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http://dx.doi.org/10.3807/KJOP.2002.13.3.209

Effect of surface roughness onto the scattering in low loss mirrors  

조현주 (고등기술연구원 포토닉스 및 통신기술 센터)
신명진 (고등기술연구원 포토닉스 및 통신기술 센터)
이재철 (고등기술연구원 포토닉스 및 통신기술 센터)
Publication Information
Korean Journal of Optics and Photonics / v.13, no.3, 2002 , pp. 209-214 More about this Journal
Abstract
The effect of surface roughness on mirror scattering has been studied. Five kinds of substrates with different surface roughness were fabricated. On those substrates, a dielectric multi-layer coating with high reflectivity was deposited by ion beam sputtering and electron beam evaporation. A total integrated scattering measurement set-up was built for the evaluation of deposited samples. Most of the ion beam sputtered mirrors showed lower scattering than the electron beam evaporated one, which deposited on substrates similar in surface roughness. Over ~2 $\AA$ in surface roughness, scattering strongly depend on the micro-structure of the super-polished surface. The lowest scattering we have achieved is 2.06 ppm by ion beam sputtering from the substrate with surface roughness of 0.23 $\AA$.
Keywords
low loss mirror; ion beam sputtering; electron beam evaporation; total integrated scattering; surface roughness;
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Times Cited By KSCI : 2  (Citation Analysis)
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