• Title/Summary/Keyword: Stack Thickness

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Dielectric and Piezoelectric Properties in Multilayer Ceramic Actuator (적층형 세라믹 액츄에이터의 유전 및 압전특성)

  • Choi, Hyeong-Bong;Jeong, Soon-Jong;Ha, Mun-Su;Koh, Jung-Hyuk;Lee, Dae-Su;Song, Jae-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.615-618
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    • 2004
  • The piezoelectricity and polarization of multilayer ceramic actuators, being designed to stack ceramic layer and electrode layer alternately, were investigated under a consideration of geometry, the thickness ratio of the ceramic layer to electrode layer The actuators were fabricated by tape-casting of $0.42PbTiO_3-0.38PbZrO_3-0.2Pb(Mn_{1/3}Nb_{2/3})O_3$ followed by laminating, burn-out and co-firing process. The actuators of $5\times5mm^2$ in area were formed in a way that $60{\sim}200{\mu}m$ thick ceramics were stacked 10 times alternately with $5{\mu}m$ thick electrode. Increase in polarization and electric field-displacement with increasing thickness ratio of the ceramic/electrode layer and thickness/cross section ratio were attributed to the change of $non-180^{\circ}/180^{\circ}$ domain ratio which was affected by the interlayer internal stress and Poisson ratio of ceramic layer. The piezoelectricity and actuation behaviors were found to be dependent upon the volume ratio (or thickness ratio) of ceramic layer relative to ceramic layer. Concerning with the existence of internal stress, the field-induced polarization and deformation were described in the multilayer actuator.

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Property of Nano-thickness Nickel Silicides with Low Temperature Catalytic CVD (Catalytic CVD 저온공정으로 제조된 나노급 니켈실리사이드의 물성)

  • Choi, Yongyoon;Kim, Kunil;Park, Jongsung;Song, Ohsung
    • Korean Journal of Metals and Materials
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    • v.48 no.2
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    • pp.133-140
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    • 2010
  • 10 nm thick Ni layers were deposited on 200 nm $SiO_2/Si$ substrates using an e-beam evaporator. Then, 60 nm or 20 nm thick ${\alpha}$-Si:H layers were grown at low temperature (<$200^{\circ}C$) by a Catalytic-CVD. NiSi layers were already formed instantaneously during Cat-CVD process regardless of the thickness of the $\alpha$-Si. The resulting changes in sheet resistance, microstructure, phase, chemical composition, and surface roughness with the additional rapid thermal annealing up to $500^{\circ}C$ were examined using a four point probe, HRXRD, FE-SEM, TEM, AES, and SPM, respectively. The sheet resistance of the NiSi layer was 12${\Omega}$/□ regardless of the thickness of the ${\alpha}$-Si and kept stable even after the additional annealing process. The thickness of the NiSi layer was 30 nm with excellent uniformity and the surface roughness was maintained under 2 nm after the annealing. Accordingly, our result implies that the low temperature Cat-CVD process with proposed films stack sequence may have more advantages than the conventional CVD process for nano scale NiSi applications.

Study on the Structural Stability and Charge Trapping Properties of High-k HfO2 and HFO2/Al2O3/HfO2 Stacks (High-k HfO2와 HfO2/Al2O3/HfO2 적층막의 구조 안정성 및 전하 트랩핑 특성 연구)

  • Ahn, Young-Soo;Huh, Min-Young;Kang, Hae-Yoon;Sohn, Hyunchul
    • Korean Journal of Metals and Materials
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    • v.48 no.3
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    • pp.256-261
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    • 2010
  • In this work, high-k dielectric stacks of $HfO_2$ and $HfO_2$/$Al_2O_3$/$HfO_2$ (HAH) were deposited on $SiO_2/Si$ substrates by atomic layer deposition as charge trapping layers in charge trapping devices. The structural stability and the charge trapping characteristics of such stacks were investigated using Metal-Alumina-Hafnia-Oxide-Silicon (MAHOS) structure. The surface roughness of $HfO_2$ was stable up to 11 nm with the insertion of 0.2 nm thick $Al_2O_3$. The effect of the thickness of the HAH stack and the thickness of intermediate $Al_2O_3$ on charge trapping characteristics were investigated for MAHOS structure under various gate bias pulse with duration of 100 ms. The threshold voltage shift after programming and erase showed that the memory window was increased with increasing bias on gate. However, the programming window was independent of the thickness of HAH charge trapping layers. When the thickness of $Al_2O_3$insertion increased from 0.2 nm to 1 nm, the erase window was decreased without change in the programming window.

Active control of the Self-excited Vibration of a Rotor System Supported by Tilting-Pad Gas Bearing (틸딩 패드 기체 베어링으로 지지된 로터 계 자려 진동의 능동제어)

  • Kwon, Tae-Gyu
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.2
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    • pp.119-125
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    • 2001
  • This paper presents an experimental study on active control of self-excited vibration for a high speed turbomachinery. In order to suppress the self-excited vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by pivots containing piezoelectric actuators and their radial position can be actively controlled by applying voltage to the actuators. The transfer characteristics from actuator inputs to shaft vibration outputs are experimentally investigated. In a tilting-pad gas bearing (TPGB), a shaft is supported by the pressurized air film. Four gap sensors were used to measure the vibration of the shaft and PID was used in the feedback control of the shaft vibration. The experimental results show that the self-excited vibration of the rotor can be effectively suppressed if the PID controller gains are properly chosen. As a result we find that the feedback control is effective for suppressing the self-excited vibration of a rotor system using stack-type PZT actuators.

