• 제목/요약/키워드: SnO2 thin films

검색결과 303건 처리시간 0.028초

산화물박막 증착에 의한 금속 메쉬전극 구조 광전기화학셀의 효율 개선에 관한 연구 (Efficiency Improvement of Metal-Mesh Electrode Type Photoelectrochemical Cells by Oxides Layer Coatings)

  • 한치환;박선희;성열문
    • 전기학회논문지
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    • 제60권3호
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    • pp.584-587
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    • 2011
  • In this work, the $TiO_2$ and $SnO_2$ thin films as blocking layers were coated directly onto the metal-mesh electrode surface to prevent unnecessary inflow of back-transfer electrons from the electrolyte ($I^-/I_3^-$) to the metal-mesh electrode. The DSCs were fabricated with working electrode of SUS mesh coated with blocking $TiO_2$ and $SnO_2$ layers, dye-attached mesoporous $TiO_2$ film, gel electrolyte and counter electrode of Pt-deposited F:$SnO_2$. From the experimental result, it was ascertained that the efficiency of metal electrode coated with $TiO_2$ by Dip-coating was superior to that of metal electrode coated with $SnO_2$ by Dip-coating and screen printing with the results of experiments. The photo-current conversion efficiency of the cell obtained from optimum fabrication condition was 3% ($V_{oc}$=0.61V, $J_{sc}$=11.64 mA/$cm^2$, ff=0.64) under AM1.5, 100 mW/$cm^2$ illumination.

열 CVD법으로 증착된 SnO2 박막의 미세구조와 전기적 특성 (Microstructure and Electrical Properties of SnO2 Thin Films Grown by Thermal CVD Method)

  • 정진;최승평;신동찬;구재본;송호준;박진성
    • 한국전기전자재료학회논문지
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    • 제16권5호
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    • pp.441-447
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    • 2003
  • When a SnO$_2$ thin film was deposited by thermal CVD, two different types of growth behavior that were dependent on the deposition temperature were observed. The film grown at 475$^{\circ}C$ had a wide grain size distribution and a faceted surface shape. On the other hand, the film grown at 5$25^{\circ}C$ had a relatively narrow grain size distribution and a rounded sulfate shape. The aspects of grain shape and growth behavior agree well with the theory of gram growth and a roughening transition. The charge tarrier density decreased with deposition time. According to photoluminescence measurements, the peak intensity of the spectra occurred at approximately 2.5 eV, which is related to oxygen vacancies, and decreased with increasing of deposition time. These measurement results suggest that the number of oxygen vacancies, which is related to the electrical conductivity, decrease with deposition time.

반응가스조성이 PET기판위에 ECR 화학증착법에 의해 제조된 SnO2 박막특성에 미치는 영향 (Reaction Gas Composition Dependence on the Properties of SnO2 Films on PET Substrate by ECR-MOCVD)

  • 김연석;이중기
    • 전기화학회지
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    • 제8권3호
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    • pp.139-145
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    • 2005
  • 전자싸이크로트론공명(ECR: Electro Cyclotron Resonance)상온화학증착법에 의해 PET 폴리머기판위에 $SnO_x$ 박막을 제조하고, Sn의 전구체인 TMT(Tetra-methyl Tin)에 대한 산소와 수소의 몰 비 변화가 박막의 특성에 미치는 영향을 조사하였다 비화학양론적인 결합에 의해 성장된 투명 주석 산화막은 주입되는 산소/TMT, 수소/TMT몰 비에 의하여 조성비가 결정되고, 결정된 조성비에 의해 전기적 성질이 결정되는 것을 확인할 수 있었다. 산소/TMT의 몰 비 변화에 대하여 PET(polyethylene terephthalate)에 증착된 $SnO_x$ 박막의 최적 조성비는 1:2.4이다. 조성비는 반응에 참가하는 산소의 양이 증가할수록 점차적으로 증가하고, 과량의 몰 비로 산소가 주입될 경우 박막내의 Sn과 결합하지 않고 잉여 산소전하밀도를 증가시켜 bulk한 박막을 형성해 전기 비저항을 증가시키는 주요 원인이 된다. 수소/TMT의 몰 비는 산소 몰 비와 같이 증착되는 $SnO_x$의 몰 비에 영향을 주어 조성비를 변화시킴으로서 전기비저항을 결정하는데 크게 기여한다. 반응기내에 공급되는 수소량이 적으면 TMT의 불완전한 분해를 초래하여 반응에 필요한 $Sn^+$ 이온농도가 낮아지게 되고,상대적으로 잉여 산소함량이 증가하면서 높은 저항을 나타낸다. 임계값 이상으로 많은 양의 수소를 공급하면 플라즈마 내에 존재하는 $O^-$ 이온을 환원시켜 주석 산화막의 형성에 필요한 $O^-$ 이온의 감소로 전기저항이 오히려 증가하게 된다. 따라서 박막의 Sn:O의 조성비는 주입되는 산소량이 증가할수록 더욱 큰 값을 갖게 되고, 주입되는 수소량이 증가할수록 작은 값을 갖게 된다. 본 연구범위에서 TMP에 대한 산소의 몰 비는 80배, 수소의 몰 비는 40배일 때 가장 투명도와 전기전도도를 지니는 박막 특성을 나타내었다.

