• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.2
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• pp.711-718
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• 2017

Silver nanoparticles were attached by chemical reduction after synthesizing a porous PVK-CTA complex. The PVK-CTA complex was synthesized by polymerizing N-vinylcarbazole in a CTA-chloroform solution using iron(III) chloride as an oxidizing agent and a honeycomb-pattern with uniformly formed macropores was formed by applying steam to the complex surface soaked with a volatile solvent under humid conditions. Using TTF as a reducing agent and PVP as a dispersant, silver nanoparticles were attached on the Honeycomb-pattern complex surface through chemical reduction. The formation of the complex was confirmed by FT-IR and UV-Vis spectrometry, and the degree of thermal decomposition of the complexes was analyzed after N-vinylcarbazole was polymerized by varying its concentration. The uniformity of the pores on the composite surface and the dispersibility of the attached silver nanoparticles were investigated by SEM. The dispersibility of the silver nanoparticles was also analyzed by varying the concentrations of reducing agent and dispersant and precursor.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.7
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• pp.575-580
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• 2007

A 16 Mb 1T1C FeRAM device was integrated with BLT capacitors. But a lot of cells were failed randomly during the measuring the bit-line signal distribution of each cell. The reason was revealed that the grain size and orientation of the BLT thin film were severely non-uniform. And the grain size and orientation were severely affected by the process conditions of post heat treatment, especially nucleation step. The optimized annealing temperature at the nucleation step was $560^{\circ}C$. The microstructure of the BLT thin film was also varied by the annealing time at the step. The longer process time showed the finer grain size. Therefore, the uniformity of the grain size and orientation could be improved by changing the process conditions of the nucleation step. The FeRAM device without random bit-fail cell was successfully fabricated with the optimized BLT capacitor and the sensing margin in bit-line signal distribution of it was about 340 mV.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.229.2-229.2
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• 2013

Yttrium oxide (Y2O3)는 band gap이 5.5 eV 정도로 상대적으로 넓고, 굴절상수가 1.8, 유전율이 10~15, Silicon 과의 격자 불일치가 작은 특성을 가지고 있다. 또한 녹는점이 높아 열적으로 안정하기 때문에 전자소자 및 광학소자에 다양하게 응용되는 물질이다. Y2O3 박막은 다양한 방법으로 증착할 수 있는데, 그 방법에는 e-beam evaporation, laser ablation, sputtering, thermal oxidation, metal-organic chemical vapor deposition, and atomic layer deposition (ALD) 등이 있다. ALD는 기판 표면에 흡착된 원자들의 자기 제한적 반응에 의하여 박막이 증착되기 때문에 박막 두께조절이 용이하고 step coverage와 uniformity 측면에서 큰 장점이 있다. 이전에는 Y(thd)3 and Y(CH3Cp)3 와 같은 금속 전구체를 이용하여 ALD를 진행하여, 증착 속도가 낮고 defect이 많아 non-stoichiometric한 조성의 박막이 증착되는 문제점이 있었다. 이번 연구에서는, (iPrCp)2Y(iPr-amd)와 탈이온수를 사용하여 Y2O3 박막을 증착하였다. Y2O3 박막 증착에 사용한 Y 전구체는 상온에서 액체이고 $192^{\circ}C$ 에서 1 Torr의 높은 증기압을 갖는다. Y2O3 박막 증착을 위하여 Y 전구체는 $150^{\circ}C$ 로 가열하여 N2 gas를 이용하여 bubbling 방식으로 공정 챔버 내로 공급하였다. Y2O3 박막의 ALD window는 $250{\sim}350^{\circ}C$ 였으며, Y 전구체의 공급시간이 5초에 다다르자 더 이상 증착 두께가 증가하지 않는 자기 제한적 반응을 확인할 수 있었다. 그리고 증착된 Y2O3 박막의 특성 분석을 위해 Atomic force microscopy (AFM)과 X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES) 를 진행하였다. 박막의 Surface morphology 는 매끄럽고 uniform 하였으며, 특히 고체 금속 전구체를 사용했을 때와 비교하여 수산화물이 거의 없는 박막을 얻을 수 있었다. 그리고 조성 분석을 통해 증착된 Y2O3 박막이 stoichiometric하다는 것을 알수 있었다. 또한 metal-insulator-metal (MIM) 구조 (Ru/Y2O3/Ru) 의 resistor 소자를 형성하여 저항 스위칭 특성을 확인하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.276-279
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• 2004

