Effect of O2/Ar Gas Ratios on the Characteristics of Amorphous Tellurium Oxide Thin Films (비정질 텔루륨 산화물 박막 특성에 미치는 O2/Ar 가스비율의 영향)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.30 no.5
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- pp.294-300
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- 2017