Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Suppression of Shrinkage Mismatch in Hetero-Laminates Between Different Functional LTCC Materials

  • Seung Kyu Jeon (Ceramics Test-Bed, Korea Institute of Ceramic Engineering and Technology) ;
  • Zeehoon Park (Ceramics Test-Bed, Korea Institute of Ceramic Engineering and Technology) ;
  • Hyo-Soon Shin (Ceramics Test-Bed, Korea Institute of Ceramic Engineering and Technology) ;
  • Dong-Hun Yeo (Ceramics Test-Bed, Korea Institute of Ceramic Engineering and Technology) ;
  • Sahn Nahm (Department of Materials Science and Engineering, Korea University)
  • Received : 2022.11.28
  • Accepted : 2022.12.08
  • Published : 2023.03.01
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Abstract

Integrating dielectric materials into LTCC is a convenient method to increase the integration density in electronic circuits. To enable co-firing of the high-k and low-k dielectric LTCC materials in a multi-material hetero-laminate, the shrinkage characteristics of both materials should be similar. Moreover, thermal expansion mismatch between materials during co-firing should be minimized. The alternating stacking of an LTCC with silica filler and that with calcium-zirconate filler was observed to examine the use of the same glass in different LTCCs to minimize the difference in shrinkage and thermal expansion coefficient. For the LTCC of silica filler with a low dielectric constant and that of calcium zirconate filler with a high dielectric constant, the amount of shrinkage was examined through a thermomechanical analysis, and the predicted appropriate fraction of each filler was applied to green sheets by tape casting. The green sheets of different fillers were alternatingly laminated to the thickness of 500 ㎛. As a result of examining the junction, it was observed through SEM that a complete bonding was achieved by constrained sintering in the structure of 'calcium zirconate 50 vol%-silica 30 vol%-calcium zirconate 50 vol%'.

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Acknowledgement

This work was supported by the Technology Innovation Program (or Industrial Strategic Technology Development Program (20009976, Development of low-loss dielectric and magnetic ceramic material in millimeter wave band) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea).

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