• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.613-617
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• 2001

The test items like as endurance, air leakage and oil endurance test is requested for reliability evaluation about O-ring which is a kind of core machinery accessories of semi-conduct manufacturing equipment. For verification of these, we design and manufactured a test system for endurance, air leakage and oil endurance of O-ring for semi-conduct manufacturing equipment, and also performed the test for two kinds of O-ring, as it were Viton and Kalretz. The characteristics of this test equipment consist in realization of the test conditions of semi-conduct manufacturing equipment and satisfying the test method. The test conditions are cut gas, vacuum grade, temperature and revolution numbers in the endurance test system, vacuum grade and temperature in the air leakage test system, temperature and time in the oil endurance test system. The separating test results for wearing which is an oil endurance test item, the wearing index of domestic produced Viton O-ring is higher than foreign product by 2%, wearing rate of Kalretz O-ring better than Viton O-ring by 17%, and particles existed in various place. The test result of air leakage which is measured through the RGA sensor used Helium, the vacuum grade was $10^-3$Torr. And the test result of oil endurance, the volume change rate was 7~15%. Hereafter, we intend to analysis the reliability test evaluation and to utilize for domestic manufacturing companies by establishing data base and developing reliability softwares.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.19 no.6
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• pp.169-174
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• 2019

Flexure joints are recently used in the ultra-precision mechanism for a telecommunication mirror stage. Flexure joints have several advantages coming from their monolithic characteristics. They can be used to reduce the size of manipulators or to increase the precision of motion. In our research, 6 dof(degree of freedom) mechanism is suggested for micrometer repeatability using a flexure mechanism. To design the 6-dof motion, the 2-dof planar mechanism are designed and assembled to make the 6-dof motion. To achieve a certain performance, it is necessary to define the performance of mechanism that quantifies the characteristics of flexure joints. This paper addresses the analysis and design of the 6-dof parallel manipulator with a flexure joint using a finite element analysis tool. To obtain experimental result, CCD laser displacement sensor is used for the total displacement and the stiffness for the 6-dof flexure mechanism.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.45 no.9
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• pp.734-745
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• 2017

The navigation system of lunar lander are composed of various navigation sensors which have a complementary characteristics such as inertial measurement unit, star tracker, altimeter, velocimeter, and camera for terrain relative navigation to achieve the precision and autonomous navigation capability. The required performance of sensors has to be determined according to the landing scenario and mission requirement. In this paper, the specifications of navigation sensors are investigated through covariance analysis. The reference error model with 77 state vector and measurement model are derived for covariance analysis. The mission requirement is categorized as precision exploration with 90m($3{\sigma}$ ) landing accuracy and area exploration with 6km($3{\sigma}$ ), and the landing scenario is divided into PDI(Powered descent initiation) and DOI(Deorbit initiation) scenario according to the beginning of autonomous navigation. The required specifications of the navigation sensors are derived by analyzing the performance according to the sensor combination and landing scenario.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.9
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• pp.901-908
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• 2013

The introduction of industrial intelligent robot using vision sensor has been interested in automated factory. 2D and 3D vision sensors have used to recognize object and to estimate object pose, which is for packaging parts onto a complete whole. But it is not trivial task due to illumination and various types of objects. Object image has distorted due to illumination that has caused low reliability in recognition. In this paper, recognition method of complex shape object has been proposed. An accurate object region has detected from combined binary image, which has achieved using DoG filter and local adaptive binarization. The object has recognized using neural network, which is trained with sub-divided object class according to object type and rotation angle. Predefined shape model of object and maximal slope have used to estimate the pose of object. The performance has evaluated on ETRI database and recognition rate of 96% has obtained.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.33-40
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• 2010

Multizeros(multiple order zeros) optical beams which belong to the Laguerre-Gaussian beams, have rotational phase and conically-shaped amplitude structures around multizeros points in their phase and amplitude profiles, respectively. Especially, they have their own characteristics that the multizero points do not vanish over free-space propagation. Therefore, they are expected to be adequate for the applications of long-range optical measurement by using their multizero points as optical markers for the deformation sensing. In this paper, fundamental properties of multizeros optical beams for long-range optical measurement applications are investigated and clarified. In particular, the mathematical investigations are described on the characteristics of multizeoros optical beams such as (1) separation of a multizero into isolated single order zeros, (2) topological charge of zeros distribution which are induced by superposing them. And also the outline of a fundamental experiment and its result are explained briefly.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.41-46
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• 2017

Magnetically levitated (Maglev) vehicles maintain a constant air gap between guideway and car bogie, and thereby achieves non-contact riding. Since the straightness and the flatness of the guideway directly affect the stability of levitation as well as the ride comfort, it is necessary to monitor the status of the guideway and to alert the train operators to any abnormal conditions. In order to develop a signal processing algorithm that extracts guideway irregularities from sensor data, virtual testing using a simulation model would be convenient for analyzing the exact effects of any input as long as the model describes the actual system accurately. Simulation model can also be used as an estimation model. In this paper, we develop a state-space dynamic model of a maglev vehicle system, running on the guideway that contains jumps. This model contains not only the dynamics of the vehicle, but also the descriptions of the power amplifier, the anti-aliasing filter and the sampling delay. A test rig is built for the validation of the model. The test rig consists of a small-scale maglev vehicle, tracks with artificial jumps, and various sensors measuring displacements, accelerations, and coil currents. The experimental data matches well with those from the simulation model, indicating the validity of the model.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.8
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• pp.17-25
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• 1998

