• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.406-406
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• 2010

일반적으로, 나노스케일의 MOS 소자에서는 게이트 절연체 두께가 감소함에 따라 tunneling effect의 증가로 인해 PID (plasma induced damage)로 인한 소자 특성 저하 현상을 감소하는 추세로 알려져 있다. 하지만 요즘 많이 사용되고 있는 high-k 게이트 절연체의 경우에는 오히려 더 많은 charge들이 trapping 되면서 PID가 오히려 더 심각해지는 현상이 나타나고 있다. 이러한 high-k 게이트 식각 시 현재는 주로 Hf-based wet etch나 dry etch가 사용되고 있지만 gate edge 영역에서 high-k 게이트 절연체의 undercut 현상이나 PID에 의한 소자특성 저하가 보고되고 있다. 본 연구에서는 이에 차세대 MOS 소자의 gate stack 구조중 issue화 되고 있는 metal gate 층과 gate dielectric 층의 식각공정에 각각 중성빔 식각과 중성빔 원자층 식각을 적용하여 전기적 손상 없이 원자레벨의 정확한 식각 조절을 해줄 수 있는 새로운 two step 식각 공정에 대한 연구를 진행하였다. 먼저 TiN metal gate 층의 식각을 위해 HBr과 $Cl_2$ 혼합가스를 사용한 중성빔 식각기술을 적용하여 100 eV 이하의 에너지 조건에서 하부층인 $HfO_2$와 거의 무한대의 식각 선택비를 얻었다. 하지만 100 eV 조건에서는 낮은 에너지에 의한 빔 스케터링으로 실제 패턴 식각시 etch foot이 발생되는 현상이 관찰되었으며, 이를 해결하기 위하여 먼저 높은 에너지로 식각을 진행하고 $HfO_2$와의 계면 근처에서 100 eV로 식각을 해주는 two step 방법을 사용하였다. 그 결과 anistropic 하고 하부층에 etch stop된 식각 형상을 관찰할 수 있었다. 다음으로 3.5nm의 매우 얇은 $HfO_2$ gate dielectric 층의 정확한 식각 깊이 조절을 위해 $BCl_3$와 Ar 가스를 이용한 중성빔 원자층 식각기술을 적용하여 $1.2\;{\AA}$/cycle의 단일막 식각 조건을 확립하고 약 30 cycle 공정시 3.5nm 두께의 $HfO_2$ 층이 완벽히 제거됨을 관찰할 수 있었다. 뿐만 아니라, vertical 한 식각 형상 및 향상된 표면 roughness를 transmission electron microscope(TEM)과 atomic force microscope (AFM)으로 관찰할 수 있었다. 이러한 중성빔 식각과 중성빔 원자층 식각기술이 결합된 새로운 gate recess 공정을 실제 MOSFET 소자에 적용하여 기존 식각 방법으로 제작된 소자 결과를 비교해 본 결과 gate leakage current가 약 one order 정도 개선되었음을 확인할 수 있었다.

• Journal of Energy Engineering
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• v.8 no.4
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• pp.592-604
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• 1999

The steady state and dynamic characteristics of large cell area MCFC stacks were analyzed to solve the problems such as temperature difference generated in stacks and pressure difference between anode and cathode. Manipulated variables (current density, duel utilization rate, oxidant utilization rate) and controlled variables (temperature difference, anode and cathode pressure difference) which had an important effect on the MCFC stack performance were determined using operation results of two types of MCFC stacks (5kW (3,000 $\textrm{cm}^2$, 20 ea). 3kW (6,000 $\textrm{cm}^2$, 5ea)). The stability and transfer function representing system dynamics were obtained by steady state gain rate which showed the relative change between MVs and CVs. The transfer function was a 3$\times$3 matrix and a typical first order system without time delay. The optimal operating condition of large cell area MCFC stacks could be determined by analyzing dynamic characteristics. In case of a 5 kW MCFC stack, pressurized operation with recycle flow should be used to control the outlet temperature less than 68$0^{\circ}C$ and to control the MCFC system effectively. MIMO control or decoupler should be used to remove the interaction between MVs and CVs. This result will be used as important data in determining the control structure design and operation mode of large cell area MCFC systems in the future.

