• Title/Summary/Keyword: TED

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Analysis and Calibration of Transient Enhanced Diffusion for Indium Impurity in Nanoscale Semiconductor Devices

  • Lee Jun-Ha;Lee Hoong-Joo
    • KIEE International Transactions on Electrophysics and Applications
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    • v.5C no.1
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    • pp.18-22
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    • 2005
  • We developed a new systematic calibration procedure and applied it to the calibration of the diffusivity, segregation and TED model of the indium impurity. The TED of the indium impurity was studied under 4 different experimental conditions. Although the indium proved to be susceptible to the TED, the RTA was effective in suppressing the TED effect and in maintaining a steep retrograde profile. Just as in the case of boron, indium demonstrated significant oxidation-enhanced diffusion in silicon and its segregation coefficients at the Si/SiO₂ interface were significantly below 1. In contrast, the segregation coefficient of indium decreased as the temperature increased. The accuracy of the proposed technique has been validated by SIMS data and 0.13-㎛ device characteristics such as Vth and Idsat with errors less than 5% between simulation and experiment.

Analysis of the Thermo-Elastic Damping of a Beam-Type Resonator (보형 공진기의 열탄성 감쇠 해석)

  • Rhee, Huinam;Park, Junsung;Sarapuloff, Sergii A.;Han, Soon Woo;Park, Jin Ho
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2014.10a
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    • pp.682-686
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    • 2014
  • This paper deals with the thermo-elastic damping (TED) due to the temperature change in a beam when it is in a resonant condition. Based on previous references, the analytical formulation for TED of a resonant thin beam was derived, and then TED was expressed as a function of the geometry of the beam, especially, its thickness. It was clearly shown that TED of a resonant beam is significantly varied for different thickness. Finally, the worst thickness of the beam has been identified in regard to the high-Q factor, and the result was compared to the finite element analysis.

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The Study for Transient Enhanced Diffusion of Indium and Its Application to μm Logic Devices

  • Lee Jun-Ha;Lee Hoong-Joo
    • Transactions on Electrical and Electronic Materials
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    • v.5 no.6
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    • pp.211-214
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    • 2004
  • We developed a new systematic calibration procedure which was applied to the calibration of the diffusivity, segregation and TED model of the indium impurity. The TED of the indium impurity has been studied using 4 different groups of experimental conditions. Although the indium is susceptible to the TED, the RTA is effective to suppress the TED effect and maintain a steep retrograde profile. Like the boron, the indium shows significant oxidationenhanced diffusion in silicon and has segregation coefficients at the $Si/SiO_2$ interface much less than 1. In contrast, however, the segregation coefficient of indium decreases as the temperature increases. The accuracy of the proposed technique is validated by SIMS data and $0.13 {\mu}m$ device characteristics such as $V_{th}$ and $Id_{sat}$ with errors less than $5 \%$ between simulation and experiment.

Calibration Methodology for Transient Enhanced Diffusion of indium

  • Jun Ha, Lee;Gi Ryang, Byeon;Hyeon Chan, Jo;Gwang Seon, Kim
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2003.12a
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    • pp.31-34
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    • 2003
  • We developed a new systematic calibration procedure which was applied to the calibration of the diffusivity, segregation and TED model of the indium impurity. The TED of the indium impurity has been studied using 4 different groups of experimental conditions. Although the indium is susceptible to the TED, the RTA is effective to suppress the TED effect and maintain a steep retrograde profile. Like the boron, the indium shows significant oxidation-enhanced diffusion in silicon and has segregation coefficients at the $Si/SiO_2$ interface much less than 1. In contrast, however, the segregation coefficient of indium decreases as the temperature increases. The accuracy of the proposed technique is validated by SIMS data with errors less than 5% between simulation and experiment.

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A Study on the Timing Recovery using Peak Detector in Underwater Acoustic Communication (수중음향통신에서 Peak Detector를 갖는 시간동기회복에 관한 연구)

  • Han, Min-Su;Kim, Ki-Man
    • Journal of Navigation and Port Research
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    • v.36 no.5
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    • pp.371-378
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    • 2012
  • This paper presents a timing recovery method using Gardner TED (Timing Error Detector) with a Peak Detector using Parabola Peak Interpolation in underwater acoustic communication. This method will have an eye to improve phase converge speed of timing recovery and reduced amount of Tx data. The OQPSK(Offset Quadrature Phase Shift Keying) modulation technique was considered. The proposed algorithm has faster recovery speed and more accurate than Gardner TED because the sampling values in the proposed algorithm are moved persistingly to maximum or minimum point using parabolic peak interpolation. when simulation performed using Preposed method, it improved BER (Bit Error Rate) performance about 23% And to evaluate the performances of the proposed algorithm the sea trial was performed in the Korean East Sea. And distance of a transmitter-receiver is 3 km each other. As a result, the proposed algorithm outperforms better BER performance about 20% of timing recovery than the Gardner method. Also Proposed method improved converge speed of timing recovery about 1.4 times better than Gardner method.

Study on the survival rate of fishes escaped from trawl net (트롤 탈출어류의 생존율 연구)

  • Cho, Sam-Kwang;An, Heui-Chun;Shin, Jong-Keun;Yang, Yong-Su;Park, Chang-Doo;Lee, Ju-Hee
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.42 no.2
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    • pp.69-77
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    • 2006
  • The aim of this study was to develope a fishing technology for fisheries management for improving the survival rate of young fishes escaped from trawl net. Sea experiments were carried out to investigate the survival rate of the fishes in off Geomun island and Korean southern sea. Cover-net fish cage was designed and manufactured to collect fishes escaped from COD(codend) and TED(trawl escapement device). Fish cage was installed in a shallow site where scuba diver can observe the surviving fishes after separating the cage from trawl net. Most of fishes except horse mackerel(Trachurus japonicus) and mackerel(Scomber japonicus) could escaped through TED(bar space 35mm) easier than COD(mesh size 54mm). Especially, escapement rate of redlip croaker(Pseudosciaena polyactis) escaped from TED was the highest as 73.9%. Survival rate of horse mackerel(Trachurus japonicus) escaped from TED was 85.5% at the point of 96 hours over, while the survival rate for COD showed a rapid decrease according to the time elapse as 85.0% at the point of 24 hours, 76.4% for 48 hours, 62.7% for 72 hours and 56.1% for 96 hours. Over 90% of red seabream(Pagrus major) and rock bream(Oplegnathus fasciatus) escaped from TED were survived 96 hours over and the survival rate of those fishes were excellent compared with the other fish species. All korean pomfret(Pampus echinogaster) escaped from both COD and TED were died within 48 hours. Most of redlip croaker(Pseudosciaena polyactis) were also died within 12 hours because of the weak physiological characteristics by water pressure change. Survival rate of fishes like as horse mackerel(Trachurus japonicus) having hard skin was high while it was low for the fishes like as squid(Todarodes pacificus) and hair-tail(Trichiurus lepturus) having soft skin. We could know that there were big differences in the survival rate offish species escaped from trawl net.