• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.244-245
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• 2010

최근 광전자 분야에서는 미래 에너지 자원에 대한 관심과 함께 GaN 기반 발광다이오드 및 태양전지 연구가 활발히 진행되고 있다. GaN는 높은 전자 이동도와 높은 포화 속도 등의 광전자 소자에 유리한 특성을 가지고 있으나, 고 인듐 함유량과 막질의 우수한 특성을 동시에 구현하는 것은 매우 어렵다. 이를 극복하기 위한 방법으로써 선택 영역 박막 성장법(Selective Area Growth)은 마스크 패터닝을 통해 제한된 영역에서만 박막을 성장하는 방법으로써 GaN의 막질을 향상 시킬 수 있는 방법으로 주목받고 있다. 본 논문에서는 대면적 기판에서 GaN의 막질 향상뿐만 아니라 고인듐 InGaN 박막 성장을 위하여 서브마이크로미터 주기와 크기를 갖는 홀 패턴을 포토리소그라피 공정 최적화를 통해 구현할 수 있는 방법에 대해 논의한다. 그림. 1은 사파이어 기판 위에 선택 영역 박막 성장법을 이용하여 성장한 n-GaN/활성층/p-GaN의 구조를 나타낸 그림이다. 이를 통하여 서브마이크로미터 스케일의 반극성 InGaN면 위에 높은 인듐 함유량을 가지면서도 우수한 특성을 갖는 박막을 얻을 수 있다. 본 실험을 위하여 사파이어 기판 위에 SiO2를 증착한 후 포토레지스트(AZ5206)을 도포하고 포토리소그라피 공정을 진행하여 2um 크기 및 간격을 갖는 패턴을 형성했다. 그림. 2는 AZ5206에 UV를 조사(5초)하고 현상(23초)한 패턴을 윗면(그림. 2(a))과 $45^{\circ}$ 기울인 면(그림. 2(b)) 에서 본 SEM(Scanning Electron Microscope) 사진이다. 이를 통해 약 2.2um의 홀 패턴이 선명하게 형성 됨을 볼 수 있다. 그 후 수백나노 직경의 홀을 만들기 위해서 리플로우 공정을 수행한다. 그림. 3은 리플로우 온도에 따른 패턴의 홀 모양을 AFM(Atomic Force Microscope)을 이용하여 측정한 표면의 사진이다. 이를 통해 2차원 평면에서 리플로우 온도 및 시간에 따른 변화를 볼 수 있다. 그림.3의 (a)는 리플로우 공정을 진행하기 전 패턴이고, (b)는 $150^{\circ}C$에서 2분, (c)는 $160^{\circ}C$에서 2분 (d)는 $170^{\circ}C$에서 2분 동안 리플로우 공정을 진행한 패턴이다. $150^{\circ}C$와 $160^{\circ}C$에서는 직경에 큰 변화가 없었고, $160^{\circ}C$에서는 시료별 현상 시간 오차에 따라 홀의 크기가 커지는 경향이 나타났다. 그러나 $170^{\circ}C$에서 2분간 리플로우 한 시료 (그림. 3(d))의 경우는 홀의 직경이 ~970nm 정도로 줄어든 것을 볼 수 있다. 홀의 크기를 보다 명확히 표현하기 위해 그림.3에 대응시켜 단면을 스캔한 그래프가 그림.4에 나타나 있다. 그림.4의 (a) 및 (b)의 경우 포토레지스트의 높이 및 간격이 일정하므로, 리플로우에 의한 영향은 거의 없었다. 그림. 4(c)의 경우 포토레지스트의 높이가 그림.4(a)에 비해 ~25nm 정도 낮은 것으로 볼 때, 과도 현상 및 약간의 리플로우가 나타났을 가능성이 크다. 그림. 4(d)에서는 ~970nm의 홀 크기가 나타나서 본 연구에서 목표로 하는 나노 홀 크기에 가장 가까워짐을 확인할 수 있었다. 따라서, $170^{\circ}C$ 이상의 온도와 2분 이상의 리플로우 시간 조건에서 선택 영역 성장을 위한 나노 홀 마스크의 크기를 제어할 수 있음을 확인하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.469-469
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• 2011

