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http://dx.doi.org/10.5307/JBE.2008.33.4.282

Development of Surface Acoustic Wave Sensor for Viscosity Measurement of Low Viscose Liquid Using Love Wave  

Lee, Sang-Dae (Safety Metrology Group, Division of Metrology for Quality Life, Korea Research Institute of Standard and Science)
Kim, Ki-Bok (Safety Metrology Group, Division of Metrology for Quality Life, Korea Research Institute of Standard and Science)
Lee, Dae-Su (Safety Metrology Group, Division of Metrology for Quality Life, Korea Research Institute of Standard and Science)
Publication Information
Journal of Biosystems Engineering / v.33, no.4, 2008 , pp. 282-287 More about this Journal
Abstract
Love wave is one of the shear horizontal waves and it can propagate between two layers in liquid without energy loss. The SAW (surface acoustic wave) sensor using Love wave is very useful for real time measurement of the viscosity of liquid with high sensitivity. In this study, the 77 MHz and 155 MHz Love wave SAW sensors were fabricated and use to measure the viscosity of low viscous liquid. To generate the surface acoustic wave, the inter-digital transducers were fabricated on the quartz crystal wafer. In order to obtain the optimal thickness of the coating film (novolac photoresist) generating the Love wave on the surface of SAW device, theoretical calculation was performed. The performances of fabricated Love wave SAW sensors were tested. As test liquid, pure water and glycerol solutions having different concentrations were used. Since the determination coefficients of the regression equations for measuring the viscosity of liquid are greater than 0.98, the developed Love wave SAW sensors in this study will be very useful for precise measurement of viscosity of liquid.
Keywords
Surface acoustic wave; Love wave; Viscosity; Low viscose liquid;
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