• 마이크로전자및패키징학회지
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• 제14권4호
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• pp.63-69
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• 2007

Cu 비아를 이용한 MEMS 센서의 스택 패키지용 interconnection 공정을 연구하였다. Ag 페이스트 막을 유리기판에 형성하고 관통 비아 홀이 형성된 Si 기판을 접착시켜 Ag 페이스트 막을 Cu 비아 형성용 전기도금 씨앗층으로 사용하였다. Ag 전기도금 씨앗층에 직류전류 모드로 $20mA/cm^2$와 $30mA/cm^2$의 전류밀도를 인가하여 Cu 비아 filling을 함으로써 직경 $200{\mu}m$, 깊이 $350{\mu}m$인 도금결함이 없는 Cu 비아를 형성하는 것이 가능하였다. Cu 비아가 형성된 Si 기판에 Ti/Cu/Ti metallization 및 배선라인 형성공정, Au 패드 도금공정, Sn 솔더범프 전기도금 및 리플로우 공정을 순차적으로 진행함으로써 Cu 비아를 이용한 MEMS 센서의 스택 패키지용 interconnection 공정을 이룰 수 있었다.

• Korean Chemical Engineering Research
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• 제53권1호
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• pp.103-110
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• 2015

본 연구에서는 가스 하이드레이트 기술을 이용하여 철강 공정 배기가스로부터 $CO_2$를 분리하는데 사용하는 여러 촉진제의 성능을 조사하였다. 이 실험에서는 $CO_2/N_2$ 혼합가스 ($CO_2/N_2$=20/80, 40/60)와 $CO_2/N_2$ 이외에 CO, $H_2$가 첨가된 Blast furnace gas (BFG) 모델 가스를 대상 가스로 사용하였다. 촉진제로는 구조 II 하이드레이트를 형성한다고 알려진 tetrahydrofuran (THF), propylene oxide, 1,4-dioxane 를 사용하였으며, 각 가스에 대하여 촉진제를 농도별로 첨가했을 때 상평형점의 변화를 측정하였다. 상평형점은 "연속" Quartz crystal microbalance (QCM) 방식을 이용하였다. 또한, Powder X-ray diffraction (PXRD) 분석을 통하여 촉진제의 첨가가 가스 하이드레이트 구조에 미치는 영향을 알아보았다.

• Transactions on Electrical and Electronic Materials
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• 제8권3호
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• pp.110-114
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• 2007

Dependence of the thermal stability of nickel silicide on the film stress of inter layer dielectric (ILD) layer has been investigated in this study and silicon nitride $(Si_3N_4)$ layer is used as an ILD layer. Nickel silicide was formed with a one-step rapid thermal process at $500^{\circ}C$ for 30 sec. $2000{\AA}$ thick $Si_3N_4$ layer was deposited using plasma enhanced chemical vapor deposition after the formation of Ni silicide and its stress was split from compressive stress to tensile stress by controlling the power of power sources. Stress level of each stress type was also split for thorough analysis. It is found that the thermal stability of nickel silicide strongly depends on the stress type as well as the stress level induced by the $Si_3N_4$ layer. In the case of high compressive stress, silicide agglomeration and its phase transformation from the low-resistivity nickel mono-silicide to the high-resistivity nickel di-silicide are retarded, and hence the thermal stability is obviously improved a lot. However, in the case of high tensile stress, the thermal stability shows the worst case among the stressed cases.

• 마이크로전자및패키징학회지
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• 제16권4호
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• pp.23-28
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• 2009

Si 기판의 캐비티 형성이 불필요한 웨이퍼-레벨 MEMS capping 공정을 연구하였다. 4인치 Si 웨이퍼에 Ni 캡을 전기도금으로 형성하고 Ni 캡 rim을 Si 하부기판의 Cu rim에 에폭시 본딩한 후, SnBi debonding 층을 이용하여 상부기판을 Ni 캡 구조물로부터 debonding 하였다. 진공증착법으로 형성한 SnBi debonding 층은 Bi와 Sn 사이의 심한 증기압 차이에 의해 Bi/Sn의 2층 구조로 이루어져 있었다. SnBi 증착 층을 $150^{\circ}C$에서 15초 이상 유지시에는 Sn과 Bi 사이의 상호 확산에 의해 eutectic 상과 Bi-rich $\beta$상으로 이루어진 SnBi 합금이 형성되었다. $150^{\circ}C$에서 유지시 SnBi의 용융에 의해 Si 기판과 Ni 캡 구조물 사이의 debonding이 가능하였다.

