• 제목/요약/키워드: Solution annealing

검색결과 501건 처리시간 0.028초

Preparation of Anatase TiO2 Thin Films with (OiPr)2Ti(CH3COCHCONEt2)2 Precursor by MOCVD

  • Bae, Byoung-Jae;Lee, Kwang-Yeol;Seo, Won-Seok;Miah, Md. Arzu;Kim, Keun-Chong;Park, Joon T.
    • Bulletin of the Korean Chemical Society
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    • 제25권11호
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    • pp.1661-1666
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    • 2004
  • The reaction of titanium tetraisopropoxide with 2 equiv of N,N-diethyl acetoacetamide affords Ti($O^iPr)_2(CH_3COCHCONEt_2)_2$ (1) as colorless crystals in 80% yield. Compound 1 is characterized by spectroscopic (Mass and $^1H/^{13}C$ NMR) and microanalytical data. Molecular structure of 1 has been determined by a single crystal X-ray diffraction study, which reveals that it is a monomeric, cis-diisopropoxide and contains a six coordinate Ti(IV) atom with a cis($CONEt_2$), trans($COCH_3$) configuration (1a) in a distorted octahedral environment. Variable-temperature $^1H$ NMR spectra of 1 indicate that it exists as an equilibrium mixture of cis, trans (1a) and cis, cis (1b) isomers in a 0.57 : 0.43 ratio at -20$^{\circ}C$ in toluene-$d_8$ solution. Thermal properties of 1 as a MOCVD precursor for titanium dioxide films have been evaluated by thermal gravimetric analysis and vapor pressure measurement. Thin films of pure anatase titanium dioxide (after annealing above 500$^{\circ}C$ under oxygen) have been grown on Si(100) with precursor 1 in the substrate temperature range of 350- 500$^{\circ}$ using a bubbler-based MOCVD method.

Investigation of Low-Temperature Processed Amorphous ZnO TFTs Using a Sol-Gel Method

  • Chae, Seong Won;Yun, Ho Jin;Yang, Seung Dong;Jeong, Jun Kyo;Park, Jung Hyun;Kim, Yu Jeong;Kim, Hyo Jin;Lee, Ga-Won
    • Transactions on Electrical and Electronic Materials
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    • 제18권3호
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    • pp.155-158
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    • 2017
  • In this paper, ZnO Thin Film Transistors (TFTs) were fabricated by a sol-gel method using a low-temperature process, and their physical and electrical characteristics were analyzed. To lower the process temperature to $200^{\circ}C$, we used a zinc nitrate hydrate ($Zn(NO_3)_2{\cdot}xH_2O$) precursor. Thermo Gravimetric Analyzer (TGA) analysis showed that the zinc nitrate hydrate precursor solution had 1.5% residual organics, much less than the 6.5% of zinc acetate dihydrate at $200^{\circ}C$. In the sol-gel method, organic materials in the precursor disrupt formation of a high-quality film, and high-temperature annealing is needed to remove the organic residuals, which implies that, by using zinc nitrate hydrate, ZnO devices can be fabricated at a much lower temperature. Using an X-Ray Diffractometer (XRD) and an X-ray Photoelectron Spectrometer (XPS), $200^{\circ}C$ annealed ZnO film with zinc nitrate hydrate (ZnO (N)) was found to have an amorphous phase and much more oxygen vacancy ($V_o$) than Zn-O bonds. Despite no crystallinity, the ZnO (N) had conductance comparable to that of ZnO with zinc acetate dihydrate (ZnO (A)) annealed at $500^{\circ}C$ as in TFTs. These results show that sol-gel could be made a potent process for low-cost and flexible device applications by optimizing the precursors.

메모리소자 응용을 위한 초박막의 제작 및 특성 평가 (Evaluation of the fabrications and properties of ultra-thin film for memory device application)

  • 정상현;최행철;김재현;박상진;김광호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.169-170
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    • 2006
  • In this study, ultra thin films of ferroelectric vinylidene fluoride-trifluoroethylene (VF2-TrFE) copolymer were fabricated on degenerated Si (n+, $0.002\;{\Omega}{\cdot}cm$) using by spin coating method. A 1~5 wt% diluted solution of purified vinylidene fluoride-trifluoroethylene (VF2:TrFE=70:30) in a dimethylformamide (DMF) solvent were prepared and deposited on silicon wafers at a spin rate of 2000~5000rpm for 30 seconds. After annealing in a vacuum ambient at $200^{\circ}C$ for 60 min, upper gold electrodes were deposited by vacuum evaporation for electrical measurement. X-ray diffraction results showed that the VF2-TrFE films on Si substrates had $\beta$-phase of copolymer structures. The capacitance on $n^+$-Si(100) wafer showed hysteresis behavior like a butterfly shape and this result indicates clearly that the dielectric films have ferroelectric properties. The typical measured remnant polarization (2Pr) and coercive filed (EC) values measured using a computer controlled a RT-66A standardized ferroelectric test system (Radiant Technologies) were about $0.54\;C/cm^2$ and 172 kV/cm, respectively, in an applied electric field of ${\pm}0.75\;MV/cm$.

