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Park, C. H., Oh, Y. J., Lee, C. H. and Hong, J. H., 'Theoretical Verification on the Motion Error Analysis Method of Hydrostatic Bearing Tables Using a Transfer Function,' Int. J. of KSPE, Vol. 4, No. 2, pp. 64-70, 2003
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Kodama, S. and Suda, N., 'Matrix Theory for the System Control,' The Society of Instruments and Control Engineers (Japan), 2nd Edition, 1981
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3 |
Park, C. H., Oh, Y. J., Lee, C. H. and Hong, J. H., 'Experimental Verification on the Motion Error Analysis Method of Hydrostatic Bearing Tables Using a Transfer Function,' Int. J. of KSPE, Vol. 4, No. 2, pp. 57-63, 2003
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