• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.852-855
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• 2008

In this paper, we proposed a new type's PZT actuator using surface acoustic wave. This actuator uses Rayleigh wave as an operational traveling wave. For the development of the actuator, each components of surface acoustic wave motor like PZT substrate, slider and IDT was studied theoretically and fabricated. For the measurement of transfer function of PZT substrate and operation of surface acoustic wave motor, network analyzer and 13.56MHz RF generator were used. Also the model which expresses the driving characteristic best was suggested and simulation was executed for the suggested model. And the future research works for improvement of SAW actuator was suggested.

• The Journal of the Acoustical Society of Korea
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• v.20 no.1
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• pp.62-67
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• 2001

Velocities of leaky surface acoustic waves (LSAW/sub s/) were measured by using a line-focus polyvinylidene fluoride (PVDF) transducer and compared with theoretically calculated ones. Isotropic materials of Cu, Al, fused quartz, and anisotropic one of Z-cut α-quartz crystal were used as specimens. The velocities were obtained by the separation time between wave components reflected directly from the surface of specimen and LSAW components according to the defocusing distance. The measured velocities well agree with the theoretical results within 1％ error, and it was shown that the leaky pseudo-surface acoustic wave (LPSAW) as well as the LSAW propagates with the typical 6-fold anisotropy on the (0,0,1) surface of α-quartz.

• Journal of Biosystems Engineering
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• v.33 no.4
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• pp.282-287
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• 2008

Love wave is one of the shear horizontal waves and it can propagate between two layers in liquid without energy loss. The SAW (surface acoustic wave) sensor using Love wave is very useful for real time measurement of the viscosity of liquid with high sensitivity. In this study, the 77 MHz and 155 MHz Love wave SAW sensors were fabricated and use to measure the viscosity of low viscous liquid. To generate the surface acoustic wave, the inter-digital transducers were fabricated on the quartz crystal wafer. In order to obtain the optimal thickness of the coating film (novolac photoresist) generating the Love wave on the surface of SAW device, theoretical calculation was performed. The performances of fabricated Love wave SAW sensors were tested. As test liquid, pure water and glycerol solutions having different concentrations were used. Since the determination coefficients of the regression equations for measuring the viscosity of liquid are greater than 0.98, the developed Love wave SAW sensors in this study will be very useful for precise measurement of viscosity of liquid.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.336-341
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• 2004

This research investigates the feasibility of ultrasonic microscope for nondestructive assessment of thermal degradation in artificially aged commercial Co-base superalloy, FSX414. This alloy has been used for high temperature structure applications such as stationary gas turbine blade and nozzle chamber in fossil plant. Microstructural change was found that the fine carbides became coarser and spheroidized in matrix as aging time increased. The leaky surface acoustic wave velocity gradually decreases by a maximum of 4.7% with increasing aging time up to 4,000hours. However, the longitudinal wave velocity has a little change. Also, it has a good correlation between leaky surface acoustic wave velocity and Vickers hardness. Consequently, LSAW can be used to examine the degree of degradation in thermally aged Co-base superalloy.

• Journal of the Korean Society for Nondestructive Testing
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• v.34 no.2
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• pp.171-175
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• 2014

In this study, we suggest a method to measure the thickness of thin films nondestructively using the dispersion characteristics of a surface acoustic wave propagating along the thin film surface. To measure the thickness of thin films, we deposited thin films with different thicknesses on a Si (100) wafer substrate by controlling the deposit time using the E-beam evaporation method. The thickness of the thin films was measured using a scanning electron microscope. Subsequently, the surface wave velocity of the thin films with different thicknesses was measured using the V(z) curve method of scanning acoustic microscopy. The correlation between the measured thickness and surface acoustic wave velocity was verified. The wave velocity of the film decreased as the film thickness increased. Therefore, thin film thickness can be determined by measuring the dispersion characteristics of the surface acoustic wave velocity.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.10
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• pp.119-126
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• 1997

The relationship between the applied stresses and the change of elastic wave velocity has been established based on the acoustoelasticity theory. The non-uniform stress field in a loaded specimen has been evaluated from the surface acoustic wave velocity measured by the line-focus acoustic microscopy with the acoustoelastic constants obtained form a calibration test. The evaluated stresses are in good agreement with the results calculated by finite element method.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.2
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• pp.139-145
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• 2010

Bending fatigue of aluminium alloy was characterized by acoustic nonlinearity of narrow band laser-generated surface wave. The higher harmonic components generated intrinsically by arrayed line laser beam were analyzed theoretically and acoustic nonlinearity was measured successfully on the surface of fatigue damaged aluminium 6061 alloy. The acoustic nonlinearity increased as a function of fatigue cycles and has close relation with damage level. Consequently, the nonlinear acoustic technique of laser-generated surface wave could be potential to characterize surface damages subjected to fatigue.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.9
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• pp.3435-3440
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• 2010

Unlike the electric method capable of checking only product defect, the real time optical metrology is suggested for measuring and visualizing vibration with respect to position of surface acoustic wave in RF device. The measuring limits and conditions for surface acoustic wave is given, and the interference and diffraction due to RF signal are analyzed by optical interpretation. A single mode laser and a 105MHz-center-frequency repeater filter were employed for experiments and theoretical analysis. In this paper, the optical metrology providing visual energy distribution and real time inspection for surface acoustic wave is proposed for development of high quality multi-service and multi-frequency RF module.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.30-36
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• 2008

• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.3
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• pp.257-263
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• 2013

Acoustic nonlinearity of surface waves is an effective method to evaluate the micro damage on the surface of materials. In this method, the $A_1$ (magnitude of the fundamental wave) and $A_2$ (magnitude of the second-order harmonic wave) are measured for evaluation of acoustic nonlinearity. However, if there is another source of second-order harmonic wave other than the material itself, the linear relationship between $A_1{^2}$ and $A_2$ will not be guaranteed. Therefore, the second-order harmonic generation by another source should be fully suppressed. In this paper, we investigated the initial second-order harmonic generation in narrowband surface waves by multi-line laser beams. The spatial profile of laser beam was considered in the cases of Gaussian and square-like. The temporal profile was assumed to be Gaussian. In case of Gaussian spatial profile, the generation of the initial second-order harmonic wave was inevitable. However, when the spatial profile was square-like, the generation of the initial second-order harmonic wave was able to be fully suppressed at specific duty ratio. These results mean that the multi-line laser beams of square-like profile with a proper duty ratio are useful to evaluate the acoustic nonlinearity of the generated surface waves.