• Journal of the Korean Magnetics Society
• /
• v.14 no.5
• /
• pp.163-168
• /
• 2004

We prepared ultra thin film structure of Si(100)/ $SiO_2$(200 nm)/Ta(5 nm)/Ni$_{80}$Fe$_{20/(l～15 nm)}$Ta(5 nm) using an inductively coupled plasma(ICP) helicon sputter. Magnetic properties and cross-sectional microstructures were investigated with a superconduction quantum interference device(SQUID) and a transmission electron microscope(TEM), respectively. We report that NiFe films of sub-3 nm thickness show the B$_{bulk}$ = 0 and B$_{surf}$=-3 ${\times}$ 10$^{-7}$(J/$m^2$). Moreover, Curie temperature may be lowered by decreasing thickness. Coercivity become larger as temperature decreased with 0.5 nm - thick Ta/NiFe interface intermixing. Our result implies that effective magnetic properties of magnetoelastic anisotropy, saturation magnetization, and coercivity may change abruptly in nano-thick films. Thus we should consider those abrupt changes in designing nano-devices such as MRAM applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.11a
• /
• pp.274-274
• /
• 2009

고효율 결정질 실리콘 태양전지 구조를 갖기 위해서는 기본적으로 광포획 기능이 고려된 기판이 고려되어야 한다. 본 실험에서는 2-step 습식공정을 이용하여 기판의 반사율을 기존 대비 절반 이하로까지 줄일 수 있는 저반사율을 갖는 표면구조를 얻을 수 있었다. 일반적인 텍스처링 공정을 NaOH와 TMAH등을 이용하여 10um이하의 피라미드 구조를 통해 평균반사율을 10~13%수준을 얻었고, metal assist etching을 이용하여 추가적인 나노 텍스처링을 적용하였다. 전체적인 2-step에칭을 적용하여 평균 반사율을 5%이하까지 줄일 수 있었다. 이는 전반적으로 나노구조 형성으로 인하여 단파장쪽의 반사율이 적게 나오고 IR 파장쪽의 반사율도 같이 낮아짐으로써 저반사율이 달성되었다. 2-step을 이용한 나노 텍스처링 공정 최적화와 반사방지막을 증착하여 이에 대한 효과를 연구하였다.

• Journal of the Korean Chemical Society
• /
• v.44 no.1
• /
• pp.60-67
• /
• 2000

The wavelength of the surface plasmon absorption depends on the dielectric matrix. $TiO_2/SiO_2$ complex oxide films doped with Au nanoclusters were prepared by sol-gel spin-coating method using $Ti(OPr^i)_4$, $Si(OEt)_4$, and $HAuCl_4{\cdot}7H_2O$. The wavelength of the maximum absorption of Au nanoehrsters in the $TiO_2/SiO_2$ thin films was obtained with lineality from 540 nm to 615 nm depending on the molar ratio of $TiO_2$. The particle sizes and structures of these nanoclusters have been identified through a TEM and X-ray diffraction patterns. The dielectric constants of $TiO_2/SiO_2$ thin films were calculated from the experimental results.

• Journal of the Korea Organic Resources Recycling Association
• /
• v.32 no.1
• /
• pp.21-29
• /
• 2024

In this study, EMC(Epoxy molding compound) waste from the semiconductor molding process is recycled and synthesized into silica nanoparticles, which are then applied as abrasive materials contains CMP(Chemical mechanical polishing) slurry. Specifically, silanol precursor is extracted from EMC waste according to the ultra-sonication method, which provides heat and energy, using ammonia solution as an etchant. By employing as-extracted silanol via a facile sol-gel process, uniform silica nanoparticles(e-SiO₂, experimentally synthesized SiO₂) with a size of ca. 100nm are successfully synthesized. Through physical and chemical analysis, it was confirmed that e-SiO₂ has similar properties compared to commercially available SiO₂(c-SiO₂, commercially SiO₂). For practical CMP applications, CMP slurry is prepared using e-SiO₂ as an abrasive and tested by polishing a semiconductor chip. As a result, the scratches that are roughly on the surface of the chip are successfully removed and turned into a smooth surface. Hence, the results present a recycling method of EMC waste into silica nanoparticles and the application to high-quality CMP slurry for the polishing process in semiconductor packaging.

• Journal of the Korea Concrete Institute
• /
• v.17 no.2 s.86
• /
• pp.247-254
• /
• 2005

Recently, since the advanced nano technology develops unique physical and chemical properties different from those of the conventional materials. Normal concretes mixed with nano - $SiO_2$ have been studied to improve the fire-resistance with high strength and lower heat conductivity. In this pilot study, the nano-particle contents in the specimens (${\Phi}100{\times}200 mm$) were 0, 2, 4, and $6\%$ by weight of cement, and fire-temperatures $200^{\circ}C$, $500^{\circ}C$, and $800^{\circ}C$ were considered. The results show that as the nano-particle contents increases, the weight loss of concrete gradually decreases, and the compressive strength after fire-attack increases effectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2007.11a
• /
• pp.59-59
• /
• 2007

