• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2000년도 하계학술대회 논문집
• /
• pp.532-535
• /
• 2000

We have fabricated a sensor system for on-line monitoring the oxygen permeability and diffusivity of six different polymer films using the miniaturized 6 cathode(Ag)-single anode(Ag/AgCl) type hexagonal oxygen electrode. This system consists of multiple input front-end electronics, signal conditioning circuit using the embedded microcontroller 80C196KC, PC interface circuit and PC with the OS for microcontroller and the operating program for this system. The digital low-[ass filter was programmed and the simulated filter characteristics were enough to eliminate the noise from sensor signal. According to the experimental results, the linearity coefficients of the output voltage to oxygen partial pressure for each sensor electrode of six cathode type oxygen sensor are 0.998, 0.997, 0.998, 0.997, 0.997, 0.997 respectively, and the response times are all within 4 minutes.

• 한국전기전자재료학회논문지
• /
• 제24권3호
• /
• pp.224-228
• /
• 2011

This research, integratable capacitive relative humidity sensor was produced using polyimide on glass substrate. Also, at the time of upper electrode formation, upper electrode grain size was affected by giving changes to sputtering condition. Through this analyzing electrical characteristics affect from capacitive relative humidity sensor was possible. Capacitance of capacitive relative humidity sensor was 330 pF, linearity of 0.6%FS and it showed less than 3% of low hysterisis. Specially, hysterisis was affected more from interface than interstitial. Also was affected by the grain size which is one of the formation condition of upper electrode.

• JSTS:Journal of Semiconductor Technology and Science
• /
• 제10권4호
• /
• pp.300-308
• /
• 2010

This paper describes the development of a low-power electrocardiogram (ECG) touch sensor intended for the use with two dry metal electrodes. An equivalent ECG extraction circuit model encountered in a ground-free two-electrode configuration is investigated for an optimal sensor read-out circuit design criteria. From the equivalent circuit model, (1) maximum sensor resolution is derived based on the electrode's background thermal noise, which originates from high electrode-skin contact impedance, together with the input referred noise of instrumentation amplifier (IA), (2) 60 Hz electrostatic coupling from mains and motion artifact are also considered to determine minimum requirement of common mode rejection ratio (CMRR) and input impedance of IA. A dedicated ECG read-out front end incorporating chopping scheme is introduced to provide an input referred circuit noise of 1.3 ${\mu}V_{rms}$ over 0.5 Hz ~ 200 Hz, CMRR of IA > 100 dB, sensor resolution of 7 bits, and dissipating only 36 ${\mu}W$. Together with 8 bits synchronous successive approximation register (SAR) ADC, the sensor IC chip is implemented in 0.18 ${\mu}m$ CMOS technology and integrated on a 5 cm $\times$ 8 cm PCB with two copper patterned electrodes. With the help of proposed touch sensor, ECG signal containing QRS complex and P, T waves are successfully extracted by simply touching the electrodes with two thumbs.

• 한국전기전자재료학회논문지
• /
• 제27권9호
• /
• pp.566-570
• /
• 2014

Electrode pattern effects on the capacitive humidity sensor were investigated. The fabrication of the capacitive humidity sensor was formed with three steps. The bottom electrode was formed on the silicon substrate with Pt/Ti thin layer by using shadow mask and e-beam evaporator. The photo sensitive polyimide was formed on the bottom electrode by using photolithography process as a humidity sensitive thin film. The upper electrode was formed on the polyimide thin film with Pt/Ti thin layer by using e-beam evaporator and lift-off method. Three electrode patterns, such as circle, square, and triangle pattern, were used and changed the sizes to investigate the effects. The capacitances of the sensors were decreased 622 to 584 pF with the area decreament of patterns 250,000 to $196,250{\mu}m^2$. From these results, a capacitive humidity sensor with photo sensitive polyimide is expected to be applied to a high sensitive humidity sensor.

• 공업화학
• /
• 제25권2호
• /
• pp.193-197
• /
• 2014

피치계 활성탄소섬유의 유해가스 감응특성을 알아보고자 피치계 활성탄소섬유와 폴리비닐알코올(PVA)을 이용하여 가스센서용 전극을 제조하였다. 제조된 가스센서용 활성탄소섬유 전극의 물리화학적 특성은 주사전자현미경(SEM) 및 비표면적 측정기(BET)를 이용하여 분석하였다. 또한, 전극의 유해가스 감응특성은 $NH_3$, NO 및 $CO_2$와 같은 여러 유독가스를 이용하여 확인하였다. 가스센서용 활성탄소섬유 전극의 비표면적은 바인더인 PVA에 의하여 활성탄소섬유보다 33% 감소하였지만, 전극의 기공크기분포는 PVA에 의하여 크게 영향을 받지 않았다. 가스센서용 활성탄소섬유 전극은 반도체 기반 가스센서와는 다르게 전자도약에 의해서 유해가스를 감응하였다. 본 연구에서, 활성탄소섬유 전극의 저항은 100 ppm의 $NH_3$ 유해가스에 대하여 7.5% 감소하였으며, 그 $NH_3$ 가스 감응특성이 다른 유해가스보다 뛰어남을 확인하였다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2011년도 춘계학술대회 논문집
• /
• pp.1103-1104
• /
• 2011

