• Transactions on Electrical and Electronic Materials
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• 제12권2호
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• pp.56-59
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• 2011

The characterization of the chemical mechanical polishing (CMP) process for undensified phophosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been used by experimenters to understand the relationship between the input variables and responses of interest in a simple and efficient way, and it typically is beneficial for determining the appropriatesize of experiments with multiple process variables and making statistical inferences for the responses of interest. The equipment controllable parameters used to operate the machine consist of the down force of the wafer carrier, pressure on the back side wafer, table and spindle speeds (SS), slurry flow (SF) rate, pad condition, etc. None of these are independent ofeach other and, thus, the interaction between the parameters also needs to be understoodfor improved process characterization in CMP. In this study, we selected the five controllable equipment parameters the most recommendedby process engineers, viz. the down force (DF), back pressure (BP), table speed (TS), SS, and SF, for the characterization of the CMP process with respect to the material removal rate and film uniformity in percentage terms. The polished material is undensified PSG which is widely used for the plananization of multi-layered metal interconnects. By statistical modeling and the analysis of the metrology data acquired from a series of $2^{5-1}$ fractional factorial designs with two center points, we showed that the DF, BP and TS have the greatest effect on both the removal rate and film uniformity, as expected. It is revealed that the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that process control based on a better understanding of the process is the key to success in current semiconductor manufacturing, in which the size of the wafer is approaching 300 mm and is scheduled to continuously increase up to 450 mm in or slightly after 2012.

• 한국전기전자재료학회논문지
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• 제22권9호
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• pp.741-746
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• 2009

Compare to conventional Indium Tin Oxide (ITO) film deposition methods, cesium assisted sputtering method has been shown superior electrical, mechanical, and optical film properties. However, it is not easy to use cesium assisted sputtering method since ITO film properties are very sensitive to Cesium assisted equipment condition but their mechanism is not yet clearly defined physically or mathematically. Therefore, to optimize deposited ITO film characteristics, development of accurate and reliable process model is essential. For this, in this work, we developed ITO film deposition process model using neural networks and design of experiment (DOE). Developed model prediction results are compared with conventional statistical regression model and developed neural process model has been shown superior prediction results on modeling of ITO film thickness, sheet resistance, and transmittance characteristics.

• 대한기계학회논문집A
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• 제37권3호
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• pp.287-294
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• 2013

롤투롤 인쇄전자 시스템은 높은 생산성과 낮은 원가를 이점으로 인쇄전자 산업에서 가장 각광을 받고 있는 인쇄기술 중 하나이다. 이러한 롤투롤 인쇄전자 시스템에서 인쇄패턴의 특성은 인쇄물의 기능적 성질을 결정짓는 중요한 문제라 할 수 있다. 따라서 본 연구에서는 인쇄패턴의 특성을 결정짓는 주요 인자들이 특별히 인쇄패턴의 두께와 표면 조도에 미치는 영향성에 대한 분석이 수행되었다. 실험계획법을 적용하여 인쇄패턴의 두께와 표면조도에 대한 각 인자의 주효과 및 교호작용 효과를 정량적으로 제시하였고, 분산분석을 통해 유의한 인자를 찾아내었다. 또한 이에 따르는 통계적 모델이 주요 인자의 함수로서 개발되었다. 이러한 결과는 롤투롤 전자인쇄 시스템의 특징에 따라 요구되는 인쇄패턴의 특성을 얻는데 활용될 수 있을 것이다.

• Computers and Concrete
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• 제15권2호
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• pp.215-229
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• 2015

The emerging technology of self compacting concrete, fiber reinforcement together reduces vibration and substitute conventional reinforcement which help in improving the economic efficiency of the construction. The objective of this work is to find the regression model to determine the response surface of mix proportioning Steel Fiber Reinforced Self Compacting Concrete (SFSCC) using statistical investigation. A total of 30 mixtures were designed and analyzed based on Design of Experiment (DOE). The fresh properties of SCC and mechanical properties of concrete were studied using Response Surface Methodology (RSM). The results were analyzed by limited proportion of fly ash, fiber, volume combination ratio of two steel fibers with aspect ratio of 50/35: 60/30 and super plasticizer (SP) dosage. The center composite designs (CCD) have selected to produce the response in quadratic equation. The model responses included in the primary stage were flowing ability, filling ability, passing ability and segregation index whereas in harden stage of concrete, compressive strength, split tensile strength and flexural strength at 28 days were tested. In this paper, the regression model and the response surface plots have been discussed, and optimal results were found for all the responses.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.108-109
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• 2007

Microstructure and electrical properties of Ga-doped ZnO (GZO) films grown on $Al_2O_3$ templates by Pulsed Laser Deposition (PLD) are investigated utilizing X-ray diffraction method and Hall measurement, respectively. In order to determine the optimized operating condition of the PLD, statistical design of experiment (DOE) is employed. It provides the systematic and efficient methodology for characterization and modeling of PLD processing with a relatively small number of experiments. The most optimized recipe of the process factors is obtained by response optimizer in Minitab.

