• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.112-112
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• 2008

최근 Ruthenium (Ru) 은 높은 화학적 안정성, 누설전류에 대한 높은 저항성, 저유전체와의 높은 안정성 등과 같은 특성으로 인해 금속층-유전막-금속층 캐패시터의 하부전극으로 각광받고 있다. 또한 Cu와의 우수한 Adhesion 특성으로 인해 Cu 배선에서의 Cu 확산 방지막으로도 주목받고 있다. 그러나 이렇게 형성된 Ru 하부전극의 각 캐패시터간의 분리와 평탄화를 위해서는 CMP 공정이 도입이 필요하다. 이러한 CMP 공정에 공급되는 Slurry 에는 부식액, pH 적정제, 연마입자 등이 첨가되는데 이때 연마입자가 응집하여 Slurry의 분산 안전성 저하에 영향을 줄수 있다. 이로 인해 응집된 Slurry는 Scratch와 Delamination 과 같은 표면 결함을 유발할 수 있으며, Slurry의 저장 안정성을 저하시켜 Slurry의 물리적 화학적 특성을 변화시킬 수 있다. 그리하여 본 연구에서는 Ru CMP Slurry에서의 Surfactant와 같은 분산 안정제에 따른 Surface tension, Zeta potential, Particle size, Sedimentation의 분석을 통해 Slurry 안정성에 대한 영향을 살펴보았다. 그 결과 pH9 조건의 31ppm Dispersant 농도에서 50%이상의 Sedimentation 상승효과를 얻을 수 있었다. 또한 선택된 Surfactant가 첨가된 Ru CMP Slurry를 제조하여 Ru wafer의 Static etch rate, Passivation film thickness 와 Wettability를 비교해 보았다. 그리고 CMP 공정을 실시하여 Ru의 Removal rate와 TEOS에대한 Selectivity를 측정해 보았다.

• Resources Recycling
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• v.5 no.4
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• pp.11-16
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• 1996

In the flotation system for deinking process, the ink partcles musl collidc with the air bubbles for adhesion The probability of bubble-particle collision is largely dependent on the hydrodynamic conditions The main reason for the very small ink particles not to be able to float easily may be tound in the hydrodynamic effects, which make small ink particlcs move following the slreamlines around the bubbles rather than achually collide with bubbles. Also. the low floatabdily of the large and heavy ink particles is due to the gravity force and viscous drag which affect uprising molinn of particles through the liquid. Therefore, it is vely important to control not only the surface chemical conditions but the hydrodynamic conditions in practical floialion system

• Proceedings of the Korean Institute of Building Construction Conference
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• 2019.05a
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• pp.252-253
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• 2019

Corrosion of rebars in reinforced concrete structures is a major factor that shortens the life of the structure. As corrosion progresses, the adhesion between the concrete tissues and the rebar decreases and the cracks in the concrete due to the expansion of the oxide intensify. Although it is necessary to measure corrosion behavior of rebars inside the concrete to measure degradation of structures due to rebar corrosion, no studies have been conducted to measure corrosion of rebars in In-situ state. In this study, corrosion of rebars in reinforced concrete specimens was attempted to be quantified using micro-computer tomography. Since corrosion of concrete takes several months per 10mm of cover, accelerated corrosion techniques were applied. Accelerated corrosion on the specimen was conducted by applying a 10 V magnetic field to the buried rebar and external electrodes with the specimen submerged in a 10% calcium chloride solution. The experiment found that within two weeks, more than 40% of rebar reduction occurred, and the cracks in the radial cracks occurred through the concrete structure, leading to the transfer of the oxide produced through the cracks to the surface of the specimen.

• Geomechanics and Engineering
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• v.10 no.5
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• pp.657-676
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• 2016

In this paper, the active lateral earth pressure is evaluated using the stress characteristics or slip line method. The lateral earth pressure is expressed as the lateral earth pressure coefficients due to the surcharge, the unit weight and cohesion of the backfill soil. Seismic horizontal and vertical pseudo-static coefficients are used to consider the seismic effects. The equilibrium equations along the characteristics lines are solved by the finite difference method. The slope of the ground surface, the wall angle and the adhesion and friction angle of the soil-wall interface are also considered in the analysis. A computer code is provided for the analysis. The code is capable of solving the characteristics network, determining active lateral earth pressure distribution and calculating active lateral earth pressure coefficients. Closed-form solutions are provided for the lateral earth pressure coefficients due to the surcharge and cohesion. The results of this study have a good agreement with other reported results. The effects of the geometry of the retaining wall, the soil and soil-wall interface parameters are evaluated. Non-dimensional graphs are presented for the active lateral earth pressure coefficients.

