• Title/Summary/Keyword: Surface reaction products

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Temperature effect on Dry Etching of ZrO2 in Cl2/BCl3/Ar Plasma (기판 온도에 따른 Cl2/BCl3/Ar 플라즈마에서 ZrO2 박막의 건식 식각)

  • Yang, Xue;Ha, Tae-Kyung;Wi, Jae-Hyung;Um, Doo-Seung;Kim, Chang-Il
    • Journal of the Korean institute of surface engineering
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    • v.42 no.6
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    • pp.256-259
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    • 2009
  • The wafer surface temperature is an important parameter in the etching process which influences the reaction probabilities of incident species, the vapor pressure of etch products, and the re-deposition of reaction products on feature surfaces. In this study, we investigated all of the effects of substrate temperature on the etch rate of $ZrO_2$ thin film and selectivity of $ZrO_2$ thin film over $SiO_2$ thin film in inductively coupled plasma as functions of $Cl_2$ addition in $BCl_3$/Ar plasma, RF power and dc-bias voltage based on the substrate temperature in range of $10^{\circ}C$ to $80^{\circ}C$. The elements on the surface were analyzed by x-ray photoelectron spectroscopy (XPS).

Anodic Oxidation Behavior of AZ31 Magnesium Alloy in Aqueous Electrolyte Containing Various Na2CO3 Concentrations

  • Moon, Sungmo;Kim, Yeajin
    • Journal of the Korean institute of surface engineering
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    • v.49 no.4
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    • pp.331-338
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    • 2016
  • In this work, anodic oxidation behavior of AZ31 Mg alloy was studied as a function of $Na_2CO_3$ concentration in electrolyte by voltage-time curves and observation of surface appearances and morphologies after the anodic treatments, using optical microscopy and confocal scanning laser microscopy (CSLM). The voltage-time curves of AZ31 Mg alloy surface and surface appearances after the anodic treatments showed three different regions with $Na_2CO_3$ concentration : region I, below 0.2 M $Na_2CO_3$ where shiny surface with a number of small size pits; region II, between 0.4 M and 0.6 M $Na_2CO_3$ where dark surface with relatively low number of large size burned or dark spots; region III, more than 0.8 M $Na_2CO_3$ where bright surface with or without large size dark spots were obtained. The anodically treated AZ31 Mg alloy surface became significantly brightened with increasing $Na_2CO_3$ concentration from 0.5 M to 0.8 M which was attribute to the formation of denser and smoother surface films. Pits and porous protruding reaction products were found at relatively large size and small size spots, respectively, on the AZ31 Mg alloy surface in low concentration of $Na_2CO_3$ less than 0.2 M. The formation of pits is attributed to the result of repetition of the formation and detachment of porous anodic reaction products. Based on the experimental results obtained in this work, it is concluded that more uniform, denser and smoother surface of AZ31 Mg alloy could be obtained at more than 0.8 M $Na_2CO_3$ concentration if there is no other oxide forming agent.

Optimal Condition for Torrefaction of Eucalyptus by Response Surface Methodology (반응표면분석법을 이용한 유칼립투스의 반탄화 최적조건 탐색)

  • Kim, Young-Hun;Na, Byeong-Il;Lee, Soo-Min;Lee, Hyoung-Woo;Lee, Jae-Won
    • Journal of the Korean Wood Science and Technology
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    • v.41 no.6
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    • pp.497-506
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    • 2013
  • The optimal condition for the torrefaction of eucalyptus (Eucalyptus globulus) was investigated by response surface methodology. The carbon content in the torrefied biomass increased with the severity factor (SF), while hydrogen and oxygen contents decreased. The calorific value of torrefied biomass ranged from 20.23 to 21.29 MJ/kg, depending on the torrefaction conditions. This implied that the energy contained in the torrefied biomass increased by 1.6 to 6.9%, when compared with that of the untreated biomass. The weight loss of biomass increased as the SF increased. The Code level of reaction temperature had the highest impact on the energy yield of torrefied biomass, while the effect of Code level of reaction time was considerably low. The highest energy yield was obtained at low SF.

Characterization of Cyclofructans from Inulin by Saccharomyces cerevisiae Strain Displaying Cell-Surface Cycloinulooligosaccharide Fructanotransferase

  • Kim, Hyun-Jin;Lee, Jae-Hyung;Kim, Hyun-Chul;Lee, Jin-Woo;Kim, Yeon-Hee;Nam, Soo-Wan
    • Journal of Microbiology and Biotechnology
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    • v.17 no.4
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    • pp.695-700
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    • 2007
  • The cycloinulooligosaccharide fructanotransferase (CFTase) gene (cft) from Paenibacillus macerans (GenBank access code AF222787) was expressed on the cell surface of Saccharomyces cerevisiae by fusing with Aga2p linked to the membrane-anchored protein Aga1p. The surface display of CFTase was confirmed by immunofluorescence microscopy and enzymatic assay. The optimized reaction conditions of surface-displayed CFTase were as follows; pH, 8.0; temperature, $50^{\circ}C$; enzyme amount, 30 milliunit; substrate concentration, 5%; inulin source, Jerusalem artichoke. As a result of the reaction with inulin, cycloinulohexaose was produced as a major product along with cycloinuloheptaose and cycloinulooctaose as minor products.