• 한국컴퓨터정보학회논문지
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• 제3권4호
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• pp.174-192
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• 1998

오늘날의 품질보증체제 하에서는 SQC와 동시에 ISO 9000 시리즈를 활용할 수 있는 컴퓨터 시스템이 절실히 요구되고 있다. 이는 SQC가 전문적인 통계적 지식을 필요로 하고 있기 때문에 사용상 매우 불편하여 실무단계에서 적용하기에는 한계점이 있다. 따라서 본 연구에서는 SQC와 ISO 9000 시리즈를 동시에 관리할 수 있으면서 또한 전문적인 통계적 지식이 없는 경우에도 이용할 수 있는 소프트웨어를 개발하고자 한다. 이를 위해 연구내용을 크게 ISO 9000 시스템과 SQC 시스템으로 나누되, ISO 시스템의 내용은 기본 시스템의 설계, 검사 및 시험, 부적합품 추적, 불량분석 등이며, SQC 시스템의 경우 품질관리에서 공통으로 많이 사용되는 관리도, 추.검정, 실험계획법으로 제한하였다. 본 연구의 기대효과는품질경영체제의 확립, 품질의식의 변화, 대 고객만족과 신뢰도 향상 등이며, 특히 제조업 중심의 중소기업에 유용하게 사용될 것이라고 기대된다.

• Environmental Engineering Research
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• 제14권2호
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• pp.81-87
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• 2009

The decomposition of antibiotics (cefaclor) by gamma irradiation in aqueous solutions was experimentally evaluated. To obtain a mutual interaction between two factors (antibiotics concentrations and radiation doses) and to optimize these factors during the process, experimental design and statistical analysis were employed. The decomposition capability of the gamma radiation was also mathematically described as a function of cefaclor concentration and gamma-ray dose using the statistical analysis. The results showed that the cefaclor concentration ($X_1$) in the response $Y_1$ (Reduction of cefaclor concentration) and gamma-ray dose ($X_2$) in the response $Y_2$ (Removal efficiency (%) of cefaclor concentration) exhibited a significantly positive effect, whereas gamma-ray dose ($X_2$) in the response $Y_1$ showed a significantly negative effect. The estimated ridge of maximum responses and optimal conditions for $Y_1$:($X_1$,$X_2$)=(25 mg/L, 350 Gy) and $Y_2$:($X_1$,$X_2$)=(21 mg/L, 565 Gy) using canonical analysis were 4.37 mg/L of reduction of cefaclor concentration and 98.35% of removal efficiency of cefaclor concentration, respectively. The measurement values agreed well with the predicted ones, thereby confirming the suitability of the model for $Y_1$ and $Y_2$ and the success of the experimental design in optimizing the conditions of the gamma irradiation process.

• 대한기계학회논문집A
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• 제26권10호
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• pp.2150-2158
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• 2002

A recent research and development has the requirement for the optimization to shorten design time of modified or new product model and to obtain more precise engineering solution. General optimization problem must consider many conflicted objective functions simultaneously. Multi-objective optimization treats the multiple objective functions and constraints with design change. But, real engineering problem doesn't describe accurate constraint and objective function owing to the limit of representation. Therefore this study applies variance analysis on the basis of structure analysis and DOE to the vertical roller mill fur portland cement and proposed statistical design model to evaluate the effect of structural modification with design change by performing practical multi-objective optimization considering mass, stress and deflection.

• Journal of Advanced Marine Engineering and Technology
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• 제31권3호
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• pp.215-223
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• 2007

When the propulsion shafting system of marine diesel engine is designed. the vibratory stresses on shafts should be reviewed and be satisfied with limits which are laid down by classification societies In addition. the torsional vibration aspects for crankshaft of main engine are requested to be checked by engine designers. Especially. for the 4, 5, and 6-cylinder engines. the 2nd order moment compensator(s) may be installed to compensate the external moments of engine and not to excite the hull girder vibration. This moment compensator which is mounted on fore and/or after-end of engine is driven by the roller chain drive for some of MAN 2-stroke diesel engines. While the engine is running, the roller chain Is worn down, which causes the extension of roller chain. The chain therefore should be checked and tightened by periods in order to keep its functionality. However. when the torsional angular acceleration of chain drive exceeds the certain limit. the chain will suffer the excessive slack and transverse vibration. This may cause fatigue, wear or damage on the chain and the chain ultimately may be broken. The research object of this thesis is to review factors which affect the angular acceleration of chain drive and to find out how to decrease the angular acceleration of driving chain by checking factors which have a major contribution to acceleration reduction using the statistical method of DOE(design of experiment), correlation analysis and regression analysis methods.

• 한국정보통신설비학회:학술대회논문집
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• 한국정보통신설비학회 2007년도 학술대회
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• pp.407-410
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• 2007

In the RRH (Radio Remote Head) of a WCDMA Node B System, an HPA (High Power Amplifier) is used in order to amplify the transmission RF signal. Upon designing an HPA, the design requirements demand that the intermodulation characteristics are optimized during design and that the stability of the characteristics is maintained in the field. In this DOE (Design of Experiments) research, a few vital factors that affect intermodulation characteristics were first selected; then, an optimal solution was produced for high reliability in a noisy environment in the field by employing the Taguchi Method, a statistical method used for a robust design. Furthermore, by employing HALT(High Accelerated Life Test) during the verification test, this experiment has verified that an HPA that was designed using the Taguchi Method proved to be a far more robust design than an HPA that was designed without using the method.