• Korean Journal of Materials Research
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• v.24 no.7
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• pp.344-350
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• 2014

Metal films (i.e., Ti, Al and SUH310S) were prepared in a magnetron sputtering apparatus, and their cross-sectional structures were investigated using scanning electron microscopy. The apparatus used consisted of a cylindrical metal target which was electrically grounded, and two anode rings attached to the top and to the bottom of the target. A wire was placed along the center-line of the cylindrical target to provide a substrate. When the electrical potential of the substrate was varied, the metal-film formation rate depended on both the discharge voltage and the electrical potential of the substrate. As we made the magnetic field stronger, the plasma which appeared near the target collected on the plasma wall surface and thereby decreased the bias current. The bias current on the conducting wire was different from that for cation collection. The bias current decreased because the collection of cations decreased when we increased the magnetic-coil current. When the substrate was electrically isolated, the films deposited showed a slightly coarse columnar structure with thin voids between adjacent columns. In contrast, in the case of the grounded substrate, the deposited film did not show any clear columns but instead, showed a densely-packed granular structure. No peeling region was observed between the film and substrate, indicating good adhesion.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.109-109
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• 1999

Recently, low energy ion beam irradiation has been adopted for surface modification. Low energy ion beam irradiation has many advantages in polymer engineering such as weak damage, good adhesion, noticeably-enhanced wettability(less than 15 degree), good reproducibility and so on. In this experiment, chemical reactions between free radicals and environment gas species have been investigated using angle-resolved XPS and TRIM code. In the case of low ion beam energy (around 1 keV), energy loss in polymer is mainly originated from atomic collisions instead of electronic interference. Atomic collisions could generated displaced atoms and free radicals. Cold cathode-ion source equipped with 5cm convex grid was used in an O2 environment. Base and working pressure were 5$\times$10-6 and 2.3$\times$10-4 Torr. Flow rates of argon and oxygen were fixed at 1.2 and 8 sccm. target materials are polyethylene polyvinyidenefluoride and polytetrafluoroethylene.

• Membrane Journal
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• v.15 no.3
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• pp.233-240
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• 2005

Surface modification of polypropylene hollow fiber membranes was performed in order to develop blood-compatibility biomaterials for use in the blood contacting surfaces and oxygenation membranes of a lung assist device (LAD), important medical device even more useful. Blood compatibility of materials was determined by using anticoagulation blood and evaluating formation of blood clots on their surfaces as well as activation of plasma coagulation cascade, platelet adhesion, and aggregation. It was verified that the number of platelets on the silicone coated fibers was significantly lower than that on untreated fiber membrane, indicating improved blood compatibility. It was also found that the polypropylene hollow fiber membranes using plasma treatment exhibited suppression of complement activation in blood compatibility test.

• Journal of Electrochemical Science and Technology
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• v.9 no.1
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• pp.9-19
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• 2018

The anodic behavior of aluminum (Al) foils with varying purity, capacitance, and withstand voltage in organic electrolytes was examined for EDLC. The results of cyclic voltammetry (CV) and chronoamperometry (CA) experiments showed that the electrochemical stability improves when Al foil has higher purity, lower capacitance, and higher withstand voltage. To improve the electrochemical stability of EDLC current collectors made of low-purity foil (99.4% Al foil), the foil was modified by chemical etching to reduce its capacitance to $60{\mu}F/cm^2$ and forming to have withstand a voltage of 3 Vf. EDLC cells using the modified Al foil as a current collector were made to 2.7 V with 360 F, and a constant voltage load test was subsequently performed for 2500 hours at high temperature under a rated voltage of 2.7 V. The reliability and stability of the EDLC cell improved when the modified Al foil was used as a current collector. To understand the deterioration process of the Al current collector, standard cells made of conventional Al foil under a constant voltage load test were disassembled, and the surface changes of the foil were measured every 500 hours. The Al foil became increasingly corroded, causing the adhesion between the AC coating layer and the Al foil to weaken, and it was confirmed that partial AC coating layer peeling occurred.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.12
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• pp.1091-1098
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• 1998

Thermal stability of the electroless deposited Cu thin film was investigated. Cu/TaN/Si multilayer was fabricated by electroless-depositing Cu thin layer on TaN diffusion barrier layer which was deposited by MOCVD on the Si substrate, and was annealed in $H_2$ ambient to investigate the microstructure of Cu film with a post heat-treatment. Cu thin film with good adhesion was successfully deposited on the surface of the TaN film by electroless deposition with a proper activation treatment and solution control. Microstructural property of the electroless-deposited Cu layer was improved by a post-annealing in the reduced atmosphere of $H_2$ gas up to $600^{\circ}C$. Thermal stability of Cu/TaN/Si system was maintained up to $600^{\circ}C$ annealing temperature, but the intermediate compounds of Cu-Si were formed above $650^{\circ}C$ because Cu element passed through the TaN layer. On the other hand, thermal stability of the Cu/TaN/Si system in Ar ambient was maintained below $550^{\circ}C$ annealing temperature due to the minimal impurity of $O_2$ in Ar gas.

• Journal of the Korean Graphic Arts Communication Society
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• v.30 no.2
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• pp.1-12
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• 2012

In this experiment, we have manufactured thermal-curable silver pastes for direct printing. And to enhance conductivity, printability, adhesion and hardness during polymer direct-gravure prints, we have manufactured Ag pastes by adding variety of filter contents. Then we have investigated characteristics of rheology in paste according to the gravure printability and the properties of printed conductive patterns. Depending on a variety of Ag powder, there was a big difference in sharpness of printed pattern. And also by the use of carbon, there was a big difference in amount of solvent used, conductivity and in hardness. We could improve doctoring and the sharpness of a pattern by adding Ag paste in carbon particle, but as we have used nano-sized particle, there was an increase in the amount of solvent used and also we have found out that it gives a bad effect as adhesive and hardness becomes weaker. Even though Ag particle has the same spherical shape, the surface treatments could differ from one another. And by the appropriate choice and with the suitable combination of Ag powder, excellent printability and conductivity could be obtained.