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SHAPE EFFECT ON PERFORMANCE OF MULTILAYER CERAMIC ACTUATOR

  • Wee, S. B.;Jeong, S. J.;Song, J. S.
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2003.12a
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    • pp.163-168
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    • 2003
  • In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of $0.2Pb(Mg_{1/3}Nb_{2/3)O_3-0.38PbZrO_3-0,42PbTiO_3$ followed by lamination and burnout & co-firing processes. The actuators of $10\times10\times0.6~2\textrm{mm}^3$ in size were formed in a way that $60 ~ 200\mu\textrm{m}$ thick were stacked alternatively with $5\mu\textrm{m}$ thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of $90^{\circ}$/$180^{\circ}$ domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

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Fabrication and Estimation of an Ultrafine Grained Complex Aluminum Alloy Sheet by the ARB Process Using Dissimilar Aluminum Alloys (이종 알루미늄의 ARB공정에 의한 초미세립 복합알루미늄합금판재의 제조 및 평가)

  • Lee, Seong-Hee;Kang, Chang-Seog
    • Korean Journal of Metals and Materials
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    • v.49 no.11
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    • pp.893-899
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    • 2011
  • Fabrication of a complex aluminum alloy by the ARB process using dissimilar aluminum alloys has been carried out. Two-layer stack ARB was performed for up to six cycles at ambient temperature without a lubricant according to the conventional procedure. Dissimilar aluminum sheets of AA1050 and AA5052 with thickness of 1 mm were degreased and wire-brushed for the ARB process. The sheets were then stacked together and rolled to 50% reduction such that the thickness became 1 mm again. The sheet was then cut into two pieces of identical length and the same procedure was repeated for up to six cycles. A sound complex aluminum alloy sheet was successfully fabricated by the ARB process. The tensile strength increased as the number of ARB cycles was increased, reaching 298 MPa after 5 cycles, which is about 2.2 times that of the initial material. The average grain size was $24{\mu}m$ after 1 cycle, and became $1.8{\mu}m$ after 6 cycles.

Property changes of GDLs and water behaviors in PEFCs (고분자전해질 연료전지 체결조건에서 기체확산층의 특성변화 및 물거동 확인)

  • Park, Gu-Gon;Lim, Nam-Yun;Ahn, Eun-Jin;Park, Jin-Soo;Yoon, Young-Gi;Lee, Won-Yong;Lim, Tae-Won;Kim, Chan-Soo
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.313-315
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    • 2006
  • Proper water management is important to achieve high performance and durability of Polymer electrolyte fuel cell (PEFC). Among various stack components, gas diffusion layer (GDL) is considered as a core part to determine the gas and water transportation in a cell. To optimize the water management, the changes of properties as well as basic properties of GDLs were investigated before and after clamping of colls. Thickness, electric conductivity, porosity, hydroppobicity etc. were characterized by the same criteria. The amount of residual water after cell operation also was compared by direct measuring of weight. Based on the amount of residual water the endurance on the freeze condition was evaluated.

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On the wind and earthquake response of reinforced concrete chimneys

  • Turkeli, Erdem;Karaca, Zeki;Ozturk, Hasan Tahsin
    • Earthquakes and Structures
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    • v.12 no.5
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    • pp.559-567
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    • 2017
  • Slender structures like reinforced concrete (RC) chimneys are severely damaged or collapsed during severe wind storms or strong ground motions all over the world. Today, with the improvement in technology and industry, most factories need these slender structures with increasing height and decreasing in shell thickness causing vulnerable to winds and earthquakes. Main objectives in this study are to make structural wind and earthquake analysis of RC chimneys by using a well-known international standard CICIND 2001 and real recorded time history accelerations and to clarify weak points of these tall and slender structures against these severe natural actions. Findings of this study show that maximum tensile stress and shear stress approximately increase 103.90% and 312.77% over or near the openings on the body of the RC chimneys that cause brittle failure around this region of openings.

Characteristic Analysis of Touch Free Gear Using Permamant Magnet (비접촉 구동용 마그네트 기어 토크 특성 해석)

  • Oh, Young-Jin;Ha, Kyung-Ho;Hong, Jung-Pyo;Oh, Young-Jin
    • Proceedings of the KIEE Conference
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    • 2001.07b
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    • pp.754-756
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    • 2001
  • This study investigates the characteristics of touch-free permanent magnet gear according to design parameters. The effects of the design parameters on the magnetic torque is analyzed by using 3 dimensional Finite Element Method (FEM). The considered parameters are magnetization thickness, skew angle, stack length, inner and outer diameter and the number of pole. And the validity of analysis method is confirmed by the experimental results.

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Fabrication of Wafer-scale Polystyrene (2+1) Dimensional Photonic Crystal Multilayers Via the Layer-by-layer Scooping Transfer Technique

  • Do, Yeong-Rak;O, Jeong-Rok;Lee, Gyeong-Nam
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.11.1-11.1
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    • 2011
  • We have developed a simple synthetic method for fabricating a wafer-scale colloidal crystal film of 2D crystals in a 1D stack based on a combination of two simple processes : the self-assembly of polystyrene (PS) nanospheres at the water-air interface and the layer-by-layer (LbL) scooping transfer technique. The main advantage of this approach is that it allows excellent control of the thickness (at a layer level) of the crystals and the formation of a vertical crack-free layer over a wafer-scale (4 inch). We investigate the optical and morphological properties of the PhC multilayers fabricated using various mono-sized colloidal crystals (250, 300, 350, 420, 580, 720, and 850 nm), and mixed binary colloidal crystals (300/350 and 250/350 nm).

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