Octa (2-ethylhexyloxy ) tin-phthalocyanine의 LB막 제작에 관한 연구 (Study on the preparation and characterization Octa (2-ethylhexyloxy) tin-phthalocyanine LB films)

  • 이상윤;김영관;김정수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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    • pp.166-169
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    • 1996
  • It is well known that the metallo-phthalocyanines (MPcs) are sensitive to toxic gaseous molecules such as NO$_2$ and also chemically and thermally stable and it is recently reported that SnO$_2$ thin films have a selective sensitivity to NO$_2$ and SO$_2$ gas. Therefore, it is interesting to prepare phthalo-cyanine Langmuir-Boldgett(LB) films containing tin as a chemical sensor for NO$_2$ and SO$_2$ gas and test the selectivity with these tin containing LB films. First, in this study, ultra thin films of Octa (2-ethylhexyloxy) tin-phthalocyanine were prepared on various substrates by LB method. $\pi$-A isotherm and transfer characteristics of these films were investigated. The formation of these films was determined by ellipsometry. Intrinsic current-voltage(I-V) characteristics of these films were also measured.

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회전형 원자층 증착기의 회전 속도에 따른 SnSe 분말 상 ZnO 박막 증착 (Rotation Speed Dependence of ZnO Coating Layer on SnSe powders by Rotary Atomic Layer Deposition Reactor)

  • 정명준;윤예준;변종민;최병준
    • 한국분말재료학회지
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    • 제28권3호
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    • pp.239-245
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    • 2021
  • The SnSe single crystal shows an outstanding figure of merit (ZT) of 2.6 at 973 K; thus, it is considered to be a promising thermoelectric material. However, the mass production of SnSe single crystals is difficult, and their mechanical properties are poor. Alternatively, we can use polycrystalline SnSe powder, which has better mechanical properties. In this study, surface modification by atomic layer deposition (ALD) is chosen to increase the ZT value of SnSe polycrystalline powder. SnSe powder is ground by a ball mill. An ALD coating process using a rotary-type reactor is adopted. ZnO thin films are grown by 100 ALD cycles using diethylzinc and H2O as precursors at 100℃. ALD is performed at rotation speeds of 30, 40, 50, and 60 rpm to examine the effects of rotation speed on the thin film characteristics. The physical and chemical properties of ALD-coated SnSe powders are characterized by scanning and tunneling electron microscopy combined with energy-dispersive spectroscopy. The results reveal that a smooth oxygen-rich ZnO layer is grown on SnSe at a rotation speed of 30 rpm. This result can be applied for the uniform coating of a ZnO layer on various powder materials.

Cu2ZnSn(S,Se)4 (CZTSSe) 박막 태양전지 적용을 위한 마그네트론 스퍼터링으로 증착된 AZO/Ag/AZO 투명전극의 특성 (Characteristics of an AZO/Ag/AZO Transparent Conducting Electrode Fabricated by Magnetron Sputtering for Application in Cu2ZnSn(S,Se)4 (CZTSSe) Solar Cells)

  • 이동민;장준성;김지훈;이인재;이병훈;조은애;김진혁
    • 한국재료학회지
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    • 제30권6호
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    • pp.285-291
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    • 2020
  • Recent advances in technology using ultra-thin noble metal film in oxide/metal/oxide structures have attracted attention because this material is a promising alternative to meet the needs of transparent conduction electrodes (TCE). AZO/Ag/AZO multilayer films are prepared by magnetron sputtering for Cu2ZnSn(S,Se)4 (CZTSSe) of kesterite solar cells. It is shown that the electrical and optical properties of the AZO/Ag/AZO multilayer films can be improved by the very low resistivity and surface plasmon effects due to the deposition of different thicknesses of Ag layer between oxide layers fixed at AZO 30 nm. The AZO/Ag/AZO multilayer films of Ag 15 nm show high mobility of 26.4 ㎠/Vs and low resistivity and sheet resistance of 3.5810-5 Ωcm and 5.0 Ω/sq. Also, the AZO/Ag (15 nm)/AZO multilayer film shows relatively high transmittance of more than 65 % in the visible region. Through this, we fabricated CZTSSe thin film solar cells with 7.51 % efficiency by improving the short-circuit current density and fill factor to 27.7 mV/㎠ and 62 %, respectively.

