• Korean Chemical Engineering Research
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• v.53 no.1
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• pp.78-82
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• 2015

Hollow silica particles were prepared using sodium silicate and organic templates. Polystyrene latex (PSL) particles produced by dispersion polymerization were used as organic templates. PSL particles ranged from $1{\mu}m$ to $3{\mu}m$ in diameter were synthesized by adjusting the amount of 2,2'-azobisisobutyronitrile (AIBN). The PSL/$SiO_2$ core-shell particles were prepared by coating of silica nanoparticles originated from sodium silicate using sol-gel method. The organic templates were removed by the organic solvent, tetrahydrofuran (THF). Morphology of hollow silica particles was investigated with respect to types of the reaction medium and pH during the process. By changing the solvent from ethanol to water, hollow silica particles were successfully formed. Hollow silica particles with the uniform shell thickness were produced at low pH as well. The reflectivity of the as-prepared silica particles was measured in the range of the wavelength of UV and visible light. Hollow silica particles showed much better reflective properties than the commercial light reflector, Insuladd.

• Journal of Adhesion and Interface
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• v.11 no.4
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• pp.144-148
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• 2010

It reports the surface modification of gold nanoparticles (AuNPs) by the synthesis of thin silica layer and the fabrication of AuNPs monolayer on the glass surface. AuNPs of 10 nm in diameter were prepared in aqueous solution. A silica layer was synthesized at the different concentration of tetraethlyorthosilicate for the control of silica layer thickness. Langmuir-Blodgett (LB) film was fabricated by dispersing AuNPs on the aqueous solution and raising a surface pressure up to a solid phase. The change of AuNPs' size was observed by the change of UV/Visible spectra. Atomic force microscopic images confirmed the reliable fabrication of AuNPs LB films.

• Journal of the Korean Ceramic Society
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• v.35 no.4
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• pp.364-370
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• 1998

Boron-phoshor-silicate glass was fabricated on Si substrates by FHD(Flame Hydrolysis Deposition) The microstructrue of silica soot deposited at various conditon such as composition and substrate temperature was analysed by SEM. After consolidation the refractive index and composition of the silica layer were in-vestigated. For refractive index control B, P and Ge were used as additive elements while B and Ge oxides are easily mixed into $SiO_2$, P oxide($B_2O_3$) doping is difficult because of the volatile property due to low melt-ing point. Boron-phosphorous-silicate glass (BPSG) layer were fabricated using bertical torch and optimized flame temperature substrate temperature and distance of torch and substrate. P concentration of BPSG lay-er measured 3.3 Wt% and the consolidation temperature was lower than $1180^{\circ}C$. The measured refractive index of BPSG silica layer in $1.55\;\mu\textrm{m}$ wavelength was $1.4480{\pm}1{\times}10^{-1}$ and the thickness was $22{\pm}1\;\mu\textrm{m}$.

• Journal of the Korean Ceramic Society
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• v.34 no.2
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• pp.188-194
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• 1997

Wet gel with surface modification by TMCS was redispersed in EtOH and redispersed silica sol for coat-ing was prepared. After spin coating of redispersed sol was conducted on silicon substrate, processes of drying(8$0^{\circ}C$) and heat treatment(>25$0^{\circ}C$) were, followed at ambient pressure. The influence of heat treat-ment of properties of film was observed, changing temperature at heat treatment. The optimum redisp-ersion condition for stable silica sol was wet gel:EtOH=1g:110$m\ell$ and the concentration and viscosity of redispersed silica sol with average particle size of 30nm were 0.11 M, 2.0-2.2 cP respectively. Crack-free thin film with the refractive index of 1.14 and thickness of 400 nm was obtained through drying at 8$0^{\circ}C$ and subsequent heat treatment at 45$0^{\circ}C$ for 2 hrs respectively after spin coating of 1500rpm, 10 times.

• Journal of the Korean Society of Safety
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• v.13 no.1
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• pp.85-91
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• 1998

Sol-gel derived silica films were prepared by dip-coating onto polymethylmethacylate with Tetraethoxysilane(TEOS) as starting materials. Film properties such as viscosity and thickness were investigated as a function of dip speed, waterprecursor ratio, sol aging time. IR spectra of the gel films prepared from TEOS at various R are given. At small values of R the absorption peaks assignable to C-H vibration in $-OC_2H_5$ groups are observed around 3000 and 1500-1300 $cm^{-1}$. These bands indicate that the -$-OC_2H_5$ groups are retained in the gel at small values of R because of incomplete hydrolysis of TEOS. Film behaviour was interpreted in terms of the dependence of hydrolysis and condensation rates on the interplay between sol pH and waterprecursor ratio. Film thickness was found to increase by approximately a factor of two as waterprecursor ratio increased from two to six. Film thickness also increased with sol prepolymerization time. Surface quality was correlated with processing conditions.

