Modeling of Indium Tin Oxide(ITO) Film Deposition Process using Neural Network |
Min, Chul-Hong
(가톨릭대학교 정보통신전자공학)
Park, Sung-Jin ((주)소로나) Yoon, Neung-Goo ((주)소로나) Kim, Tae-Seon (가톨릭대학교 정보통신전자공학) |
1 | P. K. Song, Y. Shigesato, M. KameiI, and I. YasuI, 'Electrical and structural properties of Tin-doped indium oxide films deposited by DC sputtering at room temperature', Jpn. J. Appl. Phys., Vol. 38, No. 5A, p. 2921, 1999 DOI |
2 | A. H. M. Zahirul Alam, P. K. Saha, T. Hata, and K. Sasaki, 'High-rate reactive deposition of indium oxide films on unheated substrate using ozone gas', Thin Solid Films, Vol. 352, No. 1-2, p. 133, 1999 DOI ScienceOn |
3 | 이임영, 최상대, 이기암, '상온 이온 보조 증착된 ITO 박막의 특성', 한국광학학회지, 13권, 3호, p. 204, 2002 DOI |
4 | H. Kuhn, 'Present status and future prospect of LB film research', 89 Fourth International Conference on LB films, p. 2, 1989 |
5 | J. B. Chu, H. B. Zhu, X. B. Xu, Z. Sun, Y. W. Chen, and S. M. Huang, 'RF magnetron sputtered indium tin oxide thin films for application in solar cells', Nanoelectronics Conference, p. 728, 2008 |
6 | H. L. Ma, D. H. Zhang, P. Ma, S. Z. Win, and S. Y. Li, 'Preparation and properties of transparent conducting indium tin oxide films deposited by reactive evaporation', Thin Solid Films., Vol. 263, No. 1, p. 105, 1995 DOI ScienceOn |
7 | F. Colombel, X. Castel, M. Himdi, G. Legeay, and E. M. Cruz, 'Ultrathin metal layer, ITO film and ITO/Cu/ITO multilayer towards transparent antenna', Science, Measurement & Technology, IET, Vol. 3, Iss. 3, p. 229, 2009 DOI ScienceOn |
8 | K. Suzuki, N. Hashimoto, T. Oyama, J. Shimizu, Y. Akao, and H. Kojima, 'Large scale and low resistance ITO films formed at high deposition rates', Thin Solid Films., Vol. 226, No. 1, p. 104, 1993 DOI ScienceOn |