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고분자 게이트 전극을 이용한 유기박막 트랜지스터의 제조 및 소자성능에 관한 연구 (Fabrication and Characterization of Organic Thin-Film Transistors by Using Polymer Gate Electrode)

  • 장현석;송기국;김성현
    • 폴리머
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    • 제35권4호
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    • pp.370-374
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    • 2011
  • 폴리아닐린(polyaniline, PANI) 전도성 고분자 용액을 camphorsulfonic acid(CSA)로 도핑하여 제조하였고 FTIR을 이용하여 고분자 중합 및 도핑유무를 확인하였다. 제조된 폴리아닐린을 스핀 코팅하여 유기박막 트랜지스터의 게이트 전극으로 사용하였으며, 열처리 온도변화에 따른 전기 전도도 변화를 4-probe measurement로 확인하였다. 또한 표면 특성을 이해하기 위해 atomic force microscope(AFM)와 optical microscope를 이용하였다. 폴리아닐린 게이트전극을 활용하여 얻은 유기박막 트랜지스터의 소자성능은 최고 이동도가 0.15 $cm^2$/Vs, 전류점멸비가 $2.4{\times}10^6$임을 확인하였다. 고분자 전극의 소지특성을 비교분석하기 위해, 같은 구조의 Au 전극소자를 제작하였다. Au 금속전극소자와 유사한 성능을 보인 폴리아닐렌 게이트 전극 소자는 플렉서블 유기박막 트랜지스터 전극으로 충분히 사용될 수 있다.

CdSe Nanocrystal Quantum Dots Based Hybrid Heterojunction Solar Cell

  • Jeong, So-Myung;Eom, S.;Park, H.;Lee, Soo-Hyoung;Han, Chang-Soo;Jeong, So-Hee
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.93-93
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    • 2010
  • Semiconductor nanocrystal quantum dots (NQDs) have recently attracted considerable interest for use in photovoltaics. Band gaps of NQDs can be tuned over a considerable range by varying the particle size thereby allowing enhance absorption of solar spectrum. NQDs, synthesized using colloidal routes, are solution processable and promise for a large-area fabrication. Recent advancements in multiple-exciton generation in NQD solutions have afforded possible efficiency improvements. Various architectures have attempted to utilize the NQDs in photovoltaics, such as NQD-sensitized solar cell, NQD-bulk-heterojuction solar cell and etc. Here we have fabricated CdSe NQDs with the band gap of 1.8 eV to 2.1 eV on thin-layers of p-type organic crystallites (1.61 eV) to realize a donor-acceptor type heterojuction solar cell. Simple structure as it was, we could control the interface of electrode-p-layer, and n-p-layer and monitor the following efficiency changes. Specifically, surface molecules adsorbed on the NQDs were critical to enhance the carrier transfer among the n-layer where we could verify by measuring the photo-response from the NQD layers only. Further modifying the annealing temperature after the deposition of NQDs on p-layers allowed higher conversion efficiencies in the device.

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Cu 미세 배선을 위한 무전해 Ni-B 확산 방지막의 Cu 확산에 따른 상변태 거동 (Phase Transformation by Cu Diffusion of Electrolessly Deposited Ni-B Diffusion Barrier for Cu Interconnect)

  • 최재웅;황길호;송준혜;강성군
    • 한국재료학회지
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    • 제15권11호
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    • pp.735-740
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    • 2005
  • The phase transformation of Ni-B diffusion barrier by Cu diffusion was studied. The Ni-B diffusion barrier, thickness of 10(Inn, was electrolessly deposited on the electroplated Cu interconnect. The specimens were annealed either in Ar atmosphere or in $H_2$ atmosphere from $300^{\circ}C\;to\;800^{\circ}C$ for 30min, respectively. Although the Ni-B coated specimens showed the decomposition of $Ni_3B$ above $400^{\circ}C$ in both Ar atmosphere and $H_2$ atmosphere, Ni-B powders did not show the decomposition of $Ni_3B$. The $Ni_3B$ was decomposed to Ni and B in hi atmospherr: and the metallic Ni formed the solid solution with Cu and the free B was oxidized to $B_2O_3$. However, both the boron hydride and free B were not observed in the diffusion barrier after the annealing in $H_2$ atmos There. These results revealed that the decomposition of $Ni_3B$ by Cu made the Cu diffusion continued toward the Ni-B diffusion barrier.

