• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제27회 학술발표회 초록집
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• pp.129-129
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• 2004

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.35-35
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• 2009

Capacitorless one transistor dynamic random access memory (1T-DRAM) cells were fabricated on the fully depleted strained-silicon-on-insulator (FD sSOI) and the effects of silicon back interface state on buried oxide (BOX) layer on the memory properties were evaluated. As a result, the fabricated 1T-DRAM cells showed superior electrical characteristics and a large sensing current margin (${\Delta}I_s$) between "1" state and "0" state. The back interface of SOI based capacitorless 1T-DRAM memory cell plays an important role on the memory performance. As the back interface properties were degraded by increase rapid thermal annealing (RTA) process, the performance of 1T-DRAM was also degraded. On the other hand, the properties of back interface and the performance of 1T-DRAM were considerably improved by post RTA annealing process at $450^{\circ}C$ for 30 min in a 2% $H_2/N_2$ ambient.

• Corrosion Science and Technology
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• 제2권4호
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• pp.178-182
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• 2003

Slow Strain Rate Tests (SSRT) were carried out to investigate the effect of environmental factors on the Stress Corrosion Cracking (SCC) susceptibility of 3.5NiCrMoV steels used in discs for Low-Pressure (LP) steam turbines in electric power generating plants. The influences of dissolved oxygen on the stress corrosion cracking of turbine steel were studied, For this purpose, specimens were strained at variously oxygenated conditions at $150^{\circ}C$ in pure water. When the specimen was strained with $1{\times}10^{-7}s^{-1}$ at $150^{\circ}C$ in pure water, increasing concentration of dissolved oxygen decreased the elongation and the UTS. The corrosion potential and the corrosion rare increased as the amounts of dissolved oxygen increased. The increase of the SCC susceptibility of the turbine steel in a highly dissolved oxygen environment is due to the non protectiveness of the oxide layer on the turbine steel surface and the increase of the corrosion current. These results clearly indicate that oxygen concentration increases Stress Corrosion Cracking susceptibility in turbine steel at $150^{\circ}C$.

• 한국정보통신학회논문지
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• 제3권3호
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• pp.681-686
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• 1999

본 논문에서는 편광 비의존 특성을 가지는 반도체 광 증폭기 개발을 위해 지금까지와는 다른 새로운 방법인 160($\AA$) 두께를 가지는 GaInAs 양자 우물에 GaAs Delta 층을 각각 1층, 2층, 3층을 삽입한 구조와 GaAs Delta 3층의 구조에서 Delta 층의 두께를 1 원자층에서 3 원자층까지 변화시켜 계산한 결과, 1 원자층 두께를 가지는 GaAs Delta 층이 3층 포함된 구조에서 3dB 이득 대역폭이 TE, TM 모두 85nm로 매우 넓은 대역폭과 편광 비의존 특성을 함께 가지는 구조를 얻어낼 수 있었다. 이러한 GaInAs 양자 우물에 GaAs Delta 층을 삽입한 구조의 이론적 이득 특성의 결과는 반도체 광 증폭기의 설계에 있어서 아주 중요하며, 또한 광대역 과장 분할 다중화 시스템에 적용될 수 있는 반도체 광 증폭기에 알맞은 구조로 사용될 수 있다.

• 한국진공학회지
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• 제22권6호
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• pp.327-334
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• 2013

InAs/GaSb 제2형 응력 초격자(strained layer type II superlattice, T2SL)을 이용한 nBn 구조 장적외선 검출소자의 설계 및 제작을 하였다. InAs와 GaSb 두께에 따른 T2SL 구조의 장적외선 밴드갭 에너지를 Kronig-Penney 모델을 이용하여 계산하였다. 소자의 암전류 밀도를 줄이기 위해서, nBn 구조에서 장벽층인 $Al_{0.2}Ga_{0.8}Sb$ 성장 중에 Te 보상도핑(compansated doping)을 하였다. 온도(T) 80 K 및 인가전압($V_b$) -1.5 V에서, 반응스펙트럼 측정을 통한 소자의 차단파장은 ${\sim}10.2{\mu}m$ (~0.122 eV)로 나타났다. 또한 온도 변화에 따른 암전류 측정으로부터 도출된 활성화 에너지는 0.128 eV로 계산 되었다. T=80 K 및 $V_b$=-1.5 V에서 암전류는 $1.0{\times}10^{-2}A/cm^2$으로 측정되었다. 흑체복사 적외선 광원을 이용한 반응도(Responsivity)는 소자 온도 80 K 및 인가전압 -1.5 V의 조건에서 0.58 A/W로 측정되었다.

