• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.5
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• pp.915-920
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• 2007

AIN-based film bulk acoustic resonator (FBAR) devices which adopt a membrane-type configuration such as Mo/AIN/bottom-metal/Si are fabricated by employing a novel process. The proposed resonator structure does not require any supporting layer above the substrate, which leads to the reduction in energy loss of the resonators. For all the FBAR devices, the frequency response characteristics are measured and the device parameters, such as return loss and input impedance, are extracted from the frequency responses, and analyzed in terms of the various metals such as Al. Cu, Mo, W used in the bottom-electrode. The mass-loading effect caused by the used bottom-electrode metals is found to be the main reason for the difference revealed in the measured characteristics of the fabricated FBAH devices. The results obtained in this study also show that the degree of match in lattice constant and thermal expansion coefficient hetween piezoelectric layers and electrode metals is crucial to determine the device performance of FEAR.

• Membrane Journal
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• v.32 no.6
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• pp.486-495
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• 2022

This study presents the improved recovery efficiency of rare metal ions through the modified separation membrane wettability and hydrogen ion permeation in the anion exchange membrane (AEM) under the recovery process of combined electrodialysis and solvent extraction. Specifically, the wettability of the separator was enhanced by hydrophilic modification on one separator surface through polydopamine (PDA) and lipophilic modification on the other surface through SiO₂ or graphene oxide (GO). In addition, the modified surface of AEM with polyethyleneimine (PEI), PDA, poly(vinylidene fluoride) (PVDF), etc. reduces the water uptake and modify the pore structure for proton ions generation. The suppressed transport resulted in the reduced hydrogen ion permeation. In the characterization, the surface morphology, chemical properties and composition of membrane or AEM were analyzed with Scanning Electron Microscopy (SEM) and Fourier Transform-Infrared Spectroscopy (FT-IR). Based on the analyses, improved extraction and stripping and hydrogen ion transport inhibition were demonstrated for the copper ion recovery system.

• Journal of the Korean Institute of Gas
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• v.5 no.1
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• pp.29-36
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• 2001

The permeation properties of $O_2\;and\;N_2$ were measured for bromobisphenol A polysulfone(BPSf), bisphenol A trimethylsilylated polysulfone(TMSPSf) and their blend membrane to investigate the structure-properties relationships. BPSf shows relatively high permselectivity. It can be explained that the strong polarity of bromine in BPSf increases chain packing ability. In this case the distance of polymer chains is reduced by increasing of interchain interaction by induced dipole. TMSPSf shows relatively high permeability. The higher value of permeability coefficients for TMSPSf is due to the substitution of very bulky trimethylsilyl groups. The replacement of phenyl hydrogens of bisphenol A polysulfone(PSf) with trimethylsilyl groups results in higher fractional free volume(FFV). In this work, taking into account the complimentary features of BPSf and TMSPSf, BPSf/TMSPSf blend was prepared and the compatibility in mixing are examined. The BPSf/TMSPSf blend shows higher permeability than commercial PSf, with minimum loss of selectivity. The miscibility of the BPSf/TMSPSf blend is confirmed by the single glass transition temperature.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2482-2487
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• 2007

Numerical simulations are conducted for the analysis of a thermal mass air flow sensor with periodic heating pulses on silicon-nitride ($Si_3N_4$) thin membrane structure. This study aims to find the locations of temperature sensors on the thin membrane and the heating pulse conditions, that the higher sensitivity can be achieved, for the development of a MEMS fabricated mass air flow sensor which is driven in periodic heating pulse. The simulations, thus, focus on the membrane temperature profile according to variation of the flow velocity, heating duration time and imposed power. The flow velocity of the simulations is ranging from 3 m/s to 35 m/s, heating duration time from 1 ms to 3 ms and imposed power from 50 mW to 90 mW. The corresponding Reynolds numbers vary from 1000 to 10000.

• Bulletin of the Korean Chemical Society
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• v.9 no.5
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• pp.292-295
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• 1988

Macrocyclic ligands have been studies as cation carriers in a bulk liquid membrane system. $Cu^{2+}$ has been transported using nitrogen substituted macrocycles as carriers and several transition metal ions($M^{n+}\;=\;Mn^{2+},\;Co^{2+},\;Ni^{2+},\;Cd^{2+},\;Pb^{2+}\;and\;Ag^{+}$) have been transported using $DBN_3O_2,\;DBN_2O_2,\;Me_6N_414C4$ and DA18C6 as carriers in a bulk liquid membrane system. Competitive $Cu^{2+}-M2^+$ transport studies have also been carried out for the same system. In single cation transport experiments, the best macrocyclic ligand for transport is a ligand that gives a moderately stable rather than very stable complex in the extraction. However, when both cations are present in the source phase, the cation which forms the most stable complex with carrier is favored in transport over other cations. Generally, the nitrogen substiituted macrocycles transport $Cu^{2+}$ selectively over $Mn^+$. Ligand structure, equilibrium constant (or stability constant) for complex formation, source phase pH and carrier concentration are also important parameters in transport experiments.

