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http://dx.doi.org/10.4191/KCERS.2003.40.7.652

Growing and Luminous Characterization of ZnGa2O4:Mn Thin Film Deposited by RF Magnetron Sputtering  

정승묵 (경기대학교 재료공학과)
김영진 (경기대학교 재료공학과)
Publication Information
Journal of the Korean Ceramic Society / v.40, no.7, 2003 , pp. 652-656 More about this Journal
Abstract
The green emitting phosphor, BnGa$_2$O$_4$:Mn thin films with spinel structure were deposited by rf magnetron sputtering at various Ar/O$_2$ ratios. Thin film phosphors were heat-treated in air and $N_2$+vacuum atmosphere, respectively. Effects of Ar/O$_2$ ratios and annealing conditions on the structural and photoluminescence (PL) and cathodeluminescence (CL) properties were investigated. Luminous properties were more improved by inhibiting the films from contacting with oxygen during heat treatment.
Keywords
$ZnGa_2$$O_4$; Mn thin film; Annealing condition; PL; CL;
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Times Cited By KSCI : 2  (Citation Analysis)
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