• 한국진공학회지
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• 제5권3호
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• pp.218-222
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• 1996

STrained layers and strain depth profile of high dose As ion implanted (100) si wafer annealed at various temperatures have been investigated by means of X-ray double crystal diffractometry (X-ray DCD). The results obtained by x-ray rocking curve analysis showed a defect layer at the original amorphous /crystalline interface of 1400$\AA$ depth. In addition arsenic ion concentrtion profiles and defect distributions in depth were obtained by the SIMS and TRIM -code simulation . the positive strain depth profile determined from the rocking curve analysis were only presented under 0.14 $\mu$m from the surface for samples ananelaed at $600^{\circ}C$. The results was shown that the thickness of amprphous layer is 0.14 $\mu$m indirectry, and it was good agreement with the TRIM -Code simulation. Additionally, it could be thought that the positive strain have been affected residual intersitial atoms under the amorphous/crystalline interface formed by ion implantation.

• 한국전기전자재료학회논문지
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• 제16권9호
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• pp.765-770
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• 2003

We have developed a low-temperature, and low-pressure radical induced oxidation (RIO) technology, so that high-quality ultrathin silicon dioxide layers have been effectively produced with a high reproducibility, and successfully employed to realize high performace SiGe heterostructure complementary MOSFETs (HCMOS) lot the first time. The obtained oxide layer showed comparable leakage and breakdown properties to conventional furnace gate oxides, and no hysteresis was observed during high-frequency capacitance-voltage characterization. Strained SiGe HCMOS transistors with a 2.5 nm-thick gate oxide layer grown by this method exhibited excellent device properties. These suggest that the present technique is particularly suitable for HCMOS devices requiring a fast and high-precision gate oxidation process with a low thermal budget.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1998년도 제14회 학술발표회 논문개요집
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• pp.156-157
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• 1998

It is a diffcult and challenging pproblem to control the growth of eppitaxial films. Heteroeppitaxy is esppecially idfficult because of the lattice mismatch between sub-strate and depposited layers. This mismatch leads usually to a three dimensional(3D) island growth. But the use of surfactants such as As, Sb, and Bi can be beneficial in obtaining high quality heteroeppitaxial films. In this study medium energy ion scattering sppectroscoppy(MEIS) was used in order to reveal the growth mode of Ge on Si(001) and the strain of depposited film without and with dynamically supplied atomic hydrogen at the growth thempperature of 35$0^{\circ}C$. It was ppossible to control the growth mode from layer-by-layer followed by 3D island to layer-by-layer by controlling the hydrogen flux. In the absent of hydro-gen the film grows in the layer-by-layer mode within the critical thickness(about 3ML) and the 3D island formation is followed(Fig1). The 3D island formation is suppressed by introducing hydrogen resulting in layer-by-layer growth beyond the critical thickness(Fig2) We measured angular shift of blocking dipp in order to obtain the structural information on the thin films. In the ppressence of atomic hydrogen the blocking 야 is shifted toward higher scattering angle about 1。. That means the film is distorted tetragonally and strained therefore(Fig4) In other case the shift of blocking dipp at 3ML is almost same as pprevious case. But above the critical thickness the pposition of blocking dipp is similar to that of Si bulk(Fig3). It means the films is relaxed from the first layer. There is 4.2% lattice mismatch between Ge and Si. That mismatch results in about 2。 shift of blocking dipp. We measured about 1。 shift. This fact could be due to the intermixing of Ge and Si. This expperimental results are consistent with Vegard's law which says that the lattice constant of alloys is linear combination of the lattic constants of the ppure materials.

• 한국결정성장학회지
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• 제12권6호
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• pp.269-269
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• 2002

희박 자성 반도체 ZnMnTe를 장벽층으로 사용한 양질의 ZnTe/ZnMnTe 단일 양자우물 구조를 열벽적층 성장법으로 성장하였다. 고분해능 X-선 회절측정 결과 ZnTe 우물층이 강하게 스트레인을 받고 있음을 알 수 있었다. 광발광 측정으로부터 무거운 양공 엑시톤 (el-hhl)과 가벼운 양공 엑시톤 (el-lhl)의 매우 뾰족한 발광 크들이 나타남을 관측하였다. 또한 우물층의 두께가 증가함에 따라 (el-hhl)과 (el-lhl)의 엑시톤 관련 피크들은 낮은 에너지 쪽으로 이동하였다. 광발광 피크 세기의 온도에 따른 변화는 운반자들의 열적 활성화로 설명할 수 있었다.

• 한국결정성장학회지
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• 제12권6호
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• pp.267-271
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• 2002

희박 자성 반도체 ZnMnTe를 장벽층으로 사용한 양질의 ZnTe/ZnMnTe 단일 양자우물 구조를 열벽적층 성장법으로 성장하였다. 고분해능 X-선 회절측정 결과 ZnTe 우물층이 강하게 스트레인을 받고 있음을 알 수 있었다. 광발광 측정으로부터 무거운 양공 엑시톤 (el-hhl)과 가벼운 양공 엑시톤 (el-lhl)의 매우 뾰족한 발광 크들이 나타남을 관측하였다. 또한 우물층의 두께가 증가함에 따라 (el-hhl)과 (el-lhl)의 엑시톤 관련 피크들은 낮은 에너지 쪽으로 이동하였다. 광발광 피크 세기의 온도에 따른 변화는 운반자들의 열적 활성화로 설명할 수 있었다.