실리콘을 첨가한 주석 산화물 박막의 전기 화학적 특성 (Electrochemical Characteristics of Silicon-Doped Tin Oxide Thin Films)

  • 이상헌;박건태;손영국
    • 한국재료학회지
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    • 제12권4호
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    • pp.240-247
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    • 2002
  • Tin oxide thin films doped with silicon as anodes for lithium secondary battery were fabricated by R.F. magnetron sputtering technique. The electrochemical results showed that the irreversible capacity was reduced during the first discharge/charge cycle, because the audition of silicon decreased the oxidic state of Tin. Capacity was increased with the increase of substrate temperature, however decreased with the increase of RTA temperatures. The reversible capacity of thin films fabricated under the substrate temperature of $300^{\circ}C$ and the Ar:$O_2$ratio of 7:3 was 700mA/g.

수소 첨가에 의한 비정질 ITO 박막의 기계적 특성 연구 (Effect of Hydrogen on Mechanical S tability of Amorphous In-Sn-O thin films for flexible electronics)

  • 김서한;송풍근
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2018년도 춘계학술대회 논문집
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    • pp.56-56
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    • 2018
  • Transparent conductive oxides (TCOs) have attracted attention due to their high electrical conductivity and optical transparency in the visible region. Consequently, TCOs have been widely used as electrode materials in various electronic devices such as flat panel displays and solar cells. Previous studies on TCOs focused on their electrical and optical performances; there have been numerous attempts to improve these properties, such as chemical doping and crystallinity enhancement. Recently, due to rapidly increasing demand for flexible electronics, the academic interest in the mechanical stability of materials has come to the fore as a major issue. In particular, long-term stability under bending is a crucial requirement for flexible electrodes; however, research on this feature is still in the nascent stage. Hydrogen-incorporated amorphous In-Sn-O (a-ITO) thin films were fabricated by introducing hydrogen gas during deposition. The hydrogen concentration in the film was determined by secondary ion mass spectrometry and was found to vary from $4.7{\times}10^{20}$ to $8.1{\times}10^{20}cm^{-3}$ with increasing $H_2$ flow rate. The mechanical stability of the a-ITO thin films dramatically improved because of hydrogen incorporation, without any observable degradation in their electrical or optical properties. With increasing hydrogen concentration, the compressive residual stress gradually decreased and the subgap absorption at around 3.1 eV was suppressed. Considering that the residual stress and subgap absorption mainly originated from defects, hydrogen may be a promising candidate for defect passivation in flexible electronics.

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keV SURFACE MODIFICATION AND THIN FILM GROWTH

  • Koh, Seok-Keun;Choi, Won-Kook;Youn, Young-Soo;Song, Seok-Kyun;Cho, Jun-Sik;Kim, Ki-Hwan;Jung, Hyung-Jin
    • 한국진공학회지
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    • 제4권S2호
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    • pp.95-99
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    • 1995
  • keV ion beam irradiatin for surface modification and thin film growth have been discussed. keV ion beam irradiation in reactive gas environment has been developed for improving wettability of polymer, and for enhancing adhesion to metal film, and adventages of the method have been reviewed. An epitaxial Cu film on Si(100) substrate has been grown by ionized cluster beam and changes of crystallinity and surface roughness have been discussed. Stoichiometric $SnO_2$ films on Si(100) and glass have been grown by a hybrid ion beam Deposition(2 metal ion sources+1 gas ion source), and nonstoichiometric $SnO_2$ films are controlled by various deposition conditions in the HIB. Surface modification for polymer by kev ion irradiation have been developed. Wetting angle of water to PC has been changed from 68 degree to 49 degree with $Ar^+$ irradiation and to 8 degree with $Ar^+$ irradiation and the oxygen environment. Change of surface phenomena in a keV ion beam and characteristics of the grown films are suggested.

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