One Pot Four-Component Synthesis of Novel Substituted 2-Phenyl-4(3H) Quinazolinones Using Recyclable Nanocrystalline CuMnO3 Catalyst

  • Borhade, A.V.;Tope, D.R.;Gare, G D.;Dabhade, G.B.
    • Journal of the Korean Chemical Society
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    • v.61 no.4
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    • pp.157-162
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    • 2017
  • In the present study, nanocrystalline mixed metal oxide, $CuMnO_3$ catalyst have been synthesized by mechanochemical method with green chemistry approach. The synthesized catalyst was characterized by analytical techniques including FTIR, XRD, SEM, TEM and BET surface area. The synthesized catalyst shows high surface area is $121.06m^2/g$ with particle size 18 nm. The one pot four component synthesis of substituted 2-phenyl-4(3H) quinazolinone from the reaction of anthranilic acid, benzoyl chloride, hydrazine hydrate and substituted benzaldehyde in presence of $CuMnO_3$ nanocatalyst has been carried out. It affords the corresponding products with high yield (76-95%) in very short reaction time. All the obtained products were characterized with $^1HNMR$, $^{13}CNMR$, FTIR and EIMS.

Preparation of Ultrafine Silica Powders by Chemical Vapor Deposition Process (기상반응(CVD)법 의한 실리카 미분말의 제조)

  • Choi, Eun-Young;Lee, Yoon-Bok;Shin, Dong-Woo;Kim, Kang-Ho
    • Korean Journal of Materials Research
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    • v.12 no.11
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    • pp.850-855
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    • 2002
  • Silica powders were prepared from $SiCl_4$-$H_2$O system by chemical vapor deposition process, and investigated on size control of the products with reaction conditions. The products were amorphous and nearly spherical particles with 130nm~50nm in size. The size distribution became narrow with the increase of [$H_2$O]/[SiCl$_4$] concentration ratio. The particle size decreased with the increase of reaction temperature, [$H_2$O]/[SiCl$_4$] concentration ratio and total flow rate. The specific surface area measured by BET method was about three times larger than that of electron microscope method.

Synthesis and Surface Active Properties of Long Chain N-Acyl Collagen Derivatives (고급 지방산 N-아실 콜라겐 유도체의 합성 및 계면활성)

  • Kim, T.Y.;Nam, K.D.;Nam, S.I.;Ahn, J.H.;Lee, J.H.
    • Journal of the Korean Applied Science and Technology
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    • v.10 no.2
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    • pp.81-90
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    • 1993
  • The Surfactants composed of acylated aterocollagen which is produced by the acylation of the side chain amino radicals of aterocollagen with an aliphatic acid having 12 to 18 carbon atoms will be discussed in this study. This condensation is done at moderate reaction temperature (<$25^{\circ}C$) in aqueous alkaline solution. The products of this reaction were identified by UV/VIS spectroscopy and infrared spectroscopy. For these compounds, surface active properties and physical properties including isoelectric point, Krafft point, surface tension, critical micelle concentration(cmc), foaming power, viscosity behaviour, water holding capacity, skin irritation and emulsifying power were measured respectively. The experimental results received that the products have a good emulsifying power, excellent water holding capacity while having low skin irritation. Thus, these derivatives will be expected to be used as an emulsifying agent for O/W type cosmetic emulsion.

Determination of Intracellular ATP of bacteria on the surface of Chicken (Bioluminescence방법에 의한 계육표면에 존재하는 세균수 측정)

  • Choi, Byung-Kyu;Kim, Jong-Bae;Shin, Heuyn-Kil;Lee, Seoung-Bae
    • Korean Journal of Food Science and Technology
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    • v.18 no.2
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    • pp.88-92
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    • 1986
  • Determination of bacterial adenosine triphosphate (ATP) based on luciferin-luciferase bioluminescene reaction was applied to the measurement of bacteria on the surface of chicken as an alternative rapid method. The light yield was proportional to the concentration of ATP giving a straight line within a range of $10^{-10}\;to\;10^{-6}M$. The bacteria isolated from the surface of chicken were identified as Escherichia coli, Hafnia alvei, Pseudomonas putida and Aeromonas hydrophila. When the ATP contents of each bacteria were determined by bioluminescence reaction and compared, there was no significant difference (r = 0.95). The Patterns of growth curves for E. coli look very similar, when the bacterial growth was monitored by ATP content and viable cell count. When bacterial ATP of each samples collected every 2 days during storage for 14 days at $4^{\circ}C$was determined and compared with viable cell count, it gave a good correlation (r = 0.95, n = 32).

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PHOTOCATALYTIC REACTION OF $TiO_2$ FOR PURIFICATION OF AIR

  • Yin, X.J.;Cai, R.X.
    • Journal of the Korean institute of surface engineering
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    • v.32 no.3
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    • pp.336-339
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    • 1999
  • Photo-excited $TiO_2$ surface has a strong ability to induce various chemical reactions. Our study concentrates mainly on the utilisation of light energy to induce reactive radicals for environmental protection application. For instance, we have successfully used TiO$_2$ to break down foul smelling substances in air. In order to retain and separate the $TiO_2$ catalyst from the reactants and products, $TiO_2$ was immobilised by fixing onto various substrates. $TiO_2$ catalyst coated onto glass, wall paper and painted panel was found to show significant deodorising effect. The deodorising effect continues as long as$TiO_2$ is exposed to light irradiation.

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Nitridation of Silicon Powder Compacts in Air (Air 분위기에서 규소성형체의 질화반응)

  • 최석홍;안영필
    • Journal of the Korean Ceramic Society
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    • v.25 no.4
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    • pp.380-384
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    • 1988
  • This investigation includes nitridation phenomena of silicon powder compacts in air. Nitridation reaction condition has been provided with using silicon nitride bed and active carbon additive. Reaction products are Oxynitride, $\alpha$-Si3N4, and $\beta$-Si3N4, Oxynitride(Si2N2O) phase in formed at outer surface layer ofsilicon powder compacts. $\alpha$-Si3N4, and $\beta$-Si3N4 are formed at inner region of powder compacts. Microstructural observation indicates that nitridation mechanism in this work is the same as conventional nitridation mechanism nitrogen gas.

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