deposition)

  • 조상호;정유선;곽종호;손기선
    • 한국세라믹학회지
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    • 제43권12호
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    • pp.852-858
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    • 2006
  • It is well known that $BaMgAl_{10}O_{17}:Eu^{2+}$ (BAM) and $CaMgSi_2O_6:Eu^{2+}$ (CMS) are a highly efficient blue phosphor. However, these phosphors in the form of thin films have not yet been realized clue to technical difficulties. We prepared thin film type BAM and CMS phosphors on quartz glass substrate using a pulsed laser deposition technique. The luminescent and structural properties of thin film phosphors were monitored as a function of key processing parameters such as oxygen partial pressure inside the deposition chamber, deposition time, laser energy density and the type of post-deposition treatments used. Even though we could not obtain single homogenous phases, thin films with large homogenous areas and a high photoluminescence could be produced by optimizing these processing parameters.