Browse > Article
http://dx.doi.org/10.4313/JKEM.2003.16.5.441

Microstructure and Electrical Properties of SnO2 Thin Films Grown by Thermal CVD Method  

Jeong, Jin (조선대학교 물리학과)
Choi, Seong-Pyung (조선대학교 물리학과)
Shin, Dong-Chan (조선대학교 신소재공학과)
Koo, Jae-Bon (삼성 SDI 중앙연구소 개발1팀)
Song, Ho-Jun (한국기초과학지원 연구원 광주 분소)
Park, Jin-Seoung (조선대학교 신소재공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.16, no.5, 2003 , pp. 441-447 More about this Journal
Abstract
When a SnO$_2$ thin film was deposited by thermal CVD, two different types of growth behavior that were dependent on the deposition temperature were observed. The film grown at 475$^{\circ}C$ had a wide grain size distribution and a faceted surface shape. On the other hand, the film grown at 5$25^{\circ}C$ had a relatively narrow grain size distribution and a rounded sulfate shape. The aspects of grain shape and growth behavior agree well with the theory of gram growth and a roughening transition. The charge tarrier density decreased with deposition time. According to photoluminescence measurements, the peak intensity of the spectra occurred at approximately 2.5 eV, which is related to oxygen vacancies, and decreased with increasing of deposition time. These measurement results suggest that the number of oxygen vacancies, which is related to the electrical conductivity, decrease with deposition time.
Keywords
CVD; $SnO_2$; Hall effect; Grain growth; Roughening transition;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 Abnormal grain growth and grain boundary faceting in a model Ni-base superalloy /
[ S.B.Lee;D.Y.Yoon;M.F.Henry ] / Acta Mater.   DOI   ScienceOn
2 Preapration of fast detecting SnO₂ gas sensors /
[ H.Pink;L.Treitinger;L.Vite ] / Jpn. J. Appl. Phys.   DOI
3 Properties of SnO₂ materials /
[ Z.M.Jarzebski;J.P.Maration ] / J. Electrochem. Physical Soc.   DOI
4 Preparation and properties of antimony doped SnO₂films by thermal decomposition of tin 2 ethyhexanoate /
[ A.Tsunashima ] / J. Mater. Sci.   DOI   ScienceOn
5 A tin oxide thin films sensor with high ethanol sensitivity /
[ Y.K.Fang;J.J.Lee ] / Thin Solid Films   DOI   ScienceOn
6 Effect of sintering atmosphere and dopant addition on the densification of SnO₂ ceramics /
[ J.I.Jung;B.C.Kim;S.H.Chang;J.J.Kim ] / J. Kor. Ceram. Soc.   과학기술학회마을
7 Influence of film density on residual stress and resistivity for Cu thin films deposited by bias sputtering /
[ H.M.Choi;S.K.Choi;O.Anderson;K.Bange ] / Thin Solid Films   DOI   ScienceOn
8 The dependence of abnormal grain growth on initial grain size in 316L stainless steel /
[ S.H.Lee;J.S.Choi;D.Y.Yoon ] / Z. Metallkd.
9 Surface smoothing and roughening in sputtered SnO₂films /
[ T.Lindstrom;J.Isidorsson;G.A.Niklasson ] / Thin Solid Films   DOI   ScienceOn
10 /
[ K.Ihokura;J.Watson ] / The Stannic Oxide Gas Sensor Principles and Applications
11 Electrical and optical properties of sprayed SnO₂films /
[ V.Vasu;A.Subrahmanyam ] / Thin Solid Films   DOI   ScienceOn
12 박막형 SnO₂가스센서 특성에 관한 연구 /
[ 김상연;송준태; ] / 전기전자재료학회논문지   과학기술학회마을
13 가스 감지소자의 감지특성(Ⅱ) /
[ 최순돈;이상기;김규호 ] / 전기전자재료학회논문지
14 Abnormal grain growth in bulk Cu-the dependence on initial grain size and annealing temperature /
[ J.B.Koo;D.Y.Yoon ] / Metall. Mater. Trans. A   DOI   ScienceOn
15 Effect of SiO₂,CaO₂,and MgO additions on the grain growth of alumina /
[ C.W.Park;D.Y.Yoon ] / J. Am. Cer. Soc.   DOI   ScienceOn
16 Spray pyrolysis 방법으로 증착된 SnO₂박막의 전기 및 광학적 특성 /
[ 김혜동;박민수;이범주;안병태 ] / 한국재료학회지   과학기술학회마을
17 Origin of intrinsic stress in <TEX>$Y_{2}O_{3}$</TEX> films deposited by reactive sputtering /
[ H.M.Choi;S.K.Choi ] / J. Vac. Sci. Technol. A   DOI
18 Dependence of electrical and optical properties of ZnO films on substrate temperature /
[ X.L.Xu;S.P.Lau;J.S.Chen;Z.Sun;B.K.Tay;J.W.Chai ] / Mat. Sci. Semicon. Proc.   DOI   ScienceOn