• 한국정밀공학회지
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• 제32권2호
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• pp.135-140
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• 2015

It is an important thing for a designer to simulate and predict the performance of a spindle and a rotary table. In addition to the general performance such as static stiffness, the error motion performance information is beneficial to the designer in many cases. However for an aerostatic bearing the fluid film physical status should be calculated in order to simulate those performances and the calculation time is another obstacle for a simple performance simulation. In this paper the investigation on experiment and simulation is performed in order to find a more effective simulation method for the rotational error motion.

• 한국정밀공학회지
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• 제29권8호
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.9-14
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• 2001

A new model utilizing a transfer function is introduced in the present paper for analizing motion errors of hydrostatic tables. Relationship between film reaction force in a single hydrostatic pad and form error of a guide rail is derived at various spacial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called averaging effect of the oil film quantitively. For example, it is found that the amplitide of the film reaction force is reduced as the spacial frequency increases or relative width of the pocket is reduced. Motion errors of a multiple pad table is estimated from transfer function, geometric relationship between each pads and form errors of a guide rail, which is named as Transfer Function Method. Calculated motion errors by TFM show good agreement with motion errors calculated by Multi Pad Method, which is considered entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.487-488
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.129-130
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• 2010

• International Journal of Precision Engineering and Manufacturing
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• 제5권2호
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• pp.60-67
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• 2004

For improving the motion accuracy of hydrostatic tables, a corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. The reverse analysis is performed firstly to estimate the rail profile from the measured linear and angular motion error, in the algorithm. For the next step, the corrective machining information is obtained based upon the estimated rail pronto. Finally, the motion errors on the correctively machined rail are analyzed by using the motion error analysis method. These processes are iterated until the analyzed motion errors are satisfactory within the target accuracy. In order to verify the validity of the algorithm theoretically, the motion errors calculated by the estimated rail after the corrective machining process, are compared with those by the true rail which is previously assumed as the initially measured value. The motion errors calculated using the estimated rail show good agreement with the assumed values, and it is shown that the algorithm is effective in acquiring the corrective machining information to improve the accuracy of hydrostatic tables.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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• pp.321-324
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• 2003

We reported the method for the relatively simple equalizing pulse to reduce dynamic false contour. Equalizing pulse is determined by look-up-table and moving direction and velocity of the image. Used lookup-table is a few. If image moves to right or left, necessary LUT is only one for the velocity of 1 pixel/tvfield to right or left. This technique makes the process simple after obtaining motion information.

• 한국정밀공학회지
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• 제32권2호
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• pp.127-133
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• 2015

The error motion of a machine tool spindle directly affects the surface errors of machined parts. Those are usually due to the imperfectness of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions for rotary units such as a spindle and rotary table are suggested. To estimate the error motions of the rotary unit, waviness of bearings and external force model were used as input data. The estimation model considers geometric relationship and force equilibrium of the five degree of the freedom motions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1993년도 추계학술대회 논문집
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• pp.279-285
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• 1993

This paper presents a precision automatic measuring system for ball screw Pitch. Ball screw is mounted on a precision indexing table, and the ball screw pitch is measured via magnetic scale, where the indexing and measurement are performed by a PC. For precision indexing of ball screw, direct driven motor is coupled to the designed dead and live centers; the performance of the centers are assessed with a precision master sylinder,such as radial motion,tilt motion, and axial motions. An error compensation model is constructed for the measurement system of ball screw pitch, where the error motions of indexing system as well as the scale measurement system are combined to give the measurement error for the ball screw. The developed system proposes an automated precision measurement system for manufacturers and users of ball screw.

• 한국공작기계학회논문집
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• 제11권5호
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• pp.7-14
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• 2002

In order to achieve high precision machine tools, the research for performance enhancement of feed drive systems is required. Development of the high speed feed drive system has been a major issue for the past few decades in machine tool indestries. Because table levitation system decrease the table weight, an effect of reaction by weight is minimized and lost motion can be removed at maximum. In case fled system is designed with drive motor, ball screw and support bearing load capacity selection, an effect of decrease of the table weight exist. So, the table weight through an effect of decrease call it into the realization of cost down. Stick-slip friction has a great influence on the contouring accuracy of CNC machine tools. In this paper table levitation system has been developed for the stick-slip in a fled drive systems.