• 천문학회보
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• 제42권2호
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• pp.49.1-49.1
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• 2017

Comets are one of the most primordial solar system objects that hold the information of the early days of solar system formation inside their nuclei. Orbiting the Sun, they spew such ancient materials that have been buried for many years, creating dust and gas comae. Cometary dust grains absorb and scatter sunlight radiating the continuous light, while gas molecules form the line emissions. Eachof the comets has its own light patterns, which depends on the physical and chemical properties of the dust and gas components. In this regard, spectropolarimetrycan be a powerful tool to study the properties of cometary constituents free from contamination of each other. This methodology offers a series of information on the polarization degrees of the dust and gas components as well as on wavelength dependence of the polarization degree and polarization angle of cometary dust simultaneously. Herein, we will report the results of the spectropolarimetric study of comet 2P/Encke, which is one of the well-known objects for its shortest orbital period and its prominent aging signals. We performed a spectropolarimetric observation of comet 2P/Encke in its inbound orbit using the Higashi-Hiroshima Optical and Near-Infrared Camera (HONIR) at the Higashi-Hiroshima Observatory, Japan, on UT 2017 February 21 at high phase angle of =75.7 deg. Ourstudy of this interesting comet is the first and only one done through spectropolarimetry in a referred publication. We will discuss the most recent polarimetric results of our study in terms of 2P/Encke' scurrent evolutionary status.

• 센서학회지
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• 제5권4호
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• pp.41-46
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• 1996

변압기 절연유중 용존수소를 감지하기 위해 Pd/Pt 게이트 MISFET 센서를 제조하고 그 특성을 조사하였다. 동일 칩안에 내장형 히터와 온도측정용 다이오드를 제조하고 MISFET의 전압 드리프트를 줄이기 위해 차동형구조로 하였다. 수소유입 드리프트를 줄이기 위해, 양쪽 FET의 게이트 절연층을 실리콘 산화막과 실리콘 질화막의 2중 구조로 하였다. 수소감지막의 블리스터를 줄이기 위해 Pd/Pt 2중 금속층을 증착하였다. 제조된 센서의 변압기 절연유에 대한 수소감지 특성은 40mV/10ppm 감도와 0.14mV/day 안정도를 보였다.

• 한국과학교육학회지
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• 제13권1호
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• pp.56-65
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• 1993

The purpose of this study is to analyze the inquiry activities of SCIIS and Korea primary school science curricular meterials and to make suggestions for the improvement of inquiry learning based on the analysis The Scientific Inquiry Evaluation Inventory (SIEI: Myung Hur, 1984) was used to evaluate the inquiry activity content of the primary school "Science, Level-6" and "SCIIS, Level-6" textbooks. The results are as follows: 1) The inquiry activities of Korean science textbooks are stressing on gathering and organizing data, but rarely require students to formulate a hypothesis, to design an experiment. 2) The SCIIS textbooks relatively tended to put more weight on interpreting/ analysing data and hypothesizing/ designing experiments. 3)The Korean science textbooks had little concern about establishing hypothesis and designing experiments, interpreting / analysing data. 4) The SCIIS textbooks require students to perform a variety of inquiry skills when compare to Korean science textbooks. 5) Competition / Cooperation Scale checks the level of competition and cooperation among student teams inherent in science curricular materials. The result from each team is incorporated into the formation of a class result. The communication is required to formulate a synthesized class response, enhances cooperation among teams. The SCIIS(84%) is the higher than Korea(50%) in cooperation scale. 6) Korean science textbooks rarely require students to discuss about experiment when compare to SCIIS textbooks. 7) Korean science textbooks provide students with both inquiry problems and experimental procedure, or including answers SCIIS textbooks provide students with both inquiry problems and experimental procedure, or problems only. 8) The Korean textbooks emphasize demonstrating or verifying of the text while the SCIlS emphasize extending the content of the text in inquiry scope scsle. The inquiry pyramid which helps analysis the inquiry activity curriculum as a whole is one of type 1- the course is centered on gathering and organizing data. The SCIIS are better than the Korean science textbook in the light of proportion of interpreting / analysing data and hypothesizing / designing experiments.

