• ETRI Journal
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• 제41권6호
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• pp.829-837
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• 2019

The p-type nanowire field-effect transistor (FET) with a SiGe shell channel on a Si core is optimally designed and characterized using in-depth technology computer-aided design (TCAD) with quantum models for sub-10-nm advanced logic technology. SiGe is adopted as the material for the ultrathin shell channel owing to its two primary merits of high hole mobility and strong Si compatibility. The SiGe shell can effectively confine the hole because of the large valence-band offset (VBO) between the Si core and the SiGe channel arranged in the radial direction. The proposed device is optimized in terms of the Ge shell channel thickness, Ge fraction in the SiGe channel, and the channel length (L_g) by examining a set of primary DC and AC parameters. The cutoff frequency (f_T) and maximum oscillation frequency (f_max) of the proposed device were determined to be 440.0 and 753.9 GHz when L_g is 5 nm, respectively, with an intrinsic delay time (τ) of 3.14 ps. The proposed SiGe-shell channel p-type nanowire FET has demonstrated a strong potential for low-power and high-speed applications in 10-nm-and-beyond complementary metal-oxide-semiconductor (CMOS) technology.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 춘계학술발표대회
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• pp.24.2-24.2
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• 2009

Nanostuctures such as nanodot and nanowire have been extensively studied as building blocks for nanoscale devices. However, the direct growth of the nanostuctures at the desired position is one of the most important requirements for realization of the practical devices with high integrity. Self-assembled nanotemplate is one of viable methods to produce highly-ordered nanostructures because it exhibits the highly ordered nanometer-sized pattern without resorting to lithography techniques. And selective epitaxial growth (SEG) can be a proper method for nanostructure fabrication because selective growth on the patterned openings obtained from nanotemplate can be a proper direction to achieve high level of control and reproducibility of nanostructucture fabrication. Especially, SiGe has led to the development of semiconductor devices in which the band structure is varied by the composition and strain distribution, and nanostructures of SiGe has represented new class of devices such nanowire metal-oxide-semiconductor field-effect transistors and photovoltaics. So, in this study, various shaped SiGe nanostructures were selectively grown on Si substrate through ultrahigh vacuum chemical vapor deposition (UHV-CVD) of SiGe on the hexagonally arranged Si openings obtained using nanotemplates. We adopted two types of nanotemplates in this study; anodic aluminum oxide (AAO) and diblock copolymer of PS-b-PMMA. Well ordered and various shaped nanostructure of SiGe, nanodots and nanowire, were fabricated on Si openings by combining SEG of SiGe to self-assembled nanotemplates. Nanostructure fabrication method adopted in this study will open up the easy way to produce the integrated nanoelectronic device arrays using the well ordered nano-building blocks obtained from the combination of SEG and self-assembled nanotemplates.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2018년도 추계학술대회
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• pp.381-382
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• 2018

무접합 나노선 터널 전계 효과 트렌지스터(junctionless nanowire tunnel field-effect transistor; JLNW-TFET)에서 소스(p+), 채널(i), 드레인(n) 물질으로 실리콘 및 게르마늄을 사용하여 이 구조에 대한 문턱전압 이하 기울기(subthreshold swings; SS)와 구동전류를 관찰했다. 소스-채널을 게르마늄-실리콘일 때 실리콘-실리콘, 실리콘-게르마늄, 게르마늄-게르마늄 구조보다 구동전류가 최대 1000배 증가하였고, 실리콘-실리콘 구조가 다른 구조에 비해 최소 SS가 최대 5배 이상 감소하였다.