Aluminum alloys have low density, relatively high strength and yield strength, good plasticity, good machinability, and high corrosion and acid resistance. Therefore, they are suitable for large containers for the food, chemical and other industries. Large containers are often bodies of revolution consisting of shell courses, stiffening rings, heads and other elements joined by annular welds. Larger containers have longer welds and require greater leak-tightness and higher weld mechanical properties. The LNG tank consists of aluminum plates with various sizes, so its construction should by divided by several sections. Moreover, each section has its own sub-section consisted of several aluminum plates. To guarantee the quality of huge LNG tank, therefore, the precise control of plate dimension should by urgently needed in conjunction with the appropriate selection of process parameters such as cutting speed, depth of cut, rotational speed and so on. In this paper, a manufacturing system was developed to implement automatic circular tracking in height direction and automatic circular interpolation in depth of cut direction. Also, the neural network based on the backpropagation algorithm was used to predict the cutting quality and motor load related with the life time of the developed system. It was revealed that the manufacturing system and the neural network could be effectively applied to the bevelling process and to predict the quality of machined area and the motor load.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.289-290
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• 2006

In general, atomic force microscope (AFM) used for metrological purpose has measuring range less than a few hundred micrometers. We design and fabricate an AFM with long measuring range of $200mm{\times}200mm$ in X and Y axes. The whole stage system is composed of surface plate, global stage, microstage. By combining global stage and microstage, the fine and long movement can be provided. We measure the position of the stage and angular motions of the stage by laser interferometer. A piezoresistive type cantilever is used for compact and long term stability and a flexure structure with PZT and capacitive sensor is used for Z axis feedback control. Since the system is composed of various actuators and sensors, a real time control program is required for the implementation of AFM. Therefore, in this work, we designed a multi-axis control program using a FPGA module, which has various functions such as interferometer signal converting, PID control and data acquisition with triggering. The control program achieves a loop rate more than 500 kHz and will be applied for the measurement of grating pitch and step height.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1033-1036
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• 2002

Wafer bonding methods such as fusion and anodic bonding suffer from high temperature treatment, long processing time, and possible damage to the micro-scale sensor or actuators. In the localized bonding process, beating was conducted locally while the whole wafer is maintained at a relatively low temperature. But previous research of localized heating has some problems, such as non-uniform soldering due to non-uniform heating and micro crack formation on the glass capsule by thermal stress effect. To address this non-uniformity problem, a new heater configuration is being proposed. By keeping several points on the heater strip at calculated and constant potential, more uniform heating, hence more reliable wafer bonding could be achieved. The proposed scheme has been successfully demonstrated, and the result shows that it will be very useful in hermetic packaging. Less than 0.2 ㎫ contact Pressure were used for bonding with 150 ㎃ current input for 50${\mu}{\textrm}{m}$ width, 2${\mu}{\textrm}{m}$ height and 8mm $\times$ 8mm, 5mm$\times$5mm, 3mm $\times$ 3mm sized phosphorus-doped poly-silicon micro heater. The temperature can be raised at the bonding region to 80$0^{\circ}C$, and it was enough to achieve a strong and reliable bonding in 3minutes. The IR camera test results show improved uniformity in heat distribution compared with conventional micro heaters. For gross leak check, IPA (Isopropanol Alcohol) was used. Since IPA has better wetability than water, it can easily penetrate small openings, and is more suitable for gross leak check. The pass ratio of bonded dies was 70%, for conventional localized heating, and 85% for newly developed FP scheme. The bonding strength was more than 30㎫ for FP scheme packaging, which shows that FP scheme can be a good candidate for micro scale hermetic packaging.

• Journal of the Korean Society of Industry Convergence
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• v.17 no.3
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• pp.93-102
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• 2014

Recently the interest in permanent magnet alternating motor using for electric compressor become great. Especially the research on Interior Permanent Magnet Motor has been doing actively for its advantages in the energy density and the efficiency. In order to control the output of motor to the desired value, the current control or speed control of motor are required. The accurate detection of rotor position and speed information are necessary for the control of motor. In general, the encoder, hall sensor, and resolver are used to obtain the information of motor position and speed and the speed detection algorithm, M/T method, is applied. However, the M/T method causes the error depending on rotor speed. Therefore, this M/T speed detection method is not perfect. In this paper, it is proposed that the PI control with a 1st transfer function and the integration element between velocity and position are composed in series and this feeds back to the reference value of position angle. The proposed algorithm is a function of the integral elements 2nd term, speed element, is used as an output. Thus, it is possible to detect the correct speed by configuring like the mechanical structure similarly. The proposed algorithm is verified by using PSIM DLL and is applied to the BLAC motor drive. And also it is confirmed that this system estimates the accurate speed regardless of rotor speed changes. As a example, the experimental results and simulations shows that the proposed method is very effective.