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http://dx.doi.org/10.5762/KAIS.2010.11.9.3435

Optical metrology for resonant surface acoustic wave in RF device  

Park, Jun-Oh (Division of Electron, Computer and Communication Engineering, Hanseo University)
Jang, Won-Kweon (Division of Electron, Computer and Communication Engineering, Hanseo University)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.11, no.9, 2010 , pp. 3435-3440 More about this Journal
Abstract
Unlike the electric method capable of checking only product defect, the real time optical metrology is suggested for measuring and visualizing vibration with respect to position of surface acoustic wave in RF device. The measuring limits and conditions for surface acoustic wave is given, and the interference and diffraction due to RF signal are analyzed by optical interpretation. A single mode laser and a 105MHz-center-frequency repeater filter were employed for experiments and theoretical analysis. In this paper, the optical metrology providing visual energy distribution and real time inspection for surface acoustic wave is proposed for development of high quality multi-service and multi-frequency RF module.
Keywords
Surface acoustic wave; Visualization; interference; Diffraction; Real time; RF device;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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