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http://dx.doi.org/10.5369/JSST.2008.17.4.250

The fabrication of bolometric IR detector for glucose concentration detection  

Choi, Ju-Chan (Graduate School of Electrical Engineering and Computer Science, Kyungpook National University)
Jung, Ho (Graduate School of Electrical Engineering and Computer Science, Kyungpook National University)
Park, Kun-Sik (Process Technology Team, Electronics and Telecommunications Research Institute)
Park, Jong-Moon (Process Technology Team, Electronics and Telecommunications Research Institute)
Koo, Jin-Gun (Process Technology Team, Electronics and Telecommunications Research Institute)
Kang, Jin-Yeong (Process Technology Team, Electronics and Telecommunications Research Institute)
Kong, Seong-Ho (Graduate School of Electrical Engineering and Computer Science, Kyungpook National University)
Publication Information
Journal of Sensor Science and Technology / v.17, no.4, 2008 , pp. 250-255 More about this Journal
Abstract
A vanadium pentoxide ($V_2O_5$)-based bolometric infrared (IR) sensor has been designed and fabricated using micro electro mechanical systems (MEMS) technology for glucose detection and its resistive characteristics has been illustrated. The proposed bolometric infrared sensor is composed of the vanadium pentoxide array that shows superior temperature coefficient of resistance (TCR) and standard silicon micromachining compatibility. In order to achieve the best performance, deposited $V_2O_5$ thin film is optimized by adequate rapid thermal annealing (RTA) process. Annealed vanadium oxide thin film has demonstrated a linear characteristic and relatively high TCR value (${-4}%/^{\circ}C$). The resistance of vanadium oxide is changed by IR intensity based on glucose concentration.
Keywords
IR; glucose; bolometer; vanadium oxide;
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