고효율 염료감응형 태양전지(DSSC, Dye-Sensitized Solar Cell)의 구현을 위해서 유용한 방법중 하나는 정렬된 기공 (pore)을 $TiO_2$막 내에 형성시키는 것이다. 메조포러스 (mesoporous) $TiO_2$막은 dip coating이나 spin coating과 같은 방법으로 주로 증착되고 있으며, P123이나 F127과 같은 amphiphilic triblock copolymer를 메조포러스 구조를 만들기 위한 뼈대로 사용하고 있다. 또한, 이렇게 생성된 구조에서 amphiphilic triblock copolymer는 열처리 공정을 통하여 쉽게 제거될 수 있다. 고효율 태양전지를 구현하는 또 다른 방법으로는 패턴 된 기판을 사용하는 것이다. 패턴 된 기판은 빛의 반사를 억제하여 흡수율을 높이는 역할을 한다. 그러나 패턴 된 기판 위에서 메조포러스 $TiO_2$막의 형성에 관한 연구는 부족한 실정이다. 본 연구에서는 spin coating 방법으로 패턴 된 Si (111) 기판 위에 메조포러스 $TiO_2$를 성장하고 그 미세구조를 분석하였다. 패턴 된 기판은 nanosphere lithography(NSL) 법으로 mask를 증착한 후 건식 식각 (dry etching) 공정을 통해서 제작되었으며, 마스크와 불순물 등 은 초음파 세척 등으로 제거되었다. 메조포러스 $TiO_2$막은 1-propanol, P123, titanium isopropoxide와 HCl을 섞어 만든 용액으로 1 cm${\times}$1 cm 기판 위에 3000 rpm과 4000 rpm으로 각각 증착하였으며, 5일 동안 4도에서 에이징한 후 350도에서 3시간 열처리하였다. 이렇게 형성한 메조포러스 막의 형상과 미세구조적 특성이 주사전자현미경(SEM, scanning electron microscope), X-선 회절(XRD, X-ray diffraction) 등을 이용하여 연구되었다. 특히, 증착 조건에 따른 메조포러스 $TiO_2$박막의 형성 기구에 관한 고찰이 진행되었다. 나아가, $TiO_2$박막과 패턴 사이에 형성되는 계면 구조에 관한 연구를 투과전자현미경을 이용하여 진행하였다.

• Journal of the Korea Concrete Institute
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• v.29 no.1
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• pp.65-75
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• 2017

C-S-H phase is the most abundant reaction product, occupying about 50~60% of cement paste volume. The phase is also responsible for most of engineering properties of cement paste. This is not because it is intrinsically strong or stable, but because it forms a continuous layer that binds together the original cement particles into a cohesive whole. The binding ability of C-S-H phase arises from its nanometer-level structure. In terms of chloride penetration in concrete, C-S-H phase is known to adsorb chloride ions, however, its mechanism is very complicated and still not clear. The purpose of this study is to examine the interaction between chloride ions and C-S-H phase with various Ca/Si ratios and identify the adsorption mechanism. C-S-H phase can absorb chloride ions with 3 steps. In the C-S-H phase with low Ca/Si ratios, momentary physical adsorption could not be expected. Physical adsorption is strongly dependent on electro-kinetic interaction between surface area of C-S-H phase and chloride ions. For C-S-H phase with high Ca/Si ratio, electrical kinetic interaction was strongly activated and the amount of surface complexation increased. However, chemical adsorption could not be activated for C-S-H phase with high Ca/Si ratio. The reason can be explained in such a speculation that chloride ions cannot be penetrated and adsorbed chemically. Thus, the maximum chloride adsorption capacity was obtained from the C-S-H phase with a 1.50 Ca/Si ratio.

• Clean Technology
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• v.27 no.4
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• pp.359-366
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• 2021

Halloysite nanotubes (HNTs), the multiwalled clay mineral with the composition of Al₂Si₂O₅(OH)₄·nH₂O, have been highlighted as a low-cost adsorbent for the removal of dyes from wastewater. Although a powder of halloysite presents a high specific surface area, forming media are significantly considered due to sludge-clogging induced by the water-bound agglomeration. However, higher firing temperature to achieve the structural durability of the media and lower utilization rate due to longer penetration depth into the media act as hurdles to increase the dye-adsorption capacity. In this work, the retention of the adsorption capacity of halloysite was evaluated with methylene blue solution after the heat treatment at 750 ℃. In order to improve the utilization rate, tubular media were fabricated by extrusion. The images taken by transmission electron microscopy show that HNTs present excellent structural stability under heat treatment. The HNTs also provide superb capacity retention for MB adsorption (93%, 18.5 mg g^-1), while the diatomite and Magnesol^® XL show 22% (7.65 mg g^-1) and 6% (11.7 mg g^-1), respectively. Additionally, compositing with lignin enhances adsorption capacity, and the heat treatment under the hydrogen atmosphere accelerates the adsorption in the early stage. Compared to the rod-type, the tubular halloysite media rapidly increases methylene blue adsorption capacity.

• Composites Research
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• v.30 no.2
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• pp.102-107
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• 2017

The preceramic polymer can realize a variety of complex ceramic structures that can not be obtained by conventional ceramic processes. Polycarbosilane, which is a typical preceramic polymer, can control the molecular structure, molecular weight and molecular weight distribution for preparing complex morphology and microstructure of SiC ceramics, including SiC fiber. In this paper, synthesis and molecular structure control technique of polycarbosilane is explained. The silicon carbide fiber prepared by melt spinning, stabilization and heat treatment, and ceramic fiber composites technology made by PIP process are also discussed. In addition, we introduce an example of the development of a complex silicon carbide material such as a silicon carbide hollow fiber having a nanoporous structure.