• 한국수산과학회지
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• 제51권1호
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• pp.54-63
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• 2018

We investigated the effect of $CO_2$ exposure on the reproductive process of chameleon goby Tridentiger trigonocephalus. Rearing aquaria were exposed for 90 days to $CO_2$ gas through diffuser connected with pH controller maintaining at pH 7.2 ($156.31{\pm}7.90ppm$) in low treatment, and at pH 6.5 ($274.17{\pm}6.51ppm$) in high treatment. $CO_2$ treatment had no significant effects on survival rates although the value was decreased compared to the controls. In female fish, $CO_2$ treatment had no significant effects on gonadosomatic index (GSI), hepatosomatic index (HSI) and condition factor (CF). However, high $CO_2$ treatment decreased HSI and CF in males significantly compared to the controls (P<0.05). The spawning occurrence was 6 times in the low level $CO_2$ treatment, and 4 times in the high level $CO_2$ treatment although only once in the controls. For the histological observations, there was no significant difference in $CO_2$ treatments. However, in male fish, $CO_2$ treatment delayed the formation of sperm from spermatid compared to controls. These results suggest $CO_2$ may disrupt reproductive process by delaying gametogenesis in chameleon goby and it was more sensitive in males.

• Progress in Superconductivity
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• 제8권1호
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• pp.71-74
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• 2006

High $J_c$ over 1 $MA/cm^2$ YBCO film has been successfully prepared using nitrate precursors by spray pyrolysis method. Aerosol drolpets generated using a concentric spray nozzle were directly sprayed on a $LaAlO_3$(100) single crystal substrate. The cation ratio of precursor solution was Y:Ba:Cu=1:2.65:1.35. The distance between nozzle and substrate was 15 cm. Deposition temperature was ranging from $750^{\circ}C\;to\;800^{\circ}C$. Deposition pressure was 100 Torr, and oxygen partial pressure was varied from 10 Torr to 50 Torr. The microstructure, phase formation, texture development and superconducting properties of deposited films were largely changed with oxygen partial pressure. Deposited films showed a texture with(001) planes parallel to substrate plane. High quality film was obtained when film was deposited at $760^{\circ}C$ with an oxygen partial pressure of 30 Torr. The critical current density($J_c$) of the YBCO film was 1.75 $MA/cm^2$ at 77 K and self-field.

• Journal of Welding and Joining
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• 제31권1호
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• pp.58-64
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• 2013

The following results were obtained, microstructures and tensile properties in arc brazed joints of DP(dual phase) steel using Cu-5.3wt%Sn insert metal was investigated as function of brazing current. 1) The Fusion Zone was composed of ${\alpha}Fe+{\gamma}Cu$ and Cu23Sn2. The reason for the formation of these solid solutions. Despite, Fe & Cu were impossible to solid solution at room temperature. It's melting & reaction to something of insert metal & Base Metal (DP Steel) by Arc. Brazing Process has faster cooling rate then Cast Process, Supersaturated solid solution at room temperature. 2) The increase Hardness of Fusion Zone was directly proportional to the rise of welding current. Because, ${\alpha}Fe+{\gamma}Cu$ phase (higher hardness than the Cu23Sn2.(104.1Hv < 271.9Hv)) Volume fraction was Growth, due to increasing the amount of base metal melting by High current. 3) The results of tensile shear test by Brazing, All specimens happen to fracture in Fusion Zone. On the other hand, when Brazing Current increasing tend to rise tensile load. but it was very small, about 26-30% of the base metal. 4) The result of fracture analysis, The crack initiate at Triple Point for meet to Upper B.M/Under B.M/Fusion Zone. This Crack propagated to Fusion zone. So ruptured by tensile strength. The Reason to in the fusion zone fracture, Fusion zone by Brazing of hardness (strength) was very lower then the base metal (DP steel). In addition the Fusion Zone's thickness in triple point was thin than the base metal's thickness in triple point.