• Knowledge Management Research
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• v.24 no.2
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• pp.161-183
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• 2023

Social Q&A sites, where individuals freely ask and answer each other online, play an important role as a public knowledge repository. For their sustainable growth, social Q&A sites constantly need new askers and new answerers. However, previous studies have focused only on answerers, with little attention to new users or askers. This study examines the factors encouraging new users to continue using social Q&A sites based on motivational affordance theory and self-determination theory, and also investigates whether the factors differ depending on the types of users (i.e., new asker vs. new answerer). In addition, the moderating effect of prior experience with a member Q&A site was examined. Using logistic regression and XGBoost, we analyzed online activity data from 25,000 users in the Stack Exchange Network and found that design elements with motivational affordances had significant impacts on new users' continuance behavior. The experience of a member Q&A site negatively moderated the influence of the antecedents of continuance behavior. Interestingly, the influence of editing was not significant in the analysis of new users as a whole, but was significant in the separate analyses of askers (significantly negative) and answerers (significantly positive).

• Journal of the Korean Solar Energy Society
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• v.31 no.3
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• pp.126-132
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• 2011

Recently, high-rise apartment is being briskly built but there are problems such as lack of ventilation, stack effect and much energy consumption. Therefore It is recommended to develop a Small Wind Power System Combined Ventilator as a solution to solve these problems. The purpose of this study is to provide basis for Small Wind Power System Combined Ventilator in super high-rise apartment. This study conducted CFD simulation (Star-CCM) according to the shape of structures, building height and distance of two structures to identify the effect of wind speed increase when the structure is installed. As a result, pyramidal type was best suited for increase of wind speed. The best place was the front of the roof to main wind direction, and the best building height was 200m rather than 300m. If two or more small wind turbines combined ventilator are installed closely, vertical position to main wind direction is recommended. Horizontal position must necessarily be avoided, but height difference between two blades more than 3m showed good performance.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.6
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• pp.91-98
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• 2004

This paper proposes a PCB plane model for generic SPICE circuit simulators. The proposed model reflects two frequency-dependent losses, namely skin and dielectric losses. After power/ground plane pair is divided into arrays of unit-cells, each unit-cell is modeled using a transmission line and two loss models. The loss model is composed of a resistor for DC loss, series HL ladder circuit for skin loss and series RC ladder circuit for dielectric loss. To verify the validity of the proposed model, it is compared with SPICE ac analysis using frequency-dependent resistors. Also, we show that the estimation results using the proposed model have a good correlation with that of VNA measurement for the typical PCB stack-up structure of general desktop PCs. With the proposed model, not only ac analysis but also transient analysis can be easily done for circuits including various non-linear/linear devices since the model consists of passive elements onl.

• Asian-Australasian Journal of Animal Sciences
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• v.1 no.4
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• pp.201-208
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• 1988

Fifty-six lactating Surti buffaloes, fed rice straw, were allocated to seven treatment groups as follows: 1. Straw supplemented with 2% urea (SS) + 1.5kg rice bran (RB) 2. Straw treated with 4% urea in an open stack (TS open) 3. TS open + 1.5 kg RB 4. TS open + 3.0 kg RB 5. TS open + 1.5 kg RB + 3.0 kg Gliricidia (Gl) 6. Straw treated with 4% urea in a closed pit (TS closed) 7. TS closed + 1.5 kg RB + 3.0 kg Gl Milk production, butterfat percentage and liveweight gain of cows and calves were measured and tested with analysis of variance. The results are: - The animals on urea treated straw (group 2) had a higher milk production (p<0.05), higher butterfat production (p<0.05) and less liveweight gain loss (p<0.05) than the animals on urea supplemented straw (group 1). Butterfat percentage also increased by treatment, although not significantly (p>0.05). - Increasing levels of rice bran (groups 3 and 4 compared to 2) increased total milk production and milked quantity of butterfat, while butterfat percentage decreased (p < 0.05). - Milk production increased (p <0.05) with extra rice bran added (group 4 compared to 3), but was not affected (p > 0.05) by Gliricidia addition (group 5 compared to 3). Butterfat percentage dropped with extra rice bran supplement (p <0.05). The lack of response to Gliricidia indicated that protein is not limiting in treated straw, or that Gliricidia protein is partly insoluble. - System of treatment had no effect on milk production (p >0.05), while supplementation with 1.5 kg RB and 3.0 kg Gliricidia increased production and caused a lower butterfat percentage (p <0.05) (groups 2, 5, 6 and 7 compared). A significant (p <0.05) interaction treatment system x supplementation was present. It was concluded, that both treatment and supplementation did affect milk production as well as milk composition. Gliricidia addition gave less effect than rice bran, indicating different requirements for starchy substances in the feed. Treatment of straw does not negatively affect butterfat production, it can increase butterfat production and even butterfat percentage.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.6 s.249
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• pp.553-559
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• 2006

