Study of the Effects of the Antisite Related Defects in Silicon Dioxide of Metal-Oxide-Semiconductor Structure on the Gate Leakage Current |
Mao, Ling-Feng
(School of Electronics & Information Engineering, Soochow University)
Wang, Zi-Ou (School of Electronics & Information Engineering, Soochow University) Xu, Ming-Zhen (Institute of Microelectronics Peking University) Tan, Chang-Hua (Institute of Microelectronics Peking University) |
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