• Journal of electromagnetic engineering and science
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• v.6 no.2
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• pp.135-145
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• 2006

This paper presents the theory, design, fabrication and characterization of the novel low actuation voltage capacitive shunt RF-MEMS switch using a corrugated membrane with HRS MEMS packaging. Analytical analyses and experimental results have been carried out to derive algebraic expressions for the mechanical actuation mechanics of corrugated membrane for a low residual stress. It is shown that the residual stress of both types of corrugated and flat membranes can be modeled with the help of a mechanics theory. The residual stress in corrugated membranes is calculated using a geometrical model and is confirmed by finite element method(FEM) analysis and experimental results. The corrugated electrostatic actuated bridge is suspended over a concave structure of CPW, with sputtered nickel(Ni) as the structural material for the bridge and gold for CPW line, fabricated on high-resistivity silicon(HRS) substrate. The corrugated switch on concave structure requires lower actuation voltage than the flat switch on planar structure in various thickness bridges. The residual stress is very low by corrugating both ends of the bridge on concave structure. The residual stress of the bridge material and structure is critical to lower the actuation voltage. The Self-alignment HRS MEMS package of the RF-MEMS switch with a $15{\Omega}{\cdot}cm$ lightly-doped Si chip carrier also shows no parasitic leakage resonances and is verified as an effective packaging solution for the low cost and high performance coplanar MMICs.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.16-21
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• 2005

Photonic crystals, periodic structure with a high refractive index contrast modulation, have recently become very interesting platform for the manipulation of light. The existence of a photonic bandgap, a frequency range in which the propagation of light is prevented in all directions, makes photonic crystal very useful in application where the spatial localization of light is required, for example waveguide, beam splitter, and cavity. However, the fabrication of 3 dimensional photonic crystals is still difficult process. A concept that has recently attracted a lot of attention is a planar photonic crystal based on a dielectric membrane, suspended in the air and perforated with two dimensional lattice of hole. The fabrication of Si master with pillar structure using hot embossing process is investigated for two dimensional, low-index-contrast photonic crystal waveguide. From our research we show that the multiple stamp copy process proved to be feasible and useful.

• Journal of Industrial and Engineering Chemistry
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• v.68
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• pp.416-424
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• 2018

Oil spill and oily wastewater have now become a serious threat to the freshwater and marine environments. Porous materials with super-hydrophobicity and super-oleophilicity are good candidates for the oil adsorption and oil/water separation. Here, flexible hybrid nanofibrous membrane (FHNM) containing $SiO_2$/polyvinylidene fluoride (PVDF) microspheres was prepared by simultaneous electrospinning and electrospraying. The obtained FHNM combined the flexibility of the nanofiber mat and super-hydrophobicity of the microspheres, which could not be achieved by either only electrospinning or only electrospraying. It was found that when the weight ratio between the $SiO_2$ and PVDF reached a critical value, the $SiO_2$ nanoparticles were present on the PVDF microsphere surface, significantly improving the surface roughness and hence the contact angle of the FHNM. Compared with the pure electrospun PVDF nanofiber mat, most of the FHNMs have a higher oil adsorption capacity. The FHNM could separate the oil with water quickly under the gravity and displayed a high efficiency and good reusability for the oil/water separation. More importantly, the FHNM could not only separate the oil with the pure water but also the corrosive solution including the salt, acid and alkali solution.

• New & Renewable Energy
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• v.6 no.1
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• pp.46-52
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• 2010

Membrane electrode assemblies (MEAs) for proton exchange membrane fuel cells (PEMFCs) have been extensively studied to improve their initial performance as well as their durability and to facilitate the commercialization of fuel cell technology. To improve the MEA performance, particularly at low Pt loadings, many approaches have been made. In the present study, MEA performance improvement was performed by adding $TiO_2$ particles into the catalyst layer of MEA. Most of previous studies have focused on the MEA performance enhancement under low humidity conditions by adding metal oxides into the catalyst layer mainly due to the water keeping ability of those metal oxides particles such as $Al_2O_3$, $SiO_2$ and zeolites. However, this study mainly focused on the improvement of MEA performance under fully humidified normal conditions. In this study, the MEA was prepared by decal method aiming for a continuous MEA fabrication process. The decal process can make very thin and uniform catalyst layer on the surface of electrolyte membrane resulting in very low interfacial resistance between catalyst layer and the membrane surface and uniform electrode structure in the MEA. It was found that the addition of $TiO_2$ particles into the catalyst layer made by decal method can minimize water flooding in the catalyst layer, resulting in the improvement of MEA performance.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.10
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.