Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지
DOI QR코드

DOI QR Code

Growing and Luminous Characterization of ZnGa2O4:Mn Thin Film Deposited by RF Magnetron Sputtering

RF 스퍼터링 방법에 의한 ZnGa2O4:Mn 박막의 성장거동과 발광특성

  • Published : 2003.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

The green emitting phosphor, BnGa$_2$O$_4$:Mn thin films with spinel structure were deposited by rf magnetron sputtering at various Ar/O$_2$ ratios. Thin film phosphors were heat-treated in air and $N_2$+vacuum atmosphere, respectively. Effects of Ar/O$_2$ ratios and annealing conditions on the structural and photoluminescence (PL) and cathodeluminescence (CL) properties were investigated. Luminous properties were more improved by inhibiting the films from contacting with oxygen during heat treatment.

녹색발광을 하는 스피넬 구조의 ZnGa$_2$O$_4$:Mn 형광체박막을 산소분압비를 증착변수로 이용하여 rf 마그네트론 스퍼터링법으로 증착하였으며, 증착된 박막을 산화, 진공+질소 분위기에서 각각 열처리를 하였다. 증착시 산소분압비 및 열처리시 산소분위기가 형광체 박막의 성장 및 발광특성에 미치는 영향을 관찰하였다. 열처리시 박막의 산화를 막을수록 발광특성이 향상되는 것으로 나타났다.

Keywords

References

  1. Surface and Coating Tech. v.108;109 TFEL Devices Using Oxide Thin Films without Vacuum Process T.Minami;T.Miyata;Y.Sakagami
  2. J. Kor. Ceram. Soc. v.39 no.11 Preparation of $SrTiO_{3}:Pr^{3+}$ Phosphors Using Supercritical Fluid Method and its Luminescence Properties K.M.Choi;S.H.Hong;D.Y.Lim;J.S.Nho;S.B.Cho https://doi.org/10.4191/KCERS.2002.39.11.1023
  3. J. Kor. Ceram. Soc. v.33 no.5 Preparation and Photoluminescence of Mn-doped ZnGa₂O₄Phosphors H.J.Ryu;H.D.Park
  4. J. Vac. Sci. Tech. B v.12 no.2 New Electron Excited Light Emitting Materials A.Vecht;D.W.Smith;S.S.Chadha;C.S.Gibbons;J.Koh;D.Morton https://doi.org/10.1116/1.587346
  5. Display v.19 Pulsed Laser Deposition of Y₂O₃:Eu Thin Film Phosphor S.L.Jones;D.Kumar;K.G.Cho;R.Simgh;P.H.Holloway https://doi.org/10.1016/S0141-9382(98)00045-6
  6. J. Vac. Sci. Tech. v.6 Effects of Added O₂upon Argon Emission from an RF Glow Discharge J.B.Lounsbury https://doi.org/10.1116/1.1492717
  7. J. Appl. Phys. v.50 no.5 Mass Effects on Angular Distribution of Sputtered Atoms R.R.Olson;M.E.King;G.K.Wehner https://doi.org/10.1063/1.326321
  8. J. Appl. Phys. v.66 no.7 Epitaxial Y-Ba-Cu-O Thin Films on MgO Deposited by High-pressure Reactive Magnetron Sputtering K.Tanabe;D.K.Lathrop;S.E.Russek;R.A.Buhrman https://doi.org/10.1063/1.344151
  9. J. Appl. Phys. v.76 no.6 Cathod-oluminescent Characteristics of ZnGa₂O₄ Phosphor Grown by Radio Frequency Magentron Sputtering I.J.Hsieh;K.T.Chu;C.F.Yu;M.S.Feng https://doi.org/10.1063/1.358500
  10. J. Kor. Ceram. Soc. v.35 no.6 Doping and Annealing Effect on Luminescent Characteristics of ZnGa₂O₄ Phosphor Thin Films Y.H.Jeong;S.M.Jeong;S.B.Kim;Y.J.Kim
  11. J. Appl. Phys. v.79 no.9 Manganese-activated Luminescence in ZnGa₂O₄ C.F.Yu;P.Lin https://doi.org/10.1063/1.361435
  12. J. Electrochem. Soc. v.141 no.6 Growth of ZnGa₂O₄Phosphor by Radio Frequency Magnetron Sputtering I.J.Hsieh;M.S.Feng;K.T.Juo;P.Lin https://doi.org/10.1149/1.2054971
  13. J. Mater. Sci. : Materials in Electronics v.9 A Study of ZnGa₂O₄Phosphor Prepared by the Solid Method K.H.Hsu;M.R.Yang;K.S.Chen https://doi.org/10.1023/A:1008824706106