Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.05a
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- Pages.289-290
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- 2006
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- 2005-8446(pISSN)
Development of Multi-Axis Control Program for Long Range AFM Using an FPGA Module
FPGA 모듈을 이용한 Long Range AFM용 다축 제어 프로그램 개발
- Lee J.Y. (Length/Time Group, KRISS) ;
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Eom T.B.
(Length/Time Group, KRISS) ;
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Kim J.W.
(Length/Time Group, KRISS) ;
- Kang C.S. (Length/Time Group, KRISS) ;
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Kim J.A.
(Length/Time Group, KRISS)
- 이재윤 (한국표준과학연구원 길이/시간그룹) ;
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엄태봉
(한국표준과학연구원 길이/시간그룹) ;
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김재완
(한국표준과학연구원 길이/시간그룹) ;
- 강주식 (한국표준과학연구원 길이/시간그룹) ;
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김종안
(한국표준과학연구원 길이/시간그룹)
- Published : 2006.05.01
Abstract
In general, atomic force microscope (AFM) used for metrological purpose has measuring range less than a few hundred micrometers. We design and fabricate an AFM with long measuring range of