• Tribology and Lubricants
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• 제40권2호
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• pp.47-53
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• 2024

Surface topography plays a decisive role in determining the performance of several precision components. In particular, the surface roughness of semiconductor devices affects the precision of the circuit. In this regard, the surface topography of a given surface needs to be appropriately assessed. Typically, the average roughness is used as one of the main indicators of surface finish quality because it is influenced by both dynamic and static parameters. Owing to the increasing demand for such accurate and reliable surface measurement systems, studies are continuously being conducted to understand the parameters of surface roughness and measure the average roughness with high reliability. However, the differences in the measurement methods of surface roughness are not clearly understood. Hence, in this study, the surface roughness of the back of a silicon wafer was measured using both contact and noncontact methods. Subsequently, a comparative analysis was conducted according to various surface roughness parameters to identify the differences in surface roughness depending on the measurement method. When using a 3D laser confocal microscope, even smaller surface asperities can be measured compared with the use of a 3D profiler. The results are expected to improve the understanding of the surface roughness characteristics of precision components and be used as a useful guideline for selecting the measurement method for surface topography assessment.

• 한국광학회지
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• 제13권3호
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• pp.209-214
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• 2002

기판의 표면거칠기가 반사경의 산란에 미치는 영향을 조사하였다. 기판의 표면거칠기가 다른 다섯 종류의 기판에 이온빔 스퍼터링 방법과 전자총 증착 방법으로 각각 반사율이 1에 가까운 고반사율 박막을 증착하고 산란을 TIS 방법으로 측정하였다. 기판의 표면거칠기가 2$\AA$ 이상인 경우의 기판의 산란에 대한 반사경 산란 비율은 표면거칠기가 2$\AA$ 미만인 경우의 산란 비율에 비하여 급격한 증가를 나타냄을 알 수 있었으며, 기판의 표면거칠기가 낮은 경우 반사경의 산란은 기판의 표면거칠기보다 반사경을 구성하는 박막의 미세구조에 의존하는 것으로 판단되었다. 한편 반사경 중에서 가장 작은 산란은 2.1 ppm이었고, 이것은 표면거칠기 0.23$\AA$인 기판에 이온빔 스퍼터링 방법으로 제작되었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.767-768
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• 2013

• 한국결정성장학회지
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• 제30권3호
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• pp.83-90
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• 2020

열전도성이 우수한 AlN 기판에 형성되는 Ag계 후막도체의 접착강도에 미치는 기판 표면조도 및 소결 온도의 영향을 연구하였다. 표면조도(R_a)가 0.5인 AlN 기판을 사용하여 제조한 후막도체의 접착강도가 이보다 표면조도가 크거나 또는 작은 기판을 사용하여 제조한 후막도체의 경우보다 높게 나타났다. 표면조도가 0.5보다 작은 기판의 경우 Ag 후막도체와 기판 사이의 접촉면적이 표면조도가 0.5인 기판보다 상대적으로 작아 접착강도가 작게 나타났다. 한편, 표면조도가 0.5보다 큰 기판을 사용한 경우에는 도체막이 기판에 완전히 접착되지 못하는 현상이 나타났고, 이로 인해서 접착강도가 적게 나타남을 알 수 있었다. 또한, 850℃에서 소결하여 얻어진 Ag계 후막도체 막의 표면 평활도가 다른 소결 온도에서 소결하여 얻어진 도체막의 평활도에 비해 가장 우수하였고, 이로 인해 도체막의 접착강도가 가장 높게 나타남을 알 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.23-24
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• 2011

• 대한기계학회논문집A
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• 제24권8호
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• pp.2022-2031
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• 2000

Since the surface roughness of adherends affects much the strength of adhesivelybonded joints, the effect of surface roughness on the fatigue life of adhesively bonded tubular single lap joints was investigated analytically and experimentally by fatigue torsion test. The stiffness of the interfacial layer between adherends and adhesive was modeled as a normal statistical distribution function of surface roughness of adherends. From the investigation, it was found that the optimum surface roughness of adherends for the fatigue strength of tubular single lap joints was dependent on bondthickness and applied load.

• 설비공학논문집
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• 제4권3호
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• pp.155-162
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• 1992

Theoritical Study is performed on heat transfer and fluid flow induced by square-ribbed roughness elements in a concentric annulus. The fluid properties were assumed to be constant, and the radius($r_m$) of the maximum speed point was found by using the principle of equation of Leung and Labib. The Nusselt number and friction factor as a function of the Reynolds number($R_e=10^4$, $5{\times}10^4$, $7{\times}10^4$, $10^5$) in artifical roughness $S/{\epsilon}=5,10,20,30$, $P/{\epsilon}=2,5,8$ and prandtl number = 0.72 have been discussed. In this study, it has been found that the Nusselt number and friction factor of rough wall are larger than those of smooth ones.

• 한국유체기계학회 논문집
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• 제10권3호
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• pp.9-16
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• 2007

Deterioration of surface of turbomachinery blades occurs in course of time due to many factors and hence reduces the performance of the machine. In this paper, the effects of surface roughness of transonic axial compressor blade on performance are studied considering a reference blade and a shape distorted (optimized) blade. Optimal blade is designed considering sweep and lean. Baldwin-Lomax turbulence model is used for flow field analysis and Cebeci-Smith roughness model is formulated for roughness modeling. It is found that, as the surface roughness increases, adiabatic efficiency, total temperature ratio and total pressure ratio decrease while Mach number increases. Performance deterioration is more severe in case of distorted blade as compared to reference blade.

• 한국정밀공학회지
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• 제26권1호
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• pp.57-62
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• 2009

Recently, with the increasing lightness and miniaturization of high resolution camera phones, the demand for aspheric glass lens has increased because plastic and spherical lens are unable to satisfy the required performance. An aspheric glass lens is fabricated by the high temperature and pressure molding using a tungsten carbide molding core, so precision grinding technology for the molding core surface are required. This paper reports a development of feedrate control grinding method for aspherical molding core using parallel grinding method. A plane molding core was ground using conventional and feedrate control grinding method. The performance of the feedrate control method was evaluated by measurement of surface roughness. The result indicated that the average surface roughness was reduced to 1.5 nm, which is more efficient than the conventional grinding method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.251-252
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• 2007