Most diesel injector, which is currently used in high-pressure common rail fuel injection system of diesel engine, is driven by the solenoid coil energy for its needle movement. The main disadvantage of this solenoid-driven injector is a high power consumption, high power loss through solenoid coil and relatively fixed needle response's problem. In this study, a prototype piezo-driven injector, as a new injector mechanism driven by piezoelectric energy based on the concept of inverse piezo-electric effect, has been designed and fabricated to know the effect of piezo-driven injection processes on the diesel spray structure and internal nozzle flow. Firstly we investigated the spray characteristics in a constant volume chamber pressurized by nitrogen gas using the back diffusion light illumination method for high-speed temporal photography and also analyzed the inside nozzle flow by a fully transient simulation with cavitation model using VOF(volume of fraction) method. The numerical calculation has been performed to simulate the cavitating flow of 3-dimensional real size single hole nozzle along the injection duration. Results were compared between a conventional solenoid-driven injector and piezo-driven injector, both equipped with the same micro-sac multi-hole injection nozzle. The experimental results show that the piezo-driven injector has short injection delay and a faster spray development and produces higher injection velocity than the solenoid-driven injector. And the predicted simulation results with the degree of cavitation's generation inside nozzle for faster needle response In a piezo-driven injector were reflected to spray development in agreement with the experimental spray images.

• Fire Science and Engineering
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• v.30 no.1
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• pp.6-11
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• 2016

This study analyzed the performance of smoke exhaustion installed to secure the life safety from the smoke each opening modes, as performing the simulation on the Jeju regions generating to strong windy using CONTAM. We assessed the effectiveness of the system under conditions of high external winds as well as an ambient wind conditions. It also assessed the relative effectiveness of opening all vents versus opening only those vents which served rooms in which the fire was located. This study revealed external winds exerted a substantial impact on the performance of the smoke ventilation system. It was found that opening the ventilation system in the room containing the fire resulted in a greater performance than opening vents in both fire in all rooms. The reduced performance of the smoke ventilation system upon the opening of all vents is thought to be due to the intrusion of outside air, and the establishment of unfavorable air circulation, caused by the negative pressure generated in the building.

• Journal of the Korean Magnetics Society
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• v.15 no.2
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• pp.61-66
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• 2005

In order to make submicron cell for spin-injection device, lift-off method using Pt stencil and wet etching was chosen. This approach allows batch fabrication of stencil substrate with electron-beam lithography. It simplifies the process between magnetic film stack deposition and final device testing, thus enabling rapid turnaround in sample fabrication. Submicron junctions with size of $200nm{\times}300nm$ and $500nm{\times}500nm$ 500 nm and pseudo spin valve structure of $CoFe(30{\AA})/Cu(100{\AA})/CoFe(120{\AA}$) was deposited into the nanojunctions. MR ratio was 0.8 and $1.1{\%}$, respectively and spin transfer effect was confirmed with critical current of $7.65{\times}10^7A/cm^2$.

• Journal of the korean society of oceanography
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• v.32 no.4
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• pp.163-170
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• 1997

Some CMP gathers acquired from shallow marine seismic reflection survey in offshore Korea do not show the hyperbolic trend of moveout. It originated from so-called swell effect of source and streamer, which are towed under rough sea surface during the data acquisition. The observed time deviations of NMO-corrected traces can be entirely ascribed to the swell effect. To correct these time deviations, a residual statics is introduced using Genetic Algorithms (GA) into the swell correction. A new class of global optimization methods known as GA has recently been developed in the field of Artificial Intelligence and has a resemblance with the genetic evolution of biological systems. The basic idea in using GA as an optimization method is to represent a population of possible solutions or models in a chromosome-type encoding and manipulate these encoded models through simulated reproduction, crossover and mutation. GA parameters used in this paper are as follows: population size Q=40, probability of multiple-point crossover P$_c$=0.6, linear relationship of mutation probability P$_m$ from 0.002 to 0.004, and gray code representation are adopted. The number of the model participating in tournament selection (nt) is 3, and the number of expected copies desired for the best population member in the scaling of fitness is 1.5. With above parameters, an optimization run was iterated for 101 generations. The combination of above parameters are found to be optimal for the convergence of the algorithm. The resulting reflection events in every NMO-corrected CMP gather show good alignment and enhanced quality stack section.