• Polymer(Korea)
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• v.28 no.5
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• pp.361-366
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• 2004

The poling characteristics of PVDF (poly(vinylidene fluoride)) film was investigated by measuring the electric voltage generated by the external load for the distributed tactile sensor applications. The poling conditions for the PVDF films were controlled by changing temperature and electric field, and the resulting crystal structure of the $\beta$-phase crystal was confirmed by FT-IR, DSC, and XRD experiments. The $\beta$-phase crystal was increased with the poling temperature and poling voltage, and subsequently the permittivity of the Poled PVDF films was increased. Finally, the prototype tactile sensor was tested by a 8 $\times$ 8 may circuit exhibiting high voltage signal for the highly poled PVDF films.

• Journal of Sensor Science and Technology
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• v.17 no.4
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• pp.250-255
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• 2008

A vanadium pentoxide ($V_2O_5$)-based bolometric infrared (IR) sensor has been designed and fabricated using micro electro mechanical systems (MEMS) technology for glucose detection and its resistive characteristics has been illustrated. The proposed bolometric infrared sensor is composed of the vanadium pentoxide array that shows superior temperature coefficient of resistance (TCR) and standard silicon micromachining compatibility. In order to achieve the best performance, deposited $V_2O_5$ thin film is optimized by adequate rapid thermal annealing (RTA) process. Annealed vanadium oxide thin film has demonstrated a linear characteristic and relatively high TCR value (${-4}%/^{\circ}C$). The resistance of vanadium oxide is changed by IR intensity based on glucose concentration.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.4
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• pp.93-100
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• 1998

Pyoelectric infrared detectors based on La-modified PbTiO3 (PLT) thin films have been fabricated by RF magnetron sputtering and micromachining technology. The detectors form Pb$_{1-x}$ La$_{x}$Ti$_{1-x}$ O$_{3}$ (x=0.05) thin film ferroelectric capacitors epitaxially grown by RF magnetron sputtering on Pt/MgO (100) substrate. The sputtered PLT thin film exhibits highly c-axis oriented crystal struture that no poling trealization for sensing applications is required. This is an essential factor to increase the yield for realization of an infrared image sensor. Micromachining technology is used to lower the thermal mass of the detector by giving maximum sensor efficiency. Polyimide is coated on top of the sensing elements to support the fragile structure and the backside of the MgO substrate is selectively eteched to reduce the heat loss. The sensing element exhibited a very high detectivity D* of 8.5*10$^{8}$ cm..root.Hz/W at room temperature and it is about 100 times higher than the case of micromachining technology is not used. a sensing system that detects the position as well as the existence of a human body is realized using the array sensor.sor.

• Ceramist
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• v.22 no.1
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• pp.70-81
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• 2019

Breath analysis is rapidly evolving as a non-invasive disease recognition and diagnosis method. Metal oxide gas sensors are one of the most ideal platforms for realizing portable, hand-held breath analysis devices in the near future. This paper reviewed the recent developments in metal oxide gas sensors detecting exhaled biomarker gases such as nitric oxides, acetone, ammonia, hydrogen sulfide, and hydrocarbons. Emphasis was placed on strategies to tailor sensing materials/films capable of highly selective and sensitive detection of biomarker gases with negligible cross-response to ethanol, the major interfering breath gas. Specific examples were given to highlight the validity of the strategies, which include optimization of sensing temperature, doping additives, utilizing acid-base interaction, loading catalysts, and controlling gas reforming reaction. In addition, we briefly discussed the design and optimization method of gas sensor arrays for implementing the simultaneous assessment of multiple diseases. Breath analysis using high-performance metal oxide gas sensors/arrays will open new roads for point-of-care diagnosis of diseases such as asthma, diabetes, kidney dysfunction, halitosis, and lung cancer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.252-252
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• 2008

The microhotplates consisting of a Pt-ased heating element on AlN/poly 3C-SiC layers were fabricated. The microhotplate has a $600{\mu}m{\times}600{\mu}m$ square shaped membrane which made of $1{\mu}m$ thick ploycrystalline 3C-SiC suspended by four legs. 3C-SiC is known for excellent chemical durability, mechanical strength and sustaining of high temperature. The membrane is fabricated by surface micromachining using oxidized Si sacrificial layer. The Pt thin film is used for heating material and resist temperature sensor. The fabrication methodology allows intergration of an array of heating material and resist temperature detector. For reasons of a short response time and a high sensitivity a uniform temperature profile is desired. The dissipation of microhotplate was examined by a IR thermoviewer and the power consumption was measured. Measured and simulated results are compared and analyzed. Thermal characterization of the microhotplates shows that significant reduction in power consumption was achieved using suspended structure.