ZnO 나노선과 P3HT 폴리머를 이용한 유/무기 복합체 TFT 소자 (ZnO Nanowires and P3HT Polymer Composite TFT Device)

  • 문경주;최지혁;;명재민
    • 한국재료학회지
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    • 제19권1호
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    • pp.33-36
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    • 2009
  • Inorganic-organic composite thin-film-transistors (TFTs) of ZnO nanowire/Poly(3-hexylthiophene) (P3HT) were investigated by changing the nanowire densities inside the composites. Crystalline ZnO nanowires were synthesized via an aqueous solution method at a low temperature, and the nanowire densities inside the composites were controlled by changing the ultrasonifiaction time. The channel layers were prepared with composites by spin-coating at 2000 rpm, which was followed by annealing in a vacuum at $100^{\circ}C$ for 10 hours. Au/inorganic-organic composite layer/$SiO_2$ structures were fabricated and the mobility, $I_{on}/I_{off}$ ratio, and threshold voltage were then measured to analyze the electrical characteristics of the channel layer. Compared with a P3HT TFT, the electrical properties of TFT were found to be improved after increasing the nanowire density inside the composites. The mobility of the P3HT TFT was approximately $10^{-4}cm^2/V{\cdot}s$. However, the mobility of the ZnO nanowire/P3HT composite TFT was increased by two orders compared to that of the P3HT TFT. In terms of the $I_{on}/I_{off}$ ratio, the composite device showed a two-fold increase compared to that of the P3HT TFT.

무지방 드레싱의 점도와 안정성에 미치는 저항전분의 효과 (Effects of Resistant Starch on the Viscosity and Stability of Fat-Free Dressing)

  • 송지영;노준희;신말식
    • 한국식품조리과학회지
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    • 제32권3호
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    • pp.253-260
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    • 2016
  • Purpose: To develop fat-free dressing containing a resistant starch (RS) as a dietary fiber, the viscosity and stability of various type RSes prepared from wheat, maize, potato, rice, waxy rice, and amaranth starches were investigated by using Brookfield viscometer. The shape of RS granule in the dressing during storage was also observed. Methods: The viscosity of fat free dressing with different retrograded RS3 (RS3V) prepared from waxy rice starch with 0.1% lemon vinegar and ascorbate mixed solution had higher RS3 that was maintained constant during storage. Annealing and heating prior to cross-linking, and heating after cross-linking increased RS level of RS4 type starches. Results: The viscosities and stabilities of dressings with RS were different depending on starch sources and RS preparation conditions. The heated RS4 (HRS4) increased in viscosity and stability with RS4 addition. Especially the fat-free dressings with HRS4 prepared from rice and waxy rice starches maintained stability regardless of separation after one month storage with only 7% separation after 6 month storages. The shape of RS4 granule in acidic medium of dressing did not change until 6 months. Conclusion: In this study, RS4 made by the rice and waxy rice starches showed high viscosity and maintained stability of the fat-free dressings during storage.

Neighbor Generation Strategies of Local Search for Permutation-based Combinatorial Optimization

  • Hwang, Junha
    • 한국컴퓨터정보학회논문지
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    • 제26권10호
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    • pp.27-35
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    • 2021
  • 지역 탐색은 다양한 조합 최적화 문제들을 해결하기 위해 활용되어 왔다. 지역 탐색에 있어서 가장 중요한 요소 중 하나가 이웃해를 생성하는 방법이다. 본 논문에서는 순열 기반 조합 최적화를 위한 지역 탐색의 이웃해 생성 전략들을 제안하고, 순회 외판원 문제를 대상으로 각 전략들의 성능을 비교한다. 본 논문에서는 총 10가지 이웃해 생성 전략을 제안한다. 기본적으로 기존에 많이 사용했던 Swap 등 4가지 전략 이외에 Rotation 등 4가지 기법을 새롭게 제안한다. 이외에 기본 이웃해 생성 전략들을 결합하여 만든 Combined1과 Combined2가 있다. 실험은 기본적인 지역 탐색을 적용하되 이웃해 생성 전략만 변경하여 수행하였다. 실험 결과, 이웃해 생성 전략에 따라 성능 차이가 큰 것을 확인하였으며 아울러 Combined2의 성능이 가장 좋음을 확인하였다. 뿐만 아니라 Combined2는 기존의 지역 탐색 기법들보다 더 좋은 성능을 발휘함을 확인하였다.

리튬이온전지 음극용 SiOx 나노입자의 조대화를 통한 전기화학 특성 향상 (Granulations of SiOx Nanoparticles to Improve Electrochemical Properties as a Li-Ion Battery's Anode)

  • 이보라;이재영;장보윤;김준수;김성수
    • 한국전기전자재료학회논문지
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    • 제32권1호
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    • pp.70-77
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    • 2019
  • $SiO_x$ nanoparticles were granulated, and their microstructures and effects on electrochemical behaviors were investigated. In spite of the promising electrochemical performance of $SiO_x$, nanoparticles have limitations such as high surface area, low density, and difficulty in handling during slurry processing. Granulation can be one solution. In this study, pelletizing and annealing were conducted to create particles with sizes of several decades of micron. Decrease in surface area directly influences the initial charge and discharge process when granules are applied as anode materials for Li-ion batteries. Lower surface area is key to decreasing the amount of irreversible phase-formation, such as $Li_2Si_2O_5$, $Li_2SiO_3$ and $Li_4SiO_4$, as well as forming the solid electrolyte interface. Additionally, aggregation of nanoparticles is required to obtain further enhancement of the electrochemical behavior due to restrictions that there be no $Li_4SiO_4$-related reaction during the first discharge process.