• JSTS:Journal of Semiconductor Technology and Science
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• v.8 no.2
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• pp.164-169
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• 2008

The effects of the antisite related defects on the electronic structure of silica and the gate leakage current have been investigated using first-principles calculations. Energy levels related to the antisite defects in silicon dioxide have been introduced into the bandgap, which are nearly 2.0 eV from the top of the valence band. Combining with the electronic structures calculated from first-principles simulations, tunneling currents through the silica layer with antisite defects have been calculated. The tunneling current calculations show that the hole tunneling currents assisted by the antisite defects will be dominant at low oxide field whereas the electron direct tunneling current will be dominant at high oxide field. With increased thickness of the defect layer, the threshold point where the hole tunneling current assisted by antisite defects in silica is equal to the electron direct tunneling current extends to higher oxide field.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.759-764
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• 2003

Recently, CMP (chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of roused silica slurry in order to reduce the costs of CMP slurry. The post-CMP thickness and within-wafer non-uniformity (WIWNU) wore measured as a function of different slurry composition. As an experimental result, the performance of reused slurry with annealed silica abrasive of 2 wt％ contents was showed high removal rate and low non-uniformity. Therefore, we propose two-step CMP process as follows , In tile first-step CMP, we can polish the thick and rough film surface using remaked slurry, and then, in the second-step CMP, we can polish the thin film and fine pattern using original slurry. In summary, we can expect the saying of high costs of slurry.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.2
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• pp.151-157
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• 2023

Integrating dielectric materials into LTCC is a convenient method to increase the integration density in electronic circuits. To enable co-firing of the high-k and low-k dielectric LTCC materials in a multi-material hetero-laminate, the shrinkage characteristics of both materials should be similar. Moreover, thermal expansion mismatch between materials during co-firing should be minimized. The alternating stacking of an LTCC with silica filler and that with calcium-zirconate filler was observed to examine the use of the same glass in different LTCCs to minimize the difference in shrinkage and thermal expansion coefficient. For the LTCC of silica filler with a low dielectric constant and that of calcium zirconate filler with a high dielectric constant, the amount of shrinkage was examined through a thermomechanical analysis, and the predicted appropriate fraction of each filler was applied to green sheets by tape casting. The green sheets of different fillers were alternatingly laminated to the thickness of 500 ㎛. As a result of examining the junction, it was observed through SEM that a complete bonding was achieved by constrained sintering in the structure of 'calcium zirconate 50 vol%-silica 30 vol%-calcium zirconate 50 vol%'.

• Steel and Composite Structures
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• v.47 no.5
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• pp.633-644
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• 2023

Taking a look at the previously published papers, it is revealed that there is a porosity index limitation (around 0.35) for the mechanical behavior analysis of the functionally graded porous (FGP) structures. Over mentioned magnitude of the porosity index, the elastic modulus falls below zero for some parts of the structure thickness. Therefore, the current paper is presented to analyze the vibrational behavior of the FGP Timoshenko beams (FGPTBs) using a novel refined formulation regardless of the porosity index magnitude. The silica aerogel foundation and various hydrothermal loadings are assumed as the source of external forces. To obtain the FGPTB's properties, the power law is hired, and employing Hamilton's principle in conjunction with Navier's solution method, the governing equations are extracted and solved. In the end, the impact of the various variables as different beam materials, elastic foundation parameters, and porosity index is captured and displayed. It is revealed that changing hygrothermal loading from non-linear toward uniform configuration results in non-dimensional frequency and stiffness pushing up. Also, Al - Al2O3 as the material composition of the beam and the porosity presence with the O pattern, provide more rigidity in comparison with using other materials and other types of porosity dispersion. The presented computational model in this paper hopes to help add more accuracy to the structures' analysis in high-tech industries.

• Journal of Environmental Science International
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• v.8 no.4
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• pp.473-477
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• 1999

The purpose of this study was to investigate the characteristics of removal efficiency for aromatic hydrocarbons using a high-temperature fiber filter on a laboratory scale. The main elemental compositions of a high-temperaure fiber filter are aluminium and silica, which can act as the catalysts. Benzene, toluene and o-xylene among aromatic hydrocarbons were used in this experiment. For 3cm thickness of fiber filter, these compounds were removed more than 90% at the face velocities of 3cm/sec and 5cm/sec above 45$0^{\circ}C$. For 4cm thickness of it, the removal efficiencies of these compounds were almost 90% from 40$0^{\circ}C$ at the same face velocities, suggesting that it may be due to increasing the contact time between the fiber filter and aromatic hydrocarbons. The pressure droop ranged from 22 to 48mmH2O for 3cm thickness of fiber filter. However, for 4cm thickness of it, it was about two times(41~89mm$H_2O$) higher than that for 3cm fiber thickness.