• 대한기계학회논문집B
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• 제40권9호
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• pp.621-627
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• 2016

본 연구에서는 실험적 데이터를 근간으로 박막재료의 스펙트럼(spectrum) 분포 별 포논-표면 산란율을 직접 계산할 수 있는 모델을 제시했다. 실험 측정결과인 포논 평균자유행로(mean free path, MFP) 스펙트럼 분포 별 열전달 기여도로부터 스펙트럼 의존적 포논-표면 산란율을 직접 도출하는 모델을 개발했고, 이 모델을 아직 실험적 방법으로 포논-표면 산란율을 측정하지 못한 $Si_{0.9}-Ge_{0.1}$ 나노선(Nanowire, NW)에 적용하여, $Si_{0.9}-Ge_{0.1}$ NW 내 포논 MFP 스펙트럼 분포를 구하고, 주파수에 따른 포논 전달특성을 살폈다. 이를 바탕으로 $Si_{0.9}-Ge_{0.1}$ NW 단위길이당 포논-표면 산란율을 제시하여, 가로갈래 포논 주파수 의존성을 살폈다. 본 연구에서 제시한 모델은 향후 나노재료의 공학적 응용을 위한 나노구조물 열전달 해석모델 개발 및 나노재료 열전달 특성 조정(tailoring)을 위한 나노재료 최적설계에 활용될 수 있다.

• 대한기계학회논문집B
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• 제39권10호
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• pp.825-829
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• 2015

나노선에서 코어-셸 헤테로 구조를 도입함으로써 열 전도율을 낮출 수 있으며, 이로 인해 열전 효율(ZT)을 향상시킬 수 있다는 것이 이론 연구를 통해 제안되었다. 본 논문에서는 코어-셸 나노선의 열전도율 감소를 실험적인 방법을 통해 확인하였다. 화학증기 증착법을 통해 만든 게르마늄-규소 $_x$ 게르마늄 $_{1-x}(Ge-Si_xGe_{1-x})$ 코어-셸 나노선의 열전도율을 마이크로 크기의 뜬 디바이스를 이용하여 측정하였다. 셸에서 측정된 실리콘의 함유율(x)는 0.65 로 확인하였으며, 게르마늄은 코어와 셸 사이에서, 격자 불일치(lattice mismatch)에서 비롯된 결점(defect)와 같은 역할을 한다. 또한, 4-point I-V 측정실험에, 휘트스톤 브릿지 실험을 추가 진행함으로써 측정 민감도를 강화하였다. 측정된 열전도율은 상온에서 9~13 W/mK 으로써, 비슷한 지름을 가지는 게르마늄 나노선과 비교하였을 때, 열전도율이 약 30 % 낮아졌음을 확인하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제37회 하계학술대회 초록집
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• pp.84-84
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• 2009

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.288-288
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• 2013

Lithium-ion battery (LIB) is one of the most important rechargeable battery and portable energy storage for the electric digital devices. In particular, study about the higher energy capacity and longer cycle life is intensively studied because of applications in mobile electronics and electric vehicles. Generally, the LIB's capacity can be improved by replacing anode materials with high capacitance. The graphite, common anode materials, has a good cyclability but shows limitations of capacity (~374 mAh/g). On the contrary, silicon (Si) and germanium(Ge), which is same group elements, are promising candidate for high-performance LIB electrodes because it has a higher theoretical specific capacity. (Si:4200 mAh/g, Ge:1600 mAh/g) However, it is well known that Si volume change by 400% upon full lithiation (lithium insertion into Si), which result in a mechanical pulverization and poor capacity retention during cycling. Therefore, variety of nanostructure group IV elements, including nanoparticles, nanowires, and hollow nanospheres, can be promising solution about the critical issues associated with the large volume change. However, the fundamental research about correlation between the composition and structure for LIB anode is not studied yet. Herein, we successfully synthesized various structure of nanowire such as Si-Ge, Ge-Carbon and Si-graphene core-shell types and analyzed the properties of LIB. Nanowires (NWs) were grown on stainless steel substrates using Au catalyst via VLS (Vapor Liquid Solid) mechanism. And, core-shell NWs were grown by VS (Vapor-Solid) process on the surface of NWs. In order to characterize it, we used FE-SEM, HR-TEM, and Raman spectroscopy. We measured battery property of various nanostructures for checking the capacity and cyclability by cell-tester.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.289-289
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• 2013

