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Nano stamp fabrication for photonic crystal waveguides  

Jeong, Myung-Yung (부산대학교 나노기술학과)
Jung, Une-Teak (부산대학교 나노과학과 대학원)
Kim, Chang-Seok (부산대학교 나노기술학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.12, 2005 , pp. 16-21 More about this Journal
Abstract
Photonic crystals, periodic structure with a high refractive index contrast modulation, have recently become very interesting platform for the manipulation of light. The existence of a photonic bandgap, a frequency range in which the propagation of light is prevented in all directions, makes photonic crystal very useful in application where the spatial localization of light is required, for example waveguide, beam splitter, and cavity. However, the fabrication of 3 dimensional photonic crystals is still difficult process. A concept that has recently attracted a lot of attention is a planar photonic crystal based on a dielectric membrane, suspended in the air and perforated with two dimensional lattice of hole. The fabrication of Si master with pillar structure using hot embossing process is investigated for two dimensional, low-index-contrast photonic crystal waveguide. From our research we show that the multiple stamp copy process proved to be feasible and useful.
Keywords
2- Dimensional photonic crystals; Nano Imprinting Lithography; Polymer waveguide;
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