• 한국전기전자재료학회논문지
• /
• 제30권9호
• /
• pp.589-595
• /
• 2017

MOS-FET structured gas sensors were manufactured using MWCNTs for application as NOx gas sensors. As the gas sensors need to be heated to facilitate desorption of the gas molecules, heat dispersion plays a key role in boosting the degree of uniformity of molecular desorption. We report the desorption of gas molecules from the sensor at $150^{\circ}C$ for different sensor electrode gaps (30, 60, and $90{\mu}m$). The COMSOL analysis program was used to verify the process of heat dispersion. For heat analysis, structure of FET gas sensor modeling was proceeded. In addition, a property value of the material was used for two-dimensional modeling. To ascertain the degree of heat dispersion by FEM, the governing equations were presented as partial differential equations. The heat analysis revealed that although a large electrode gap is advantageous for effective gas adsorption, consideration of the heat dispersion gradient indicated that the optimal electrode gap for the sensor is $60{\mu}m$.

• Bulletin of the Korean Chemical Society
• /
• 제31권11호
• /
• pp.3128-3132
• /
• 2010

A disposable solid-state pH sensor was realized by utilizing two nanoporous Pt (npPt) electrodes and a copolyelectrolytic junction. One nanoporous Pt electrode was to measure the pH as an indicating electrode (pH-IE) and the other assembled with copolyelectrolytic junction was to maintain constant open circuit potential ($E_{oc}$) as a solid-state reference electrode (SSRE). The copolyelectrolytic junction was composed of cationic and anionic polymers immobilized by photo-polymerization of N,N'-methylenebisacrylamide, making buffered electrolytic environment on the SSRE. It was expected to make. The nanoporous Pt surrounded by a constant pH excellently worked as a solid state reference electrode so as to stabilize the system within 30 s and retain the electrochemical environment regardless of unknown sample solutions. Combination between the SSRE and the pH-IE commonly based on nanoporous Pt yielded a complete solid-state pH sensor that requires no internal filling solution. The solid state pH sensing chip is simple and easy to fabricate so that it could be practically used for disposable purposes. Moreover, the solid-state pH sensor successfully functions in calibration-free mode in a variety of buffers and surfactant samples.

• 센서학회지
• /
• 제30권3호
• /
• pp.175-180
• /
• 2021

In this paper, methods for improving the sensitivity of gas sensors to NO₂ gas are presented. A gas sensor was fabricated based on an SnO₂ nanowire network using the vapor-phase-growth method. In the gas sensor, the Au electrode was replaced with a fluorinedoped tin oxide (FTO) electrode, to achieve high sensitivity at low temperatures and concentrations. The gas sensor with the FTO electrode was more sensitive to NO₂ gas than the sensor with the Au electrode: notably, both sensors were based on typical SnO₂ nanowire network. When the Au electrode was replaced by the FTO electrode, the sensitivity improved, as the contact resistance decreased and the surface-to-volume ratio increased. The morphological features of the fabricated gas sensor were characterized in detail via field-emission scanning electron microscopy and X-ray diffraction analysis.

• 센서학회지
• /
• 제19권5호
• /
• pp.391-397
• /
• 2010

This paper proposes a differential structure sensor for detecting Ringer's solution exhaustion, in which three C-type electrodes of 10 mm width are disposed on a ringer hose at a distance of 5 mm each other in the direction of Ringer's solution flow. In the center of middle electrode, two capacitances are formed at the proposed sensor. When ringer hose is filled with Ringer's solution, there is no difference between two capacitances. But capacitance difference exist under the Ringer's solution shortage, because the shortage causes the hose filled with air from the top position electrode. The capacitance difference got to maximum 1.81 pF, when air was filled between top and middle electrode and the last of hose was filled with 10 % dextrose injection Ringer's solution. The capacitance difference varied with hose-wraparound coverage of electrodes as well as the width of them. For hose-wraparound electrode coverage of 90 % and 70 %, the maximum capacitance difference was 1.81 pF and 1.56 pF, respectively. A differential charge amplifier converted the capacitance difference to electric signal, and minimized electrodes' adhering problem and external noise coupling problem.