While there are plenty of studies on synthesizing semiconducting germanium nanowires (Ge NWs) by vapor-liquid-solid (VLS) process, it is difficult to inject dopants into them with uniform dopants distribution due to vapor-solid (VS) deposition. In particular, as precursors and dopants such as germane ($GeH_4$), phosphine ($PH_3$) or diborane ($B_2H_6$) incorporate through sidewall of nanowire, it is hard to obtain the structural and electrical uniformity of Ge NWs. Moreover, the drastic tapered structure of Ge NWs is observed when it is synthesized at high temperature over $400^{\circ}C$ because of excessive VS deposition. In 2006, Emanuel Tutuc et al. demonstrated Ge NW pn junction using p-type shell as depleted layer. However, it could not be prevented from undesirable VS deposition and it still kept the tapered structures of Ge NWs as a result. Herein, we adopt $C_2H_2$ gas in order to passivate Ge NWs with carbon sheath, which makes the entire Ge NWs uniform at even higher temperature over $450^{\circ}C$. We can also synthesize non-tapered and uniformly doped Ge NWs, restricting incorporation of excess germanium on the surface. The Ge NWs with carbon sheath are grown via VLS process on a $Si/SiO_2$ substrate coated 2 nm Au film. Thin Au film is thermally evaporated on a $Si/SiO_2$ substrate. The NW is grown flowing $GeH_4$, HCl, $C_2H_2$ and PH3 for n-type, $B_2H_6$ for p-type at a total pressure of 15 Torr and temperatures of $480{\sim}500^{\circ}C$. Scanning electron microscopy (SEM) reveals clear surface of the Ge NWs synthesized at $500^{\circ}C$. Raman spectroscopy peaked at about ~300 $cm^{-1}$ indicates it is comprised of single crystalline germanium in the core of Ge NWs and it is proved to be covered by thin amorphous carbon by two peaks of 1330 $cm^{-1}$ (D-band) and 1590 $cm^{-1}$ (G-band). Furthermore, the electrical performances of Ge NWs doped with boron and phosphorus are measured by field effect transistor (FET) and they shows typical curves of p-type and n-type FET. It is expected to have general potentials for development of logic devices and solar cells using p-type and n-type Ge NWs with carbon sheath.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.117-117
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• 2012

Si:Ge alloy semiconductor nanocrystals (NCs) offer challenging opportunities for integrated optoelectronics/optoplasmonics, since they potentially allow unprecedentedly strong light-matter interaction in the wavelength range of the optical communication. In this talk, we discuss the recent research efforts of my laboratory to develop optoelectronic components based on individual group IV NCs. We present experimental demonstration of the individual NC optoelectronic devices, including broadband Si:Ge nanowire (NW) photodetectors, intra NW p-n diodes, Ge NC electrooptical modulators and near-field plasmonic NW detectors, where the unique size effects at the nanometer scales commonly manifest themselves. In particular, we demonstrated a scanning photocurrent imaging technique to investigate dynamics of photocarriers in individual Si:Ge NWs, which provides spatially and spectrally resolved local information without ensemble average. Our observations represent inherent size-effects of internal gain in semiconductor NCs, thereby provide a new insight into nano optoplasmonics.

• Bulletin of the Korean Chemical Society
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• 제33권9호
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• pp.2830-2844
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• 2012

This review covers recent developments in our group regarding the synthesis, characterization and applications of single-crystalline one-dimensional nanostructures based on a wide range of material systems including noble metals, metal silicides and metal germanides. For the single-crystalline one-dimensional nanostructures growth, we have employed chemical vapor transport approach without using any catalysts, capping reagents, and templates because of its simplicity and wide applicability. Au, Pd, and Pt nanowires are epitaxially grown on various substrates, in which the nanowires grow from seed crystals by the correlations of the geometry and orientation of seed crystals with those of as-grown nanowires. We also present the synthesis of numerous metal silicide and germanide 1D nanostructures. By simply varying reaction conditions, furthermore, nanowires of metastable phase, such as $Fe_5Si_3$ and $Co_3Si$, and composition tuned cobalt silicides (CoSi, $Co_2Si$, $Co_3Si$) and iron germanides ($Fe_{1.3}Ge$ and $Fe_3Ge$) nanowires are synthesized. Such developments can be utilized as advanced platforms or building blocks for a wide range of applications such as plasmonics, sensings, nanoelectronics, and spintronics.