• Journal of the Korean Vacuum Society
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• v.20 no.1
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• pp.57-62
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• 2011

We have studied the electrical and magnetic transport properties of tunneling device with FePt magnetic quantum dots. The FePt nanoparticles with a diameter of 8~15 nm were embedded in a $SiO_2$ layer through thermal annealing process at temperature of $800^{\circ}C$ in $N_2$ gas ambient. The electrical properties of the tunneling device were characterized by current-voltage (I-V) measurements under the perpendicular magnetic fields at various temperatures. The nonlinear I-V curves appeared at 20 K, and then it was explained as a conductance blockade by the electron hopping model and tunneling effect through the quantum dots. It was measured also that the negative magneto-resistance ratio increased about 26.2% as increasing external magnetic field up to 9,000 G without regard for an applied electric voltage.

• Journal of Sensor Science and Technology
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• v.29 no.4
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• pp.255-260
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• 2020

In this study, we developed a method of improving the surface-enhanced Raman spectroscopy (SERS) response characteristics by depositing a nanoporous Ag metal thin film through cluster source sputtering after forming a pyramidal texture structure on the Si substrate surface. A reactive ion etching (RIE) system with a metal mesh inside the system was used to form a pyramidal texture structure on the Si surface without following a complicated photolithography process, unlike in case of the conventional RIE system. The size of the texture structure increased with the RIE process time. However, after a process time of 60 min, the size of the structure did not increase but tended to saturate. When the RF power increased from 200 to 250 W, the size of the pyramidal texture structure increased from 0.45 to 0.8 ㎛. The SERS response characteristics were measured by depositing approximately 1.5 ㎛ of nanoporous Ag metal thin film through cluster sputtering on the formed texture structure by varying the RIE process conditions. The Raman signal strength of the nanoporous Ag metal thin film deposited on the Si substrate with the texture structure was higher than that deposited on the general silicon substrate by up to 19%. The Raman response characteristics were influenced by the pyramid size and the number of pyramids per unit area but appeared to be influenced more by the number of pyramids per unit area. Therefore, further studies are required in this regard.

• Analytical Science and Technology
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• v.23 no.3
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• pp.233-239
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• 2010

Pure macroporous silica matrix using a template of polystyrene (PS) was prepared by the sol-gel method. Macroporous Ag-$SiO_2$ composite materials, which were homogeneously dispersed with Ag particles in the macropores, were successfully fabricated. The pure porous silica had ordered pore sizes of 100 nm and 200 nm, which was adjusted under consideration of the template size. The macroporous Ag-$SiO_2$ composite showed the ideal ordered distribution of the pore in case of the adding of 3 wt% $AgNO_3$ under consideration of controlling of the pore size as well as microstructural observation of $AgNO_3$concentration. The macroporous Ag-$SiO_2$ composites had ordered 100 nm and 200 nm pores, and the Ag particles within the matrix showed the size of 15~20 nm.

• Korean Journal of Materials Research
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• v.23 no.10
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• pp.586-591
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• 2013

The printing of nanomaterials onto certain substrates is one of the key technologies behind high-speed interconnection and high-performance electronic devices. For the printing of next-generation electronic devices, a printing process which can be applied to a flexible substrate is needed. A printing process on a flexible substrate requires a lowtemperature, non-vacuum process due to the physical properties of the substrate. In this study, we obtained well-ordered Ag nanowires using modified gravure printing techniques. Ag nanowires are synthesized by a silver nitrate ($AgNO_3$) reduction process in an ethylene glycol solution. Ag nanowires were well aligned by hydrodynamic force on a micro-engraved Si substrate. With the three-dimensional structure of polydimethylsiloxane (PDMS), which has an inverse morphology relative to the micro-engraved Si substrate, the sub-micron alignment of Ag nanowires is possible. This technique can solve the performance problems associated with conventional organic materials. Also, given that this technique enables large-area printing, it has great applicability not only as a next-generation printing technology but also in a range of other fields.

• Journal of the Korean Vacuum Society
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• v.19 no.4
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• pp.293-299
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• 2010

Vertically aligned ZnO nanorods on Si (111) substrate were prepared by hydrothermal method. The ZnO nanorods on spin-coated seed layer were synthesized at $140^{\circ}C$ for 6 hours in autoclave and were thermally annealed in argon atmosphere for 20 minutes at temperature of 300, 500, $700^{\circ}C$. The effects of the thermal annealing on the structural and optical properties of the grown on ZnO nanorods were investigated by X-ray diffraction (XRD), field-emission scanning electron microscopy (FE-SEM), photoluminescence (PL). All the ZnO nanorods show a strong ZnO (002) and weak (004) diffraction peak, indicating c-axis preferred orientation. The residual stress of the ZnO nanorods is changed from compressive to tensile by increasing annealing temperature. The hexagonal shaped ZnO nanorods are observed. The PL spectra of the ZnO nanorods show a sharp near-band-edge emission (NBE) at 3.2 eV, which is generated by the free-exciton recombination and a broad deep-level emission (DLE) at about 2.12~1.96 eV, which is caused by the defects in the ZnO nanorods. The intensity of the NBE peak is decreased and the DLE peak is red-shifted due to oxygen-related defects by thermal annealing.