• Journal of Sensor Science and Technology
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• v.11 no.5
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• pp.279-285
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• 2002

Two $SnO_2$ based sensing films(pure $SnO_2$ and $SnO_2$/Pt) and a Pt thin film for temperature sensor on an alumina substrate were designed and fabricated for classifying the indoor environmental gases. By controlling the heating power in the shape of trapezoid, unique four sensing response curves created from both $SnO_2$ film and $SnO_2$/Pt film. Then, various parameters were extracted from sensing response curves and carried out principal component analysis(PCA). The results confirm that a sensor array with the proposed operating mode was extremely effective in classifying indoor environmental gases such as $CO_2$, $C_3H_8$, $C_4H_{10}$.

• Journal of Practical Engineering Education
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• v.13 no.2
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• pp.301-304
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• 2021

In this study, we developed a module that can perform two functions at the same time through interworking between a personal recognition module and a heat detection module in the era of COVID-19. This can simultaneously solve the problem of compatibility of the personal recognition module that occurs in the existing system and the problem of secondary infection that can occur during congestion due to the separate implementation of heat detection. Therefore, in this study, NFC and Bluetooth motherboards were developed, and an array-type non-contact temperature sensor was applied to detect heat. The developed system is expected to be able to realize both access control of floating population and effective quarantine at the same time in public institutions or private companies that require AI automated access control. In addition, it is judged that it is possible to link the embedded programming and web programming implementation method using the module of the development system to the educational program.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.34 no.12A
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• pp.925-932
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• 2009

Precise temperature monitoring is the major preconditioning to supervise quality losses within the transport chain for fresh products. ISO/IEC18000-6REV1 defines new protocols supporting BAP(Battery Assisted Passive) RFID tag which is completely compatible with EPCglobal Class1 Generation2 specification. In this paper, we designed a modem supporting BAP RFID tag with FPGA(Field Programmable Gate Array) and implemented sensor data processing function defined in ISO/IEC18000-6REV1. The transmit block of the modem supports pulse shaping filter and the output signal of the implemented RFID reader is satisfied with the spectrum mask defined in the standard. The receive block of the modem uses Gardner TED to synchronize timing of symbol. In this paper, we designed a modem supporting ISO/IEC18000-6REV1 standard and developed a RFID reader sndard. The developed RFID reader sndard can recognize sensor tag and passive tag in the wireless environment and supports real-time processing of the sensor data in the embedded linux platform.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.4
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• pp.31-37
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• 2017

Recently, there has been substantial interest in flexible and wearable devices whose properties and performances are close to conventional devices on hard substrates. Despite the advancement on flexible devices with organic semiconductors or carbon nanotube films, their performances are limited by the carrier scattering at the molecular to molecular or nanotube-to-nanotube junctions. Here in this study, we demonstrate on the vertical semiconductor crystal array embedded in flexible polymer matrix. Such structures can relieve the strain effectively, thereby accommodating large flexural deformation. To achieve such structure, we first established a low-temperature solution-phase synthesis of single crystalline 3D architectures consisting of epitaxially grown ZnO constituent crystals by position and growth direction controlled growth strategy. The ZnO vertical crystal array was integrated into a piece of polydimethylsiloxane (PDMS) substrate, which was then mechanically detached from the hard substrate to achieve the freestanding ZnO-polymer composite. In addition, the characteristics of transferred ZnO were confirmed by additional structural and photoluminescent measurements. The ZnO vertical crystal array embedded in PDMS was further employed as pressure sensor that exhibited an active response to the external pressure, by piezoelectric effect of ZnO crystal.

• ETRI Journal
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• v.29 no.5
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• pp.667-669
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• 2007

This letter presents a smart integrated microfluidic device which can be applied to actively immobilize proteins on demand. The active component in the device is a temperature-controllable microelectrode array with a smart polymer film, poly(N-isopropylacrylamide) (PNIPAAm) which can be thermally switched between hydrophilic and hydrophobic states. It is integrated into a micro hot diaphragm having an integrated micro heater and temperature sensors on a 2-micrometer-thick silicon oxide/silicon nitride/silicon oxide (O/N/O) template. Only 36 mW is required to heat the large template area of 2 mm${\times}$16 mm to $40^{\circ}C$ within 1 second. To relay the stimulus-response activity to the microelectrode surface, the interface is modified with a smart polymer. For a model biomolecular affinity test, an anti-6-(2, 4-dinitrophenyl) aminohexanoic acid (DNP) antibody protein immobilization on the microelectrodes is demonstrated by fluorescence patterns.