Plasma enhanced chemical vapor deposition (PECVD) of silicon nitride (SiN) is a proven technique for obtaining layers that meet the needs of surface passivation and anti-reflection coating. In addition, the deposition process appears to provoke bulk passivation as well due to diffusion of atomic hydrogen. This bulk passivation is an important advantage of PECVD deposition when compared to the conventional CVD techniques. A further advantage of PECVD is that the process takes place at a relatively low temperature of 300t, keeping the total thermal budget of the cell processing to a minimum. In this work SiN deposition was performed using a horizontal PECVD reactor system consisting of a long horizontal quartz tube that was radiantly heated. Special and long rectangular graphite plates served as both the electrodes to establish the plasma and holders of the wafers. The electrode configuration was designed to provide a uniform plasma environment for each wafer and to ensure the film uniformity. These horizontally oriented graphite electrodes were stacked parallel to one another, side by side, with alternating plates serving as power and ground electrodes for the RF power supply. The plasma was formed in the space between each pair of plates. Also this paper deals with the fabrication of multicrystalline silicon solar cells with PECVD SiN layers combined with high-throughput screen printing and RTP firing. Using this sequence we were able to obtain solar cells with an efficiency of 14% for polished multi crystalline Si wafers of size 125 m square.

• Journal of Biosystems Engineering
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• v.43 no.4
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• pp.342-351
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• 2018

Purpose: Recently, an increasing number of farms have been cultivating shiitake mushrooms using a sawdust substrate and a cooler/heater. In this study, an attempt was made to develop an environmental control system using a heat pump for cultivating high-quality shiitake mushrooms. Methods: An environmental control system, consisting of an air-to-water type heat pump, a thermal storage tank, and a radiator in a variable opening chamber, was designed and fabricated. The system was also installed in the cultivation facility of a farm cultivating shiitake mushrooms so as to compare the proposed control system with a conventional environmental control system using a cooler-condensing unit and an electric hot water boiler. Results: The uniformity of the environment was analyzed through environment measurements taken at several positions inside the cultivation facility. It was determined that the developed environmental control system is able to control the variations in temperature and relative humidity to within 1% and 3%, respectively. In addition, a maximum temperature difference of $30^{\circ}C$ (maximum of $35^{\circ}C$, minimum of $5^{\circ}C$) and a maximum relative humidity difference of 30% (maximum of 90%, minimum of 60%) can be attained within 30 min inside the cultivation facility through the cooling of the heat pump and heating of the radiator in a variable opening chamber. Thus, the developed control system can be used to cultivate high-quality shiitake mushrooms more effectively than a conventional cooler and heater. Conclusions: In comparison with a conventional environmental control system, the developed system decreased the yield of ordinary mushrooms by 65%, and increased that of high-quality mushrooms by 217%. This corresponds to a 16% increase in gross farm income. Consequently, the developed system is expected to improve the income of shiitake mushroom cultivating farms.

• Korean Journal of Metals and Materials
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• v.48 no.2
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• pp.133-140
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• 2010

10 nm thick Ni layers were deposited on 200 nm $SiO_2/Si$ substrates using an e-beam evaporator. Then, 60 nm or 20 nm thick ${\alpha}$-Si:H layers were grown at low temperature (<$200^{\circ}C$) by a Catalytic-CVD. NiSi layers were already formed instantaneously during Cat-CVD process regardless of the thickness of the $\alpha$-Si. The resulting changes in sheet resistance, microstructure, phase, chemical composition, and surface roughness with the additional rapid thermal annealing up to $500^{\circ}C$ were examined using a four point probe, HRXRD, FE-SEM, TEM, AES, and SPM, respectively. The sheet resistance of the NiSi layer was 12${\Omega}$/□ regardless of the thickness of the ${\alpha}$-Si and kept stable even after the additional annealing process. The thickness of the NiSi layer was 30 nm with excellent uniformity and the surface roughness was maintained under 2 nm after the annealing. Accordingly, our result implies that the low temperature Cat-CVD process with proposed films stack sequence may have more advantages than the conventional CVD process for nano scale NiSi applications.