최근 GaN계 LED를 대체할 만한 물질로 주목받고 있는 ZnO는 단결정 박막성장의 어려움, 동일접합 LED 소자구현을 위한 p-ZnO 성장의 어려움 3원계 합금제작의 어려움 등으로 소자제작에 있어 고전을 하고 있다. 특히 이러한 문제점을 극복하고자 하는 방안으로 양자 제한 효과, 탁월한 결정성, self-assembly, internal stress 등의 새로운 기능성을 지닌 ZnO 나노구조가 제시되었다. 하지만 나노구조를 이용한 다이오드 제작에서도 금속전극의 접합이라는 문제의 벽에 가로막혀 있다. 본 실험에서는 자체 개발된 MOCVD 장비를 이용한 일차원 ZnO 나노선을 성장한 이후 연속적으로 박막을 성장하여 금속전극의 접합을 시도하였다. 이종접합구조 뿐만 아니라 일차원 및 이차원 구조의 복합구조는 일반 다결정 박막보다 결정성에서 우수한 특성을 보였으며, 다이오드 제작시에 높은 효율을 보였다.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.19 no.10
• /
• pp.1-7
• /
• 2018

Tin dioxide, $SnO_2$, is applied as an anode material in Li-ion batteries and a gas sensing materials, which shows changes in resistance in the presence of gas molecules, such as $H_2$, NO, $NO_2$ etc. Considerable research has been done on the synthesis of $SnO_2$ nanostructures. Nanomaterials exhibit a high surface to volume ratio, which means it has an advantage in sensing gas molecules and improving the specific capacity of Li-ion batteries. In this study, $SnO_2$ nanostructures were grown on a Si substrate using a thermal CVD process with the vapor transport method. The carrier gas was mixed with high purity Ar gas and oxygen gas. The crystalline phase of the as-grown tin oxide nanostructures was affected by the oxygen gas flow rate. The crystallographic property of the as-grown tin oxide nanostructures were investigated by Raman spectroscopy and XRD. The morphology of the as-grown tin oxide nanostructures was confirmed by scanning electron microscopy. As a result, the $SnO_2$ nanostructures were grown directly on Si wafers with moderate thickness and a nanodot surface morphology for a carrier gas mixture ratio of Ar gas 1000 SCCM : $O_2$ gas 10 SCCM.

• Applied Chemistry for Engineering
• /
• v.32 no.1
• /
• pp.28-34
• /
• 2021

SiO2/Ag core-shell nanoparticles were synthesized by combining modified Stöber process and reverse micelle method using acetoxime as a reducing agent in water/dodecylbenzenesulfonic acid (DDBA)/cyclohexane reverse micells. The SiO2/Ag core-shells were studied for structure, morphology and size using UV-visible spectroscopy, XRD, SEM and TEM. The size of a SiO2/Ag core-shell could be controlled by changing the [water]/[DDBA] molar ratio (WR) values. The size and the polydispersity of SiO2/Ag core-shells increased with increase of the WR value. The resultant Ag nanoparticles exhibit a strong surface plasmon resonance (SPR) peak at 430 nm over the amorphous SiO2 nanoparticles. The SPR peak shifted to the red side with increase in nanoparticle size. Conductive pastes with 70 wt% SiO2/Ag core-shell were prepared, and the pastes were coated on the PET films using a screen-printing method. The printed paste film of the SiO2/Ag core-shell showed higher surface resistance than the commercial Ag paste in the range of 460~750 µΩ/sq.

• Journal of the Korean Vacuum Society
• /
• v.22 no.2
• /
• pp.105-110
• /
• 2013

Single crystalline $In_xGa_{1-x}As$ nanowires are grown on Si (111) substrate via Vapor-Liquid-Solid growth mode using metal-organic chemical vapor deposition. The ternary nanowires have been grown with various growth conditions and examined by electron microscopy. The alloy compositions of the nanowires has been investigated using Energy-dispersive X-ray spectroscopy. We have found that the composition gradient of the nanowire becomes larger with growth temperature and V/III ratio.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.107-107
• /
• 2010

ZnO는 상온에서 에너지 밴드갭이 3.37 eV 이고 엑시톤 속박에너지가 60 meV 인 넓은 에너지 띠를 가진 반도체이다. ZnO 반도체는 고에너지 영역에서 광투과율 및 에너지 수집율이 큰 특성을 가지고 있기 때문에 단파장 영역에서 작동하는 발광 다이오드나 반도체레이저 소자 응용에 사용되고 있다. 이와 더불어 액정디스플레이, 유기발광소자 및 태양전지에서 투명 산화물 전극으로 많은 응용이 되고 있다. 본 연구에서는 p-type Si 기판 위에 ZnO 나노입자 형성과 구조적 성질과 전자적 성질에 대하여 조사하였다. ZnO 나노입자를 형성하기 위해 ethanol에 zinc acetate dehydrate (5 wt%)을 적절히 분산시킨 $Zn(CH_3COO)_2H_2O\;+\;CH_3OH$ 용액을 스핀 코팅하여 산소 분위기에서 각각 $300^{\circ}C$, $500^{\circ}C$, $700^{\circ}C$ 및 $900^{\circ}C$로 각각 2시간 동안 열처리 하였다. X-ray 회절 실험 결과는 열처리 온도에 관계없이 ZnO (0001)의 피크가 관측되었다. 원자힘 현미경 이미지상으로 열처리 온도에 따른 ZnO 나노입자의 표면상태의 변화와 나노입자의 크기의 변화를 확인하였다. X-ray 광전자 분광 스펙트럼 결과는 Zn $2p_{3/2}$와 O 1s의 전자상태 스펙트럼을 분석하여 ZnO 나노입자가 형성됨을 보여주었다. 본 연구를 통하여 용액방법을 사용하여 제작된 ZnO 나노입자의 열처리 온도변화에 따른 구조적 성질과 전자적 성질을 이해하는데 도움을 줄 것이다.