• Food Engineering Progress
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• v.23 no.2
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• pp.87-93
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• 2019

Temperature distribution studies were performed in steam-air retort to investigate the influence of various processing conditions (come-up time, sterilization temperature, and internal pressure throughout the steam-air retort). Retort temperature data were analyzed for temperature deviations during holding phase, maximum temperature difference between test locations at the beginning and after 1, 3, and 5 min of the holding phase, and box-and-whiskers plots for each location during the holding phase. The results showed that high sterilization temperature led to a more uniform temperature distribution than low sterilization temperature (pasteurization). In pasteurization condition, the temperature stability was slightly increased by increasing pressure during the holding phase. On the other hand, the temperature stability was slightly decreased in high sterilization temperature condition. Programming of the come-up phase did not affect the temperature uniformity. In addition, the slowest cold spot was found at the bottom floor during the holding phase in all conditions. This study determined that the temperature distribution is affected by retort processing conditions, but the steam-air retort needs more validation tests for temperature stability.

• Journal of the Korea Convergence Society
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• v.13 no.3
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• pp.191-196
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• 2022

Unlike an international combustion engine car, a battery-powered electric vehicle requires an additional heat source for its heating system. A high-voltage coolant heater has the advantages of high efficiency and a wide operating temperature range. In its development, the geometry design of the coolant flow path is essential. This paper presents the thermal flow simulations of a 7kW high-voltage heater with symmetric serpentine flow channels arranged parallelly. The heater performance was evaluated from the simulation results in terms of the pressure and temperature differences and the flow uniformity. The proposed design showed a greater flow resistance and similar heat exchanging capability than the existing parallel serpentine design. It has the advantage of a relatively wide low-temperature surface area, where the control circuit board susceptible to high temperatures can be located.

• Geomechanics and Engineering
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• v.33 no.1
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• pp.29-40
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• 2023

Xanthan gum and starch compound biopolymer (XS), an environmentally friendly soil-binding material produced from natural resources, has been suggested as a slope protection material to enhance soil strength and erosion resistance. Insufficient wet strength and the consequent durability concerns remain, despite XS biopolymer-soil treatment showing high strength and erosion resistance in the dried state, even with a small dosage of soil mass. These concerns need to be solved to improve the field applicability and post-stability of this treatment. This study explored the utilization of an alkaline-based cation crosslinking method using calcium hydroxide and sodium hydroxide to induce non-thermal gelation, resulting in the enhancement of the wet strength and durability of biopolymer-treated soil. Laboratory experiments were conducted to assess the unconfined compressive strength and cyclic wetting-drying durability performance of the treated soil using a selected recipe based on a preliminary gel formation test. The results demonstrated that the uniformity of the gel structure and gelling time varied depending on the ratio of crosslinkers to biopolymer; consequently, the strength of the soil was affected. Subsequently, site soil treated with the recipe, which showed the best performance in indoor assessment, was implemented on the field slope at the bridge abutment via compaction and pressurized spraying methods to assess feasibility in field implementation. Moreover, the variation in surface soil hardness was monitored periodically for one year. Both slopes implemented by the two construction methods showed sufficient stability against detachment and scouring, with a higher soil hardness index than the natural slope for a year.

• Composites Research
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• v.36 no.5
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• pp.321-328
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• 2023

This study developed the in-situ stamp-forming process using the multi-axis robotic arm to fabricate thermal composite parts. Optimal fabrication parameters with the multi-axis robotic arm were determined using finite element analysis and these parameters were further refined through the practical manufacturing process. A comparison between the manufactured parts and finite element analysis results was conducted regarding thickness uniformity and wrinkle distribution to confirm the validity of the finite element analysis. Additionally, to evaluate the formability of the manufactured composite parts, measurements of crystallinity and porosity were taken. Consequently, this study establishes the feasibility of the In-situ stamp-forming consolidation using a robotic